2–4

T T Unit: N.m Cylinder stroke (mm) Bore size (mm) 5 10 100 40 45 50 75 15 20 25 30 35 12 0.11 0.10 0.08 0.07 0.07 0.06 16 0.15 0.12 0.11 0.10 0.09 0.08 20 0.19 0.18 0.17 0.16 0.37 0.32 0.28 0.25 0.23 0.21 25 0.21 0.20 0.18 0.17 0.40 0.35 0.31 0.28 0.25 0.23 32 0.25 0.20 0.39 0.36 0.34 0.32 0.66 0.59 0.53 0.49 0.45 0.42 40 0.43 0.36 0.65 0.61 0.58 0.55 1.06 0.96 0.88 0.81 0.75 0.70

CLK1

11 2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

17

h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 Applicable cylinder Applicable cylinder 4.5 67.3 12 5 (Max. 16.5) 70 RB1412 3.5 46.7 7 5 (Max. 16.5) 60 RB1007 5.5 73.2 15 8 (Max. 20) 90 RB2015 6 4.5 67.3 12 8 (Max. 20) 74 RB1412 5.5 73.2 15 9 (Max. 25) 100 RB2015 4 4.5 67.3 12 9 (Max. 25) 94 RB1412 1194 MY1B Series Mechanically Jointed Rodless Cylinder Basic Type Side Supports Side

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

IR1000/2000/3000

B410T B310T B210T t Interface Y40 Y30 Y20 G y Interface with L-bracket (e + t) Y40L Y30L Y20L u Interface with T-bracket (r + t) Y40T Y30T Y20T PPA AL tInterface 97.5 133 172 eL-bracket rT-bracket 135 qAF2000 IR1000 wAFM2000 178 qAF3000 IR2000 wAFM3000 234 qAF4000 IR3000 wAFM4000 Accessory (Option)/Part No.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Confirmation of non-rotating accuracy 3-1 Rolling direction 3-2 Pitching direction + + + T Allowable Rotating Torque Non-rotating Accuracy Deflection Angle of Eccentric Load Allowable rotating torque T (Nm) 2.7 4 5 7 15 20 30 Non-rotating accuracy () Non-rotating accuracy () Bore size (mm) 20 25 32 40 50 63 80 Bore size (mm) 20 25 32 40 50 63 80 Bore size (mm) 20 25 32 40 50 63 80 0.4

MGF

Mounting height Reduction by 15 to 20% (Compared to SMC series MGQ) Guide Table Series MGF 40, 63, 100 Built-in non-rotating mechanism Internal guide pin prevents table rotation. Built in T-slots T-slots are provided on 3 faces of the body (except port face), allowing mounting for various brackets. (Not suitable for mounting the cylinder itself.)

5 Port Solenoid Valve, Series VQC

Stations Note 1) K T Kit S Kit With name plate Note 2) (available for T Kit only) TD0 1 to 10 (20) Terminal block box kit The maximum number of stations differs depending on the electrical entry.

3

113 132 20 222 250 279 25 282 319 355 32 445 494 542 639 40 517 570 623 728 50 921 1001 1081 1241 63 1256 1364 1472 1687 Use a clamp arm that is available as an option.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

T Example) MY2H40G-999L-A93-XB11 15 Order Made Specifications 5 Holder Mounting Bracket -X416/X417 Holder mounting brackets are used to fasten the stroke adjusting unit at an intermediate stroke position.

Power Valve: Economy Valve Series VEX5

(Refer to the figure-1.) 4) Remove the cable gland r, plain washer t and rubber seal y.

RSQ

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

Series AK1000

Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.

VM

P.T. 20 N F.O.F. 30 O.T. 50 T.T.

Table of Contents

Stroke ST (mm) 0 4 6 8 10 15 20 Caution Stroke ST (mm) When driving an inertial load, operate a cylinder with kinetic energy within the allowable value.

Non-contact Gripper

XT661-2A: F = f x (1/t) = 0.8 x (1/2) = 0.4 N XT661-4A: F = f x (1/t) = 3.8 x (1/2) = 1.9 N XT661-6A: F = f x (1/t) = 5.9 x (1/2) = 2.95 N XT661-8A: F = f x (1/t) = 7.5 x (1/2) = 3.75 N XT661-10A: F = f x (1/t) = 14.4 x (1/2) = 7.2 N 9700 g 9700 x 9.8/1000 = 95.06 N XT661-10A: Temporary lifting force 11.2 N < Workpiece mass 9700 g (95.06 N) 3) Confirm the relationship temporary lifting force

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

CXS

side: Same) 102 156 62 20 CXSW10-20 112 176 72 30 CXSW10-30 (Z) (20) 4-M3 x 0.5 with depth 5 4 (20) 122 196 82 40 CXSW10-40 2-M4 x 0.7 with depth 7 132 216 92 50 CXSW10-50 157 266 117 75 CXSW10-75 182 316 142 100 CXSW10-100 207 366 167 125 CXSW10-125 0.2 232 416 192 150 CXSW10-150 For CXSW10-10 and CXSW10-20 only, a part of the switch rail (dimensions marked with an "") is notched to facilitate

Rotary Table

angular acceleration after t seconds can be found as follows. t ( 1 ) 2 1 ( 2 ) C t tdt 2 When 0 t , rotation angle =0, so the integration constant is C=0. t t 2 1 2 1 2 thus, 2 t 28 - Auto switch type for rotary table The rotary table has a magnet mounted on its piston and an auto switch on the outside of the body to detect the piston position (table position).