Vacuum Module Series ZX

E D P F Nil Model ZX1 K1 Vacuum switch (E) (D) Adsorption confirmation switch (P) Vacuum switch (ZSE2) ZX1-K1-E (Release to atmospheric pressure) Spacer 1 (ZX1-S1) (For side mounting) Pressure sensor 78 Rc 1/8 EXH port (EXH.)

Thermo-chiller/Rack Mount Type

to 230 VAC) p. 11 Communication Functions pp. 30, 31 VOptions HRR012/018 How to Order With Electric Conductivity Control Function, Applicable to DI Water Piping p. 32 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 12 Applicable to DI Water Piping p. 32 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 12 Inverter Pump Mounted p. 33 Specifications High-Pressure Pump

OMR0031

Specifications LAT3-10 Stroke 10 mm, Resolution 30 m LAT3-20 Stroke 20 mm, Resolution 30 m Card Motor 8 options LAT3-30 Stroke 30 mm, Resolution 30 m (Refer to the table Product LAT3M-50 Stroke 50 mm, Resolution 5 m Number on the right) LAT3F-10 Stroke 10 mm, Resolution 1.25 m LAT3F-20 Stroke 20 mm, Resolution 1.25 m LAT3F-30 Stroke 30 mm, Resolution 1.25 m LAT3F-50 Stroke 50 mm, Resolution

CG5-S

B A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulphuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A D A A C A 8 Magnesium hydroxide A B A A B A 9 Acetylene A A A A A A 10

Prevents Micro-Bubbles

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For detailed specifications, refer to page 8-30-1. Normally closed (NC = b contact), solid state switch (D-F9G/F9H/Y7G/Y7H type) are also available. For details, refer to page 8-30-31 to 8-30-32. D-A90 cannot be mounted on Series MY1HT. Electrical entry (Fetching direction) Type Model Features D-A90 D-Z80 Grommet (In-line) Grommet (In-line) Reed switch Without indicator light 8-12-24

AW

D U With Auto Drain S F W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A H L E IN OUT Bracket (Optional) D NPT 1/4 5 Series AW20~40 Filter Regulator How To Order AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Bowl Symbol 2 8 Applicable Body Size 20 30, 40 Description

LEF-OM002xx

30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200 3,000 Max.acceleration/deceleration

C95

Ht B Auto Switch mounting positions and dimensions [mm] Auto switch operating ranges [mm] D-Z7/Z8, D-Y5/Y7 (W) All models D-Y6, D-Y7 (W) V D-Y7BA Bore Size [mm] Bore Size [mm] D-Z7 D-Z8 D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA A B Hs Ht Hs Ht Hs Ht 14 1.5 25.5 23 26.5 30 7.5 5.5 3.5 23 23 32 32 25 1.5 29.5 26 30 34 8.5 5.5 3.5 26 26 40 40 26.5 2 33.5 31 34.5 31 38 31 7.5 7 3.5 50 50 31.5 2 39 36

LEH_C

) ()Amm b)30 31 =30 1) ()Amm 2) CW () (CW )30 29 30 1 29 8 - (LEC ) (LEC ) () 2:CCW 1:CW () 2:CCW () 1) 1 100 40 100 / LEHZ(J),LEHF,LEHS 50 100 / LEHZJ10L,LEHZJ16L 2) 100 5 50 LEHZ(J) , LEHS 5 20 LEHF10 5 30 LEHF203240 3) 10 2,000 10 0: 0 21 0 1) P.53 8.3 2) 3) 4) P.40 7.1 9 - 6. !

Modular Type Air Filters Series AF

D U With Auto Drain S F W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A H L E IN OUT Bracket (Optional) D NPT 1/4 5 Series AW20~40 Filter Regulator How To Order AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Bowl Symbol 2 8 Applicable Body Size 20 30, 40 Description

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

-www.stevenengineering.com I CX D D-X 2 x 4-J 20MC NA NB MA MB KA C B Data K H S + Stroke ZZ + Stroke (mm) Stroke range Bore size (mm) B MM I K M MA MB MC NA NB P S Y ZZ H J D C KA GA GB 20 25 32 40 50 63 80 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 11 12 22 25 25 25 25 17 17 22 30 35 35 38 11 11 16 16 16 16 20 4 4 4 4 5 5 6 10 10 12 12 15 15 23 M8 x 1.25

One-touch Fittings

57.2 45.2 9 18.1 Q2 Q2 Round type P D 4 to 12 2 x N Q1 2 x O 3 x Applicable tubing *1: D is maximum diameter.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Manifold type D-sub connector Flat ribbon cable Connector Serial Series 10-/21-VQ1000 Plug-in 10-/21-VQ2000 VQ1000 How to Order, Manifold Options VQ2000 How to Order, Manifold Options VQ1000/2000 Model, Standard/Manifold Specifications P. 515 P. 517 P. 521 102110211021VQ1000/2000 1021F kit (D-sub connector) P. 523 VQ1000/2000 1021P kit (Flat

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Manifold type D-sub connector Flat ribbon cable Connector Serial Series 10-/21-VQ1000 Plug-in 10-/21-VQ2000 VQ1000 How to Order, Manifold Options VQ2000 How to Order, Manifold Options VQ1000/2000 Model, Standard/Manifold Specifications P. 515 P. 517 P. 521 102110211021VQ1000/2000 1021F kit (D-sub connector) P. 523 VQ1000/2000 1021P kit (Flat

125

1/4, 3/8, 1/2 [Port 1(P), 2(A), 3(R)] A B PE 8.25 121.9 112.1 104.9 R 3 84.5 P1 15 30 30 15 60 52.5 P 1 A 2 30 33 2 x 5.5 (For mounting) A Air operated: VEX3320 DIN terminal (D) Caution How to Use DIN Terminal Connector Refer to page 1739.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Cushion needle Q + Stroke PG MY1B P P (MY1HG) MY1H MY1H (Hexagon socket head taper plug) 1 (Hexagon socket head taper plug) QQ SS RR YH MY1B PP QQ RR SS A B H NE NH NF MY1M P P (MY1HG) P (Port) P (Port) PP (Hexagon socket head taper plug) (Hexagon socket head taper plug) G G MY1C TTT UU UU TT A N Z + Stroke MY1H P MY1 HT P (Port) (Hexagon socket head taper plug) MY1 W MY2C P P (Port) (Hexagon

Power Clamp Cylinder

A B C CKZT50-A045B 30 to 105 30 to 120 CKZ50-42 3680N-R D E F CKZT63-A045S 30 to 105 30 to 120 63 CKZT63-A045B CKZT63-A015S 30 to 90 30 to 120 CKZT80-A045S CKZT63-A015B 30 to 90 30 to 105 63 80 CKZ63-42 3680N-R A B C CKZT80-A045B 30 to 105 30 to 105 CKZ63-42 3680N-R D E F For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended. 30 to 105 CKZT80-A015S

Soft Start-up Valve

Spacer with bracket (YT-D) Spacer (Y-D) Connecting Spacer for Modular Type F.R.L. Unit Series AV2000-A AV3000-A AV4000-A AV5000-A Spacer Y200-D Y300-D Y400-D Y600-D Spacer with bracket Y200T-D Y300T-D Y400T-D Y600T-D Applicable model AC20-D AC30-D AC40-D * AC50-D AC60-D * Except port size 06. Note) AV-A series can be connected to AC-A, B series.

Escapements Series MIW/MIS

-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MIS8-PS MIS-A0804 MIS12-PS MIS-A1204 MH-G01 (contents quantity 30 g) MIS20-PS MIS-A2004 D-X MIS25-PS MIS-A2504 Individual -X MIS32-PS MIS-A3204 !