NAMUR

Note) For other voltages, please contact SMC. 3-12-1 A Series VFN2000N Dimensions (mm) VFN2120N--02 148 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 37 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 3-1/4 3 4 5 1 Manual override (Non-locking) 23 23 VFN2220N--02 224.5 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 189 3-1/4 3 4 5 1

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

HRX-OM-Z002

. 9-5 9.1.6 HRLE090-W-40. 9-6 9.2 REFRIGERANT AND GWP VALUE . 9-7 9.3 DIMENSIONS . 9-8 9.3.1 HRLE050-A-20. 9-8 9.3.2 HRLE050-W-20. 9-9 9.3.3 HRLE090-A-20/40. 9-10 9.3.4 HRLE090-W-20/40. 9-11 9.4 FLOW DIAGRAM . 9-12 9.4.1 HRLE050-A-20-*,HRLE090-A-20/40. 9-12 9.4.2 HRLE050-W-20-*,HRLE090-W-20/40. 9-12 9.5 COOLING CAPACITY . 9-13 9.5.1 HRLE050-A-20. 9-13 9.5.2 HRLE050-W-20. 9-13 9.5.3 HRLE090

NVEPA|VEFseies

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

OML0002-C

How to Order IZN10 01 P 06 Z B1 IZN10 High frequency AC nozzle type Series name Nozzle shape NIL 01 02 11 Piping female Note 1) Rc1/8 Type Energy saving charge elimination nozzle Large flow nozzle Output specification NIL NPN P PNP Piping diameter 06 f6: metric 07 f6.351/4"): inch 16 f6: metric (elbow) 17 f6.351/4"): inch (elbow) Power supply cable NIL 3m Z 10m N Not provided Bracket NIL

asilltr

400 (4') Auto-switch Mounting Kit 056-150 BQ-z 20G400 BQ-3 Series NCDQT Magnet Center D, S, DC Type T Type Borc D Type S T y p e ' DC Type ' -T rtpe A B , " , ,.

Air Cylinder NCQ7 Series Compact Cylinder

400 (4') Auto-switch Mounting Kit 056-150 BQ-z 20G400 BQ-3 Series NCDQT Magnet Center D, S, DC Type T Type Borc D Type S T y p e ' DC Type ' -T rtpe A B , " , ,.

Fieldbus system EtherCAT compatible SI Unit

, dual-side D code Plug, Straight 5 m EX9-AC100EN-PSPS: Cable with M12 connector, dual-side D code Plug, Straight 10 m EX9-AC005EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 0.5 m EX9-AC010EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 1 m EX9-AC020EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 2 m EX9-AC030EN-PAPA: Cable with M12 connector

ITV0000

VAC ERR ERR ERR ERR Note) Stations are counted starting from the D side. 50 56 D side U side 1 2 . stations 50 9 3 (8) 6.5 6.5 Dimensions in inch are noted in parentheses. 1 1 82 89.5 SUP, VAC z port 3 3 (6, 1/4") 40 40 EXH, ATM c port 25 25 (6, 1/4") 2 2 2 5 5 OUT x port (4, 5/32") Breathing hole Note) 3.7 (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page

ISA2

Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock

HRX-OM-Y098

(IEC 60417-5032-1) How to see the serial number Z o 001 (Jan 2021) X R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 1 o Repeated from O to Z in alphabetical order, with O for January and Z for December 2021 Z Repeated from A to Z in alphabetical order 2022 A 2 P 2023 B 3 Q Fig. 1-1 Position of the product label HRL Series 1.4 Product Label 1-3 HRX-OM-Y098 Chapter 1 Safety Instructions

Auto Switch Guide

(Including bracket, screw) Applicable bore size (mm) 40 BMU2-040 50 BMU2-040 63 BMU2-040 Cylinder series MDU 8-30-60 61 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Tie-rod Mounting Style Reed switchD-A53, D-A54, D-A56, D-A64 D-A67, D-A59W Solid state switchD-F59, D-F5P D-J59, D-J51, D-F5BAL D-F59W, D-F5PW, D-J59W D-F59F, D-F5NTL

Auto Switch Guide

(Including bracket, screw) Applicable bore size (mm) 40 BMU2-040 50 BMU2-040 63 BMU2-040 Cylinder series MDU 8-30-60 61 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Tie-rod Mounting Style Reed switchD-A53, D-A54, D-A56, D-A64 D-A67, D-A59W Solid state switchD-F59, D-F5P D-J59, D-J51, D-F5BAL D-F59W, D-F5PW, D-J59W D-F59F, D-F5NTL

Auto Switch Guide

(Including bracket, screw) Applicable bore size (mm) 40 BMU2-040 50 BMU2-040 63 BMU2-040 Cylinder series MDU 8-30-60 61 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Tie-rod Mounting Style Reed switchD-A53, D-A54, D-A56, D-A64 D-A67, D-A59W Solid state switchD-F59, D-F5P D-J59, D-J51, D-F5BAL D-F59W, D-F5PW, D-J59W D-F59F, D-F5NTL

CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80

Auto Switch Guide

Applicable crimp-style terminal 1.25Y-3L, 1.25-3.5S, 1.25-4M 7-9-39 40 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Band Mounting Style Caution Reed switchD-C73, D-C76, D-C80, D-C73C, D-C80C Solid state switchD-H7A1, D-H7A2, D-H7B, D-H7BAL D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW 1.

Electro-Pneumatic Valve NVEP/NVEF Series

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

1

Applicable bore size B (C) (D) d H NT-02 20 13 (15.0) 12.5 M8 x 1.25 5 NT-03 25, 32 17 (19.6) 16.5 M10 x 1.25 6 NT-04 40 22 (25.4) 21.0 M14 x 1.5 8 Part no.

Compact Vacuum Unit

(During de-energizing) Note 2) 3 times in each direction of X, Y and Z (During de-energizing) Supply Valve/Release Valve Specifications Supply valve Large flow type (N.C.)

E-P HYREG ® Series VY1

00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications