SI unit (CC-Link compatible)

F: Contents are added. [July 2016] G: Contents revised in several places. [August 2019] H: Modified errors in text. [ November 2019] I: Contents revised in several places.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Capacity[g] 1 Body Aluminum alloy Anodic oxide coating GR-S-010 10 Ball screw Ass'y Linear guidde Ass'y 2 Ball screw Ass'y GR-S-020 20 3 Linear guide Ass'y 4 Table Aluminum alloy Anodic oxide coating 5 Side cover Aluminum alloy Anodic oxide coating 6 Dustproof cover Aluminum alloy Anodic oxide coating 7 Plate M Aluminum alloy Anodic oxide coating 8 Plate E Aluminum alloy Anodic oxide coating

Guide Cylinder

If handled improperly, human injury and/or malfunction or damage of machinery and equipment may occur. 2) Maintenance work f handled improperly, compressed air can be dangerous.

Air cylinder

Grease pack part number: GR-S-010 (10g), GR-S-020 (20g) Apply plenty of grease to the internal and external circumference of a new rod seal for replacement (See Table 4, P20). Fill the groove with grease. Refer to Page 22 for made to order product (XC85, X446). c) Mounting Mount taking care that the rod seal is in the right direction.

rep-filter-e

Pressure Control Equipment (c) Good condition (d) Bad condition (e) Good condition (f) Bad condition Fig. 5 Tightening condition 7. Adjustment Method for Mounting Other Elements 7-1.

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

Nil S n Bearing type Slide bearing Ball bushing bearing M L Mounting style Auto switch Basic style Front mounting flange style Nil Without auto switch (Built-in magnet) B F For the applicable auto switch model, refer to the table below.

VXA21/22

Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.) VXA2130-02 PAX PB 17-3-95

Mounting: F (Flange), Applicable Bore: 020 (20mm)

Prefix: CG (Selection for "T" Mount 25 & 32mm Bore), Mounting: F (Flange), Applicable Bore: 020 (3/4")

Prefix: NCG, Mounting: F (Flange), Applicable Bore: 020 (3/4")

Type: K (Non-rotating), Mounting: F (Flange), Applicable Bore: 020 (20mm)

EXxx-OMP0004CN

1000[mm] 3 3000[mm] 5 5000[mm] B code No. 6.6 mm 1 DC24 V() AWG22 2 0 V() 1.65 mm 3 DC24 V() 40 mm 4 0 V() 5 (2)(SPEEDCON ) PCA-140180 7 L 7 1500[mm] 8 3000[mm] 9 5000[mm] B code No. 5.0 mm 1 DC24 V() AWG22 2 0 V() 1.27 mm 3 DC24 V() 21.7 mm 4 0 V() 5 / -31No.EX-OMP0004CN-I M12 10 EX9-AWTS BUS OUT IP67 (SI 1 ) -32No.EX-OMP0004CN-I Revision history A B C D E F

Industrial Filters Replacement Procedure

Pressure Control Equipment (c) Good condition (d) Bad condition (e) Good condition (f) Bad condition Fig. 5 Tightening condition 7. Adjustment Method for Mounting Other Elements 7-1.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Applicable auto switch BJ2-006, BJ2-010, BJ2-016 BM2-020, BM2-025, BM2-032, BM2-040 BMA2-020, BMA2-025, BMA2-032 BMA2-040, BMA2-050, BMA2-063 BHN3-025, BHN3-032, BHN3-040 D-C7, C8 D-H7 Auto switch mounting screw BBA4 M3 x 0.5 x 14L 1 1358 How to Mount and Move the Auto Switch Solid state D-G39A, D-K39A Reed D-A33A, D-A34A, D-A44A Caution 1.

EXxx-OMQ0015CN

4095 5.25 21 4095 10.5 5.25 21 3868 5 20 3901 10 5 20 2048 3 12 2048 5.25 2.625 10.5 228 1 4 0 0 0 0 0 0.75 3 : 010 V 10 VPLC 3901 -48No.EX-OMQ0015CN (2) & 2 : 010 V,05 V,020 mA : 15 V,420 mA AD AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 2047 5.25 21 2047 10.5 5.25 21 1934 5 20 1950 10 5 20 1024 3 12 1024 5.25 2.625 10.5 114 1 4 0 0 0 0 0 0.75 3

FQ1

Model symbol (In-line filters) Element size 250mm 5 10 20 40 74 105 EM100-005 EM100-010 EM100-020 EM100-040 EM100-074 EM100-105 M005 M010 M020 M040 M074 M105 Bore size 65 x 250mm 04 06 10 Rc 1/2 Rc 3/4 Rc 1 5 10 20 40 74 105 EM200-005 x 4 EM200-010 x 4 EM200-020 x 4 EM200-040 x 4 EM200-074 x 4 EM200-105 x 4 M005 M010 M020 M040 M074 M105 Housing O-ring material N V NBR FPM 65 x 125mm Element

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Model symbol (In-line filters) Element size 250mm 5 10 20 40 74 105 EM100-005 EM100-010 EM100-020 EM100-040 EM100-074 EM100-105 M005 M010 M020 M040 M074 M105 Bore size 65 x 250mm 04 06 10 Rc 1/2 Rc 3/4 Rc 1 5 10 20 40 74 105 EM200-005 x 4 EM200-010 x 4 EM200-020 x 4 EM200-040 x 4 EM200-074 x 4 EM200-105 x 4 M005 M010 M020 M040 M074 M105 Housing O-ring material N V NBR FPM 65 x 125mm Element

FQ1

Model symbol (In-line filters) Element size 250mm 5 10 20 40 74 105 EM100-005 EM100-010 EM100-020 EM100-040 EM100-074 EM100-105 M005 M010 M020 M040 M074 M105 Bore size 65 x 250mm 04 06 10 Rc 1/2 Rc 3/4 Rc 1 5 10 20 40 74 105 EM200-005 x 4 EM200-010 x 4 EM200-020 x 4 EM200-040 x 4 EM200-074 x 4 EM200-105 x 4 M005 M010 M020 M040 M074 M105 Housing O-ring material N V NBR FPM 65 x 125mm Element

Output restriction w/pilot valve, fork lever joint, compensation spring, w/external scale plate, IP8000/8100 NO SIZE PT VERSION, INSTRUMENTATION, IP8000/8100 POSITIONER, 2A, IP8000/8100 NO SIZE PT VERSION, 6.6999 lb

Output restriction w/pilot valve, fork lever joint, compensation spring, w/external scale plate, IP8000/8100 NO SIZE PT VERSION, INSTRUMENTATION, IP8000/8100 POSITIONER, 2A, IP8000/8100 NO SIZE PT VERSION, 6.08475 lb