Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Auto Switch Proper Mounting Position (mm) (mm) Auto Switch Mounting Height D-M9 D-M9W D-M9 D-M9W D-A9 Auto switch model Auto switch model D-A9 B A B A Bore size Bore size 20 25 32 40 Hs 30.5 59.5 34 55.5 20 25 32 40 Note) The above values are a guide in the stroke end detection of the mounting positions of the auto switch.

Model Selection 1

VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

,

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

PFxx-OMO0004CN

g +15 g DIN +65 g -66No.PF-OMO0004CN-E 1 () 2()10024 551005009.5 221002003.8 3OUT 40()90% ON(OFF) 5 6 70()90% 8 9 10 ZS-33-D AWG26 1.00 mm +0.10 3.5 -0.25 -67No.PF-OMO0004CN-E A B C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMB7201 2 L/min 200 L/min -68No.PF-OMO0004CN-E -() [L/min] OUT ()( ) [kPa] IN 200kPa IN 400kPa [L/min] -69No.PF-OMO0004CN-E IN 3F.S.8cm IN OUT [%F.S.]

NVEPA|VEFseies

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Industrial Filters

Models (mm) Internal volume (L) Number of arranged elements Weight (kg) Element length (L) Model N (Port size) G W A B C D E F H J K P 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 250 20 70 15 330 216.3 230 490 660 965 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 500 20 80 24 330 216.3 230 490 905 1220 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SS3Y1 31 05 Stations 02 2 stations P R 20 20 stations R port M5 x 0.8 P port M5 x 0.8 Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

JXCx-OMT0005CN

RLS] EMG /LEC 75 - 19 19.1 / JXCD1EEPROM1,000,000 76 - 19.2 ON 5 () 77 - 19.3 19.4 ( ) 78 - 19.5 19.6 D 100 19.7 79 - 20 ,, (), YES NO JXCD1 LED 1 MSNS 2 ALM 3 LEC-W2 4 5 80 - No.

PSxx-OMM0002CN

N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa MPa kpa N NPN1 P PNP1 A NPN2 B PNP2 R NPN2+/ T PNP2+/ S NPN2+/ V PNP2+/ / ZS-24-A ZS-24-D ZS-35-A ZS-35-C ZS-35-B ZS-35-F ZS-35-E + -9No.PS-OMM0002CN-F

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

1 to 12 stations 24 D side 16 stations 26P 20P 1 to 9 stations 18 Flat ribbon cable connector kit J kit Flat ribbon cable (20P) PC wiring system compatible JD0 D side 1 to 8 stations 16 stations 16 Flat ribbon cable (20P) (PC Wiring System compatible) T kit TD0 Terminal block box kit D side 1 to 10 stations 16 stations 20 Terminal block box kit LD0 (N) LU0 (N) LD1 (N) LU1 (N) LD2 (N) LU2

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

CEx-OMQ0010

) 6-1 18 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 1m 6-2 6-3 (1)( ) (2) No.2()(CEU2 ) (3) (4) CEU2 19 7-1 () () ( 8 ) CE2 14.5mT CE2 15000 18cm 7-2 ()() A /B (CEU1CEU5 )0.1mm

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Regulator for 2 MPa ARX 20

Regulator for 2 MPa ARX 20 How to Order ARX2 0 01 Regulator Options None Nil 1348112 G36 10 01 G46 10 02 G36 4 01 G46 4 02 G36 P10 N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option

AFF

20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice

Electro-Pneumatic Valve NVEP/NVEF Series

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.