Speed Controller with One-touch Fitting

)A 8 13.2 10.2 16.4 30.1 21.5 40 14.2 12 (12) AS231F-02-04(S)A 4 7.2 9.6 12 ASP 1/8 13 (12.7) ASN 36.6 35 31.1 29.5 13.3 19 (20) AS231F-02-06(S)A 6 11.2 19 33.8 (33.9) 21.4 43.9 21 (22) AS231F-02-08(S)A 8 13.2 34.9 (35) 23.5 46 14.2 22 (22) AS231F-02-10(S)A 10 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (24) AS331F-02-06(S)A 6 8.2 16.5 29.9 (30) 17.5 40.1 AQ 1/4 17 (17.5) 12.9 13 ASV 13.3 42

VCC

VCC12(D)-00 38.80.1 230.1 Leakage detection port 16.50.1 1.2 to 2 hole 3.8 hole Pilot port IN port 4 hole 1.2 hole R0.2 30 R0.2 OUT port 210.05 M26 x 1.5 21.60.05 240.05 200.05 C1 30 30 2.5 8.5 330.1 40.80.1 450.1 Recommended surface roughness of inner surface where the valve is inserted is Rz6.3.

VQ4000

Cylinder port U D U D C8 C10 C12 02 03 B CM With One-touch fitting for 8 With One-touch fitting for 10 With One-touch fitting for 12 Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 Mixed Refer to page 2-5-2 (Grommet type) for wiring specifications.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 4 2.5 1 4 1 4 3 8 KFF04-02 KFF06-02 KFF06-03 KFF08U-02 KFF08N-02 KFF10U-02 KFF10N-02 KFF12U-02 KFF12N-02 10 33.5 17 17 19 26.8 15 15 17 15.5 1.5 1.6 25 27 30 33.2 26.5 15.2 3 6 6 4 12 35.2 28.5 5 6 4 5 5.5 6.5 7 8 11 17 21 30 35 45 1 4 14 17 33.2 26.5 15 16.2 8 28 10 6.5 7.5 1 4 32 17 17 34.8 27.5 15 18.8 12 8 9 35 36 1 4 17 19 35.3 28.5 15 19.3 98 Series KF Insert Fittings Bulkhead

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VP4 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VQ L A Dimensions VQ4 Applicable fitting d Part No.

KP/KPQ/KPG

KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04 41.7 44.2 48.2 44.9 47.4 51.4 55.5 60.6 63.8 61.3 67 71.4 38 38 42 41.5 41.5 45.5 49.5 54.5 58 55 60.5 63.5 10 11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection

Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing P M D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 7 8 9 10 15 17 23 25 29 30 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 45.4 49.4

Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing P M D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 7 8 9 10 15 17 23 25 29 30 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 45.4 49.4

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

from the 1st station on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

from the 1st station on the D-side.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-L) 50 L/min 40 30 25 20 15 10 5 00 5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

20.9 30.2 (30.3) 23 (24) AS221FSG-02-03 (S) 5/32" 8.2 AS221FSG-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FSG-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FSG-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FSG-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-02-

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 597 Series AS20-D Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

SQ1000/2000

Refer to w. r Option Nil 02 to 24 B None DIN rail length specified Note 2) 1 to 12 (24) Note 1) D side P All stations with back pressure check valve Special specification wiring Note 3) (except for double wiring) 1 to 9 (18) K J T D side D side D side U side D side U side D side U side 1 to 8 (16) 1 to 10 (16) Labeling plate (only for valves with side port specification) External pilot specification

reduces flow setting time

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04 41.7 44.2 48.2 44.9 47.4 51.4 55.5 60.6 63.8 61.3 67 71.4 38 38 42 41.5 41.5 45.5 49.5 54.5 58 55 60.5 63.5 10 11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection

Micro Mechanical Valve Series VM1000

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

PSxx-OMR0001CN

-1-B 0.4MPaMPa 0.2MPaMPa 60PSI0.4MPa PSI 2 2 30PSI0.2MPa PSI MPa 0.4MPa 0.2MPa 0.4MPa MPa/PSI 2 0.2MPa 11/8 2SI -12No.PS-OMR0001CN-J 2 2 VX210X276 X276 DIN 2 AC100V AC110V Z (1/8) AL 4 1 () ((38)2 ) ISA-17 Y200T-A E210-U01 ISA-18 O 2 -13No.PS-OMR0001CN-J 2 SET SUP DIN UP DOWN OUT UP ( ) ON/OFF SET ( ) DOWN ( ) ON/OFF SUP () OUT () DIN DIN / ON/OFF() ON () -

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN200 to 900 1 Model 0.5 A B D Dimensions (mm) Model Port size R Weight (g) Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 12 or less 20 or less 30 or less 50 or less 80 or less Effective area (mm2) 35 60 90 160 270 440 590 960 2 0.2 Inlet pressure (MPa) Noise level (dB) (A) 0.1 1 4 AN200-02 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233