Modular Type Filter Regulator Series AW

(K) to 40(K) AW30(K), 40(K) AW20(K) AW30(K), 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) Symbol 1 Note 4) 2 6 8 C J Note 5) N R W Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40), and the exhaust port for auto drain comes with 3/8" One-touch fitting (applicable to AW30 to 40).

CQ2

Spring return Spring extend C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Mounting bolt M3 X 35 l X 40 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 60 l Mounting bolt M3 X 40 l X 45 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 65 l Model

Parallel Style Air Gripper Series MHZ

locations) (Except 10) Plug 10 : M-3P 16 to 25: M-5P End boss assembly D1 H G F E D2 B Model A MHZJ2-10S C K 0.016 0.043 12f8 5.5 28 16 40 11 7 15 H G Note 1) MHZJ2-16S C K D2 0.016 0.043 16f8 6.5 27.7 16.2 43.5 15 10 20 MHZJ2-20S C K 0.020 0.053 20f8 7.5 31.2 16.7 51.7 19 12 22 MHZJ2-25S C K 0.020 0.053 Other dimensions and specifications correspond to the standard type. 25f8 10 32.3 17.3

CV/MVGQ

CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11 11 13 16 14 18 18 22 26 19.4 16.4 18.4 21.4 21.4

CV/MVGQ

AL Z TD TT H1 TX H MM TY B2 D HX A B1 Eh8 F I K NA NN TZ N 8 10 32 41 32 8 18 13 5 52 15.5 13 26 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 36 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 9 10 40 45 40 10 22 13 5.5 60 19.5 17 32 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 40 9 10 40 45 40 12 22 13 5.5 60 19.5 17 32 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 40 10 11 53 50 53 14 24 16 7 77 21 22 41 8 76 46.5

AC

Model Port size M B B A B C D P E F G H J K L 8, 1 4 1 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 AFD2000 AFD3000 AFD4000 AFD4000-06 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFD2000 AFD3000 SAC2000, #1 SAC2503, #1 AFD4000 AFD4000-06 SAC4000, #1 SAC4006,

MXS

ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 KA NA 2 2 2 2 2 4 4 4 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16

Modular/F.R.L. Units Series AC

Indicator adjusts to highlight preferred range Green indicator Red indicator Filter Regulator AW20(K) to 60(K) Mist Separator Regulator AWM20 to 40 Micro Mist Separator Regulator AWD20 to 40 F.R.L.

MHZ

(4 locations) (Except 10) E D1 B D2 Model A End boss assembly 0.016 0.043 MHZJ2-10S C K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

MHZ

(4 locations) (Except 10) E D1 B D2 Model A End boss assembly 0.016 0.043 MHZJ2-10S C K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

Table of Contents

1 k Load OUT1 (Black) OUT2 (White) 12 to 24 VDC 12 to 24 VDC Load Load DC () (Blue) DC () (Blue) ZSE40(F) ISE40--30(L)-(M) With auto shift input ZSE40(F) ISE40--70(L)-(M) With auto shift input DC (+) (Brown) Auto shift input (Gray) OUT1 (Black) OUT2 (White) DC (+) (Brown) Auto shift input (Gray) 1.2 k 1.2 k Load 6.8 k 6.8 k Main circuit Main circuit Load OUT1 (Black) OUT2 (White) 12 to 24

Air Slide Table Series MXQ

It requires to order separately. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

Table of Contents

or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -XA and -XA CRB2 Shaft type Shaft direction J T Z X Combination Description Symbol Upper Lower K XA33 Corresponding shafts type available for combination CRBU2 XA33 Female thread at the end T, J, K XA34 XA34 Female thread at the end CRB1 XA35 XA35 Female thread at the end X, Z XA36 Female thread at the end MSU T, J, K XA37 XA37 Stepped round shaft K K XA38 Stepped

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Middle-cut chamfer K K XA46 Middle-cut chamfer MSQ MRQ Combination Chart of Made to Order DChart 5.

Air Slide Table Series MXS

(mm) Model F 35 35 35 40 30 55 65 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 GA 16 16 16 16 51 61 109 159 HA 40 40 40 50 30 70 70 70 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 KA 125 173 223 NA 2 2 2 2 2 4 4 4 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 ZZ 87 87 87 97 112 162 210 260 DMXS16L

CL

92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 27 32 32 37 37 47 47 53 40 50 55 65 80 90 90 90 60 70 86 102 116 145 161 182 32 40 40 52 52 59 59 59 43 43 43 9.0 9.0 11.5 13.5 13.5 19 19 19 112.5 121 133 141.5 150 167 Bore (mm) W/o rod boot W/ rod boot KA N H1 K MM GA FV J W M S M1 P GC GB e 36 45 45 60 60 75 75 75 f 16.5 16.0 16.0 18.0 18.0 40 40 40 h 59 66 66 80 81 133

Combination Cylinder

9 11 GQ 4 7 7 8 GR 4 7 7 7 H 41 45 45 50 H1 5 6 6 8 H2 8 8 8 10 20 25 32 40 63.5 73.5 to 400 to 450 to 450 to 500 CB 74.5 83.5 64.5 74.5 80 83.5 64.5 70 CV/MVG 100.5 90.5 CXW (mm) Bore 20 25 32 40 K 5 5.5 5.5 7 LC 4 4 4 4 LD 6.8 6.8 6.8 7 LH 25 28 28 30 LS 167 177 179 213 LT 3.2 3.2 3.2 3.2 LX 40 40 40 55 LZ 55 55 55 75 MM N 15 15 15 NA 24 30 NN PG 22 27 27 29 PH 19.5 24 24 24 PL 20 24 24

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

M5 x 0.8 20 K B 40 31.5 145 115 45 60 M24 x 1.5 40 M6 x 1.0 30 C series rod A 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 50 40 185 145 57 79 M39 x 1.5 63 M8 x 1.25 40 Double knuckle joint Material: Cast iron Rod series Bore size (mm) 2-P keeper plate mounting threads Part no. l J P A B C D d H K L E + 0.07 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1

MXS Series Air Slide Table

40 40 25 36 36 38 NN 2 2 2 3 3 4 5 I 10 10 10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 Note) Refer to "Dimensions" of MXS 12 on P. 58 for one with shock absorber as symmetric.