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(n 2) (n = 4, 6) D-M9lWV D-M9lAV 10 15 15 + 15 (n 2) (n = 4, 6) D-F7lW D-J79W D-F7BA 10 15 15 + 20 (n 2) (n = 4, 6) D-M9lW 15 15 15 + 15 (n 2) (n = 4, 6) D-M9lA 15 20 20 + 15 (n 2) (n = 4, 6) *1 Auto switch mounting (With the stroke range within the below, an adjustment is required as shown in the chart below).

1 t LEM e Motor type*1 r Lead [mm] q Accuracy LEY Symbol Type Output [W] Actuator size Compatible driver*2 Nil Basic type H High precision type Symbol LEJS40 LEJS63 A 16 20 B 8 10 LES S2 AC servo motor (Incremental encoder) 100 40 LECSA-S1 w Size S3 AC servo motor (Incremental encoder) 200 63 LECSA-S3 LEPY LEPS t Stroke [mm]*3 40 63 S6 AC servo motor (Absolute encoder) 100 40 LECSB-S5 LECSC-S5

_~M~a~jo~r~D~im~e~n~s~io~n~s~_ ___ (mm) Clamp Cylinder: Series CK1 SpCpd controller Cushion valve N s-t-Strok.e ___ _ -, ...!t ,r' M -1 6X 1. 5 \ ~~-.~. . I~r ~ 1~ -~ -~t l -,? ~ . ~ I 'S " .. ! /'Vvf..>---'---r-'-~ /i . -l ,~ -0 I .. .i ~ l d1h across flatsl]" 4M6 Screw depth 1 3 ~J:"!-~/ _ H _ O _ '"_ ' _ ' 2 -.< ",, ' +"."

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Circuit with Indicator Light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resister LED: Emitting diode R: Resister 2-7-33 Base Mounted 34 34 Series VQZ1000/2000/3000 Be sure to read before handling.

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

AK VCHC ASR ASQ 689 AS-FSG Series Construction: Elbow Type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread o !0 !1 e !3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20, 25 9 19.2 25 1.75 1.15 10-5-24

S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.

Centralized piping on right R R L L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 2. The plug position of the piping port can be changed to suit the operating conditions. When screwing in the plug for the second time, wrap a sealant tape around the plug to prevent leakage. (1) M5 First tighten lightly until the rotation stops.

Use after putting the unit label other than l/min, l. r Unit display/Orange e OUT1 CH r t y u Displays the selected channel. Channel display/Red t u UP button ( button) Use to change the mode or to increase the set value.

5 Heat treatment High carbon chromium bearing steel Stainless steel 12: Roller r Guide rail !6 Heat treatment Stainless steel Stainless steel 16 to 20: Parallel pin t Finger Stainless steel High carbon chromium bearing steel Needle roller y Roller stopper !7 Carbon steel Nit riding 12: R shape snap ring u Pinion Carbon steel Nickel plated !

5 Heat treatment Stainless steel High carbon chromium bearing steel 12: Roller r Guide rail !6 Stainless steel Heat treatment Stainless steel 16 to 20: Parallel pin t Finger Stainless steel High carbon chromium bearing steel Needle roller y Roller stopper !7 Carbon steel Nit riding 12: R shape snap ring u Pinion Carbon steel Nickel plated !

Twisting the wire of the AC line is an effective counter measure against noise. Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

Twisting the wire of the AC line is an effective counter measure against noise. Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

The anchor bolts are not attached. 8.1 Specifications HRSH Series 8-4 HRX-OM-Q026 Chapter 8 Documents 8.1.5 Option T High head temp Table 8-5 Specifications of HRSH100/150/200/250-W-20-T1 HRSH200-WModel HRSH100-WHRSH150-WHRSH250-W20-T 20-T 20-T 20-T Rated flow rate (Outlet) L/min 125 (0.5 MPa) Pump capacity Maximum flow rate L/min 180 Circulating fluid system Maximum lifting height m 80 Settable

Do not install in Zone 0 (as defined in IEC 60079-101:2008) or Zone 20 (as defined in IEC 60079-10-2:2009) Zone 0 area classification: An area in which an explosive gas atmosphere is present continuously or for long periods or frequently.