C85

30' 1 30' 1 1 0 42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

CLS

For details, refer to page 9-15-40. 9-9-21 22 Series CLS Proper Auto Switch Mounting Position of Cylinder Section (Detection at stroke end) and Its Mounting Height D-F5/J5, D-F5NTL D-F5W/J59W D-F5BAL/F59F D-A3 D-G39/K39 G (PF) 1/2 (Applicable cable O.D. 6.8 to 9.6) (33) 30 Auto switch A A B 49 Ht Ht 34 56 Hs Hs B 30 (33) 36 Auto switch ( ): Denotes

C85

D-A7H D-A80H D-C73C D-C80C 1 A 36.7 B 16 A B 22 Hs 10.2 7 CJ2 Hs CM2 D-H7 D-H7W D-H7BAL D-H7NF D-A73C D-A80C 13.3 13.3 CG1 10 A B 24 Hs 18.6 A 29 B 16 MB Hs MB1 CA2 D-H7C D-A79W 1 A 38.2 B 16 A B 23.5 7 CS1 Hs 14 Hs C76 D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F C85 Auto Switch Mounting Position (mm) C95 23 A B 1 Bore Single acting/Spring extended Auto switch model Hs 11 B A CP95 1 to 50 st

CL

e RLQ MLU S + Stroke ZZ + Stroke h + l ZZ + l + Stroke Plug cap 2 positions ML1C D-X 20Data Stroke range (mm) EA EB F FA GA GB GC H1 Bore size (mm) A AL B B1 BX BY C D BP J K KA Without rod boot Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 Up to 1000 Up to 1000 Up to 1200 With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4

REA/REB

driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC

REA/REB

from cylinder shaft center Lo (cm) RZQ 25 15 40 500 500 MI W S 300 300 200 200 CEP1 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3

Refrigerated Air Dryers

Applicable air dryer Port size Rc A B C D Weight [kg] I D F IDF-BP317 IDF22E 1 134 405 928 198 4.4 IDF-BP318 IDF37E 1 1/2 980 7.7 IDU-BP336 IDU22E 1 93 445 1465 46 4.5 IDU-BP337 IDU37E 1 1/2 64 550 1635 70 8.0 I D U Dimensions [mm] IDU-BP338 IDU55E 2 53 530 1783 110 12.3 IDU75E 1918 Part no.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL Symbol Contact GN With sensor rail and sensor plate, without proximity switch N.C. (B contact) N.O. (A contact) G GD GB GDB GU GUB 1 1 1 1 1 1 GXL-8F GXL-8FI GXL-8FB GXL-8FIB GXL-8FU GXL-8FUB 3 wire/NPN 3 wire/NPN 3 wire/NPN 3 wire/NPN 2 wire/Solid state 2 wire/Solid state N.C. (B contact) LXF LXS LXP LXS N.O.

Rotary Actuator

Applicable shaft types: J, T X = Y = X = Y = Y = X = Y = Y = [mm] [mm] [mm] Size X Y 30 3 to 13 3 to 10 50 3.5 to 27 1 to 20 63 3.5 to 29 1 to 22 80 4 to 38 1 to 25 100 5 to 44 1 to 30 Size X Y 30 3 to 25 3 to 10 50 3.5 to 36 1 to 20 63 3.5 to 41 1 to 22 80 4 to 50 1 to 25 100 5 to 60 1 to 30 Size Y 50 1 to 36 63 1 to 41 80 1 to 50 100 1 to 60 Symbol: A59 Note) Except flange type The rotation

LJ1H

1 B G LJ1 H 10 100 F W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 None B contact specification 2 pcs.

MGG

(mm) Bore size (mm) Stroke range (mm) AC AF AB AE AA AD AP N M L F K C E J A B D G H I 20 25 32 40 50 75, 100, 125, 150, 200 11 30 16.5 M5 x 0.8 depth 10 12 75 25 45 25 80 60 92 55 99 24 5.5 M8 x 1.25 depth 14 108 60 30 9.5 depth 6 13 16.5 30 M6 x 1 depth 12 16 85 30 54 35 100 70 113 65 109 26.5 6.6 M10 x 1.5 depth 18 130 65 35 11 depth 8 75, 100 125, 150 200, 250 300 16 35 19 M6 x 1 depth

ZP

8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 40 43 18.5 19.5 6.2 8 6 3.3 32 6.5 10 1.7 12 12 3 27 21 21 50 53 33 7.5 3.8 6.2 12 5 8 8 6 13 1.8 15 12.5 3.5 27.5 21.5 21.5 16 1.2 18 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

MNB

0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 CL1 63 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 80 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 MLGC 100 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 CNG Auto Switch Mounting Height D-Z7/Z-80 D-Y59 D-Y7P D-Y7W D-F5, D-J5 D-F59F D-F5W, D-J59W D-F5BAL, D-F5NTL D-A3 D-G39 D-K39 MNB D-A5 D-A6 D-A59W

MNB

side), 1 10 60 65 70 D-Y69 D-Y7PV D-Y7WV 75 + 30 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 85 + 30 (n 4) 2 60 + 30 65 + 30 n = 4, 8, 12, 16 70 + 30 n 10 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 105 110 2 (Different sides, same side), 1 20 85 90 100 D-Y7BAL 105 + 45 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 110 + 45 (n 4) 2 85 + 45 90

MXQ

8 to @0, $1 to $4 (1 set) 8-5-45 46 Series MXQ Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model A 10 20 30 40 50 75 100 125 150 10 20 30 125 40 50 150 75 100 11.5 (9) 29 (26.5) 19.5 (17) 24.5 (22) 29.5 (27) 44.5 (42) 11.5 (9) 14 (11.5) 19.5 (17) 18.5 (16) 31.5 (29) 30.5 (28) 3.5 (1) 10 (7.5) 12.5

CHKD/CHKG

Symbol -XA1/2/7/18/20/22/31/32/33/34 Change of Rod End Shape 1 CHQ CHKD Mounting type Bore size Rod size series Stroke X A0 Suffix for auto switch CHK CHK CHN Indicate the rod end shape pattern symbol CHM A0 A1 A2 A7 CHS C0.5 30 30 30 CH2 D D D D CHA 30 Related Products F H C C C Note) Male thread effective length should be no more than 100 mm.

7ND9071en

-07, ISA 60079-107, ISA 60079-31-2009, ANSI/IEC 60529:2004 Ui 32 V Class I, Div 1, Groups B, C, D; Class II, Div 1, Groups E, F, G; Class III; T4T6, Enclosure type 4X Ex d IIC T4T6 AEx d IIC T4T6 Ex tb IIIC T100 C IP66 AEx tb IIIC T100 C IP66 Japanese Ex-d Certification: ND_E4 II 2 G Ex d IIC T6 Gb II 2 D Ex tb IIIC T80C Db Input: Ui 30 V Output: Ui 30 V, Pmax = device limits itself. 7

CNA

D-Y7PV D-Y7WV D-Y7BAL CNS A 32 B CLS Operating Range Bore size (mm) Hs Ht Hs Ht Hs Ht Hs Ht Auto switch model Bore size (mm) CLQ 30 40 30 30 30 30.5 34 43 33.5 50 D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV D-Y7BAL D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL D-G5/K59/G59F D-G5W/K59W D-G5NTL/G5BAL D-G39/K39 D-G39C, D-K39C D-P5DWL 40 63 80 100 34