New

Manufacturers Association) Body Series VXN material Air Air Medium vacuum Medium vacuum Oil Water C37 (Brass), Stainless steel Power consumption 4.5 W (Size 1) 7 W (Size 2) 20 W (Size 3) (DC) C37 (Brass) body Stainless steel body Body Series VX2 material Air Air Aluminum, Resin Power consumption 4.5 W (Size 1) 7 W (Size 2) 10.5 W (Size 3) (DC) Aluminum body Resin body CAT.ES70-48A Series

Guide Cylinder Series MGG

368 Series MGG Guide Cylinder Construction 20 to 50/MGG q t w r y !

SZ3000

Press the manifold. 1-3-19 20 Series SZ3000 Dimensions: SZ3000 Plug-in 1 2 SS5Z3-60FD Stations UWith external pilot 2n2One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 13.3 24 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 A 4 2One-touch fitting [1(P), 3(R) port] Applicable tubing

CATALOG VC10

Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.

SZ3000

0 (A) 4 (B) 2 (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i JIS Symbol 2 position double with back pressure check valve 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 e w t y q o r u !

90

This assembly does not include special cable assembly for energy saving switch. w Output specifications A B NPN open collector 2 outputs PNP open collector 2 outputs uConnector assembly ZK2 LV A W e Unit specifications Nil M Unit selection function Note 1) Applicable valve type Lead wire length Nil 6 10 20 30 SI unit only Note 2) Valve type K/R (With supply valve and release valve) Valve

Thermo-con/Rack Mount Type

Revision History Cooling capacities of 800 W and 1 kW have been added. Number of pages has been increased from 16 to 20. TT Edition B Cooling capacities of 400 W and 510 W have been added. Number of pages has been increased from 20 to 24. UO Edition C The water-cooled type (800 W, 1.2 kW) has been added. Number of pages has been increased from 24 to 28.

TABLE OF CONTENTS

Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.

0.55

2-position double 3.1 2(B) (A)4 (EA)5 1 3(EB) (P) 3-position closed center 2(B) (A)4 Page 15 VF5000 Conduit terminal (EA)5 1 3(EB) (P) 3-position exhaust center 2(B) (A)4 1/4 3/8 1/2 9.4 (EA)5 1 3(EB) (P) 3-position pressure center 2(B) (A)4 (EA)5 1 3(EB) (P) Low wattage specification Power consumption: 0.35 W (Without light) 0.4 W (With light) New New From page 26 Features 1 Series VF1000

High Purity Fluoropolymer

C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

Valve Single Unit

Refer to external dimensions in pages 1-6-44 to 1-6-46, and then mount it. 1-6-43 SX7000: SS5X7-20Stations Grommet (G) 2n2-One-touch fittings (A, B port) 2n1-Rc 1/4 (A, B port) 6-Rc 1/4 L1 L2 Applicable tubing O.D.: 8 (Mounting hole) 4-4.5 10 (P, EA, EB port) 10 16.5 11.5 22.4 76.8 19.5 19 20.5 B A B A B A B A B A B A B A 20 20 EA EB P EB EA P 21 21 62.5 67.7 21 60 128.6 115.6 30 99.5 28.2

Electric Actuators

B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Vacuum System Peripherals:

Series ZM 13-14-20 4.

0.

Flow Characteristics Response time (ms) Note 1) Flow characteristics Series Valve construction Note 2) High speed response: 0.9 W 23 (AR) 12 (PA) High pressure: 0.9 W Weight (g) Model Standard: 0.35 W AC C [dm3/(sNbar)] b Cv C [dm3/(sNbar)] b Cv VQZ115 VQZ212 VQZ232 VQZ222 VQZ242 VQZ312 VQZ332 VQZ322 VQZ342 N.C. valve VQZ100 13 or less 22 or less Poppet 10 or less 24 0.17 0.44 0.14 0.30

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

124 30 70 17 60 70 90 90 20 22.5 Single clevis with ball joint (CS) EN E B (Max.)

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

Modular Type Air Filters Series AF

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S M5 x 0.8 1/8 1/4 Barb fitting Applicable tubing: T0604 10 one-touch fitting Width across flats 17 Width across flats 14 Model Standard specifications Optional specifications Bracket mount With auto drain P A B C D E G J M N Q R S T U V B AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 M5 x 0.8 25 67 7 12.5 25 12.5 85 AC 1/8, 1/4 40 97 10 20

Parallel Style Air Gripper Series MHZ

MHZ Flat Type Fingers [3] MHF 4 x MM thread depth L (Thread for mounting attachment) MHL K J MHR A A D G B MHK MHS D B MHC K J F MHT C MHY S W MHW O -X (mm) F G Mass (g) L MM J K D C B W Model A MRHQ Open Closed MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 +0.2 0 5 4 5 8 10 12 15 18 1 1.4 1.4 1.6 2 3 3 3 5 6 8 10 12 16 M2

Table of Contents

For replacement parts, refer to page 2-4-103. 2-4-9 10 Series VQ1000 Body Ported Plug-in Unit: Flip Type Model Response time (2)(ms) Flow characteristics Weight (g) Number of solenoids Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Series Standard: 1 W Low wattage: 0.5 W H: 1.5 W AC C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VQ1130 Metal seal 0.77 0.14 0.18 0.84 0.14 0.19 12 or less 15 or less

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.