C U O S L H ARM ARM t e A-A A ARP w y IR-A IR r IRV i VEX SRH !
Refer to gauge guide (P.94,95).
P 2 x P (Hexagon socket head taper plug) MY1M TT UU Cushion needle TT UU 1 0 (Port) G NW P 2 x P (Hexagon socket head taper plug) A GB MW (Hexagon socket head taper plug) MY1C N Z + Stroke MY1H WW WW MY1 HT P (Hexagon socket head taper plug) MY1 W MY1 W P XX XX (Hexagon socket head taper plug) P P MY2C (Port) (Port) Centralized piping type 2 x ZZ (Hexagon socket head taper plug) 2 x ZZ (Hexagon
4() 85MR-RB54-4() FA11k22kWUP 00 100W 200W/400W 02LEC-MR-RB-032 03LEC-MR-RB-12 () 11 14 11 (3) 11.5 100 5m (a) LECSSP-DP-CG3G4 G3-G4 P-D P-D P P C C G3 D (2) G4 5m 5m (1) 1.
. 6.8 to 9.6) Auto switch A B 49 Ht Ht CL 56 56 34 CL1 A B Hs 30 (33) 36 Hs MLGC Auto switch ( ): Denotes the values of D-F5LF.
SX Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv P N P N P N 1 8 1 4 1 4 SS5X3-20 SS5X5-20 SS5X7-20 Rc Rc Rc 0.72 1.9 3.6 0.29 0.28 0.31 0.18 0.48 0.93 0.80 2.2 3.6 0.36 0.20 0.27 0.21 0.53 0.88 C6 C8 C10 Note) The value is for manifold base with 5 stations and individually
SX Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv P N P N P N 1 8 1 4 1 4 SS5X3-20 SS5X5-20 SS5X7-20 Rc Rc Rc 0.72 1.9 3.6 0.29 0.28 0.31 0.18 0.48 0.93 0.80 2.2 3.6 0.36 0.20 0.27 0.21 0.53 0.88 C6 C8 C10 Note) The value is for manifold base with 5 stations and individually
3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 6 P. 12 Straight Union KQG2H Extended Male Elbow KQG2W Union Y KQG2U Metric Inch P. 3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 7 P. 12 Male Elbow KQG2L Different Diameter Tee KQG2T Metric Inch P. 4 P. 10 Metric Inch P. 5 P. 11 Female Connector KQG2F Metric Inch P. 7 P. 13 Male Branch Tee KQG2T Plug-in Reducer KQG2R Metric Inch P. 4 P. 10 Metric
Fluid Name and Option Option symbol and body material Fluid (Application) Brass B Stainless steel J J H H Q P M H M M P Ethyl alcohol Caustic soda (25% ) Gas oil Silicon oil Steam system (Steam) (Max. 183C) Steam system (Condensation) (Max. 99C) Medium vacuum (up to 0.1 Pa.abs) Parachloroethylene Helium Non-leak (10 6Pam 3/s) Heated water (Max. 99C) A A S E V A V V E Note 1) The leakage
d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.
B E C A P F Single rubber stopper M M G D A A MXQA-A27 Model Adjuster part no.
(Same surface) 10.5 16.5 D-A93 50 50 50 D-M9B D-M9BW D-B54 50 50 75 8.5 Auto Switch Mounting Position and Its Height Unit: mm Auto switch set value and its height 50 7.5 30.5 40 11.5 34.5 40 2 25 43.5 Auto switch D-B54 Symbol 63 7.5 30.5 47 11.5 34.5 47 2 25 50.5 40 11 23.5 34.5 15 27.5 34.5 5.5 18 38 32 3 30.5 30 7 34.5 30 0 25 33.5 Hs A B Hs A B Hs A B Hs B A 33 D-A93 D-M9B D-M9BW 24.5
Description Material Note 1 Body Aluminum alloy Anodized 2 Branch passage PPS 3 Gasket HNBR 4 Sensor base PPS 5 Gasket HNBR 6 Sensor Au, Pt, Al2O3 Dimensions A B 70 H F E D 1.5 OUT IN 4 x P L K 2 x Port size N Symbol Model Port size A B D E F H K L N P PF3A703H Rc1, NPT1, G1 130 45 79.1 55.3 22.5 25 35 60 30 M4 x 0.7 depth 7 PF3A706H Rc1 1/2, NPT1 1/2, G1 1/2 170 60 94.1 70.3 30 68 45
19 Cylinder bore (mm) 5 1 0 '15 lo a O o a a o 16 o a a a o a N a o o a o a o o 2 3 : a o o a o o o o t2 o a o o a a a a t0 4 0.66 1.9(4.2) 3.3(7.3) 4.6(10.1) 6 1 .73 5 . 1 { 1 1 . 2 ) 8.6(18.9) 12.1Q6.61 I 2.64 7.9(17.4)13.1(28.8) 18.4(40.5) '10 4 . 1 2 12.3(27.1 20.6(45.3) 28,8(63.4) 1 2 6.91 20.7t45.5\34.5(75.9) r8.3(106.3 Cylinder-Applicable Pad (See also section for ZP Vacuum Pads, p
Cylinder-Applicable Pad (See also section for ZP Vacuum Pads, p. 87) O In case of rod tip male thread Cylinder Pad (ZPT02t0) O In case of pad direct mounting lvlinder Pad (2P02-50OO) Bore (mm) Pa ') 2 o I 1 0 o l 10' a a o a 16 a o o a o O a a o a o o Model Bore Pad dia.
Stroke range (mm) Bore size (mm) AP AL AK AJ AI AH AG AB AA V U T S N M L K J I B A O P 63 60 12 14 180 158 250 228 25 25 108 192 30 72 100 66 180 135 117 65 228 200 Rc 1/4 M12 x 1.75 depth 23 75, 100, 125 150, 200, 250 300 80 70 16 14 200 178 284 262 27 30 128 224 35 89 115 76 214 160 138 75 262 230 Rc 3/8 M12 x 1.75 depth 28 100 80 16 16 226 200 326 300 30 32 143 262 40 110 125 80 245 190
Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications
color Indication Type P. 8-30-42 Band, Rail, Tie-rod, Direct Mounting With Timer P. 8-30-47 Band, Rail, Tie-rod, Direct Mounting Magnetic Field Resistant 2-color Indication Type P. 8-30-49 Rail Mounting Wide Range Detection Type P. 8-30-50 Band Mounting Made to Order Specifications P. 8-30-52 Technical Data 1, 2 P. 8-30-55 8-30-1 2 SMC Auto Switch Variations Function Type Electrical
color Indication Type P. 8-30-42 Band, Rail, Tie-rod, Direct Mounting With Timer P. 8-30-47 Band, Rail, Tie-rod, Direct Mounting Magnetic Field Resistant 2-color Indication Type P. 8-30-49 Rail Mounting Wide Range Detection Type P. 8-30-50 Band Mounting Made to Order Specifications P. 8-30-52 Technical Data 1, 2 P. 8-30-55 8-30-1 2 SMC Auto Switch Variations Function Type Electrical