Vacuum

in parenthesis are with O-90 Limit Switches Rod end shape: Male thread 0t60 32 Fod end shape: Direct mounting o 141 Rod end nut Seal washe. r'ratanalr CorB sht Rolld sle6l Seal-NBF '142 lnder 1 4 , 1 Qoriac flTre 148 148 hltn.lal k C1\ | 2o3 Port valves for vacuum use . . . . . .14g Series KJ, Series I Tl KQ, rV-3, M5. . . . 145 149 tTV0090,tTV2090 ...tso 143 Vacuum Regulator series lRVl 000

o

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

Vacuum

Numbers in parenthesis are with O-90 Limit Switches Rod end shape: Male thread 0t60 32 Fod end shape: Direct mounting o 14 Rod end nut Seal washe. r'ratanalr CorB sht Rolld sle6l Seal-NBF '142 lnder 1 4 Qoriac flTre 14 14 hltn.lal k C1\ | 2o3 Port valves for vacuum use . . . . . .14 Series KJ, Series I Tl KQ, rV-3, M5. . . . 14 14 tTV0090,tTV2090 ...tso 143 Vacuum Regulator series lRVl 000

VZ1000

Note Solenoid assembly Epoxy/Stainless steel DXT170-APush rod Body Resin NBR O-ring NBR 13 x 11 x 1 Common with Series VZ 000 3 5 o EXH poppet Back up spring FKM V seal Stainless steel Brass, NBR Retainer assembly Stainless steel Poppet spring 3-3-11 Series VZ1000 2 Position Single Grommet (G), (H) VZ1120-M5 G H VZ1120 (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm Manual override

VZ1000

Note Solenoid assembly Epoxy/Stainless steel DXT170-APush rod Body Resin NBR O-ring NBR 13 x 11 x 1 Common with Series VZ 000 3 5 o EXH poppet Back up spring FKM V seal Stainless steel Brass, NBR Retainer assembly Stainless steel Poppet spring 3-3-11 Series VZ1000 2 Position Single Grommet (G), (H) VZ1120-M5 G H VZ1120 (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm Manual override

Check Valve Series AK

Proof pressure 1.5 MPa ASP Maximum operating pressure 1 MPa Minimum operating pressure 0.02 MPa ASN Ambient and fluid temperature 5 to 60C (No freezing) AQ JIS Symbol Flow Characteristics ASV AK2000-01/-02 AK4000-02 AK How to Order Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) ASS Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa AK 2 000

Speed Controller: Standard Type In-line Type AS Series

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type L (2) Low temperature (30 to 60C) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

P

Point to Group Specialized Product Flow Characteristics AS3000-N03-X800 AS4000-N04-X800 AS2000-N02-X800 300 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 1500 250 600 200 1000 150 400 100 500 200 50 0 0 1 2 3 4 5 6 7 9 8 10 0 0 1 2 3 4 5 6 7 9 8 0 0 1 2 3 4 5 6 7 8 Number of needle rotations Number of needle rotations Number of needle rotations How to Order AS 2 N 000

Digital Flow Switch (Integrated display type)

(The default setting is [000].) For instructions on how to enter the security code, refer to "How to input and change the security code" on page 69. After entry, the changed security code will flash by pressing the SET button for 1 second. (At this point, the changing of the security code is not completed) Press the UP or DOWN button to return to setting step.

Check Valve Series AK

Proof pressure 1.5 MPa ASP Maximum operating pressure 1 MPa ASN Minimum operating pressure 0.02 MPa Ambient and fluid temperature 5 to 60C (No freezing) AQ JIS Symbol Flow Characteristics ASV AK2000-01/-02 AK4000-02 AK How to Order Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) ASS Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa AK 2 000

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

Specifications Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 8 turns 0.8 mm2 Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Number of needle rotations Effective area of residual exhaust valve How to Order JIS Symbol 01 AS 2 000 E Body size Port size 2 3 4 Port size Applicable series 01 02 03 04 1/8, 1/4 standard 3/8 standard 1/2 standard

Speed Controller: Standard Type Series AS In-line Type

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Slit Valve XGT Series

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Body ported manifolds are available with bar or separate ty, SUBPLATE NVFS6*000 3/4 NPT, VALVE, VFS6000 SOL VALVE 4/5 PORT, 22, VFS6000, 3.7686 lb

Body ported manifolds are available with bar or separate ty, SUBPLATE NVFS6*000 1 NPT, VALVE, VFS6000 SOL VALVE 4/5 PORT, 22, VFS6000, 3.52 lb

AC Servo Motor Driver

Note that the number of write times to the EEPROM is limited to approximately 100, 000. Write the parameter setting into EEP-ROM of the driver. Specify the parameter group in advance (refer to (1) in this section). Write the value within the setting enabled range. For the setting enabled range, refer to chapter 5 or read the setting range by performing operation in (3) in this section.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Part name Life guideline Smoothing capacitor 10 years (Note 3) Number of power-on, forced stop and controller forced stop Relay times: 100 000 times Number of on and off for STO: 1,000,000 times Cooling fan 10,000 hours to 30,000 hours (2 years to 3 years) Battery backup time (Note 1) Approximately 20,000 hours (equipment power supply: off, ambient temperature: 20 C) Battery life (Note 2)

LEC-OM069xx

Pn408=n.000 (Does not use friction compensation, 1st notch filter, or 2nd notch filter.) 5.3.1 Advanced Autotuning Advanced autotuning automatically operates the servo system (in reciprocating movement in the forward and reverse directions) within set limits and adjust the DRIVER automatically according to the mechanical characteristics while the servo system is operating.

LEC-OM071xx

Pn408=n.000 (Does not use friction compensation, 1st notch filter, or 2nd notch filter.) 5.3.1 Advanced Autotuning Advanced autotuning automatically operates the servo system (in reciprocating movement in the forward and reverse directions) within set limits and adjust the DRIVER automatically according to the mechanical characteristics while the servo system is operating.

IDX-OM-W017

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.