Silencers/Exhaust Cleaner Series AN
/Series AMC 1

8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

Air Slide Table Series MXS

34.5 M10 x 1 Table mounting section MXS-AS16 (L)-X12 25 44.5 MXS-AS20 (L) 5 27.5 Q MXS20 (L) M12 x 1.25 13 17 6 13 21 M6 x 20 24 M6 x 20 25 45.5 MXS-AS20 (L)-X11 15 37.5 MXS-AS20 (L)-X12 25 47.5 I MXS-AS25 (L) 5 32.5 J H MXS25 (L) MXS-AS25 (L)-X11 15 42.5 16 19 6 17 25.5 M8 x 25 M8 x 25 26.5 M14 x 1.5 31 53.5 MXS-AS25 (L)-X12 25 52.5 Size of hexagon socket head cap screw It is also available

7ND9071en

11 L 11 L (SOL1) L+ 12 13 L+ 12 NOTE 8 (SOL2) Ex i Barrier 13 L+ (SOL PWR1) (SOL PWR2) TOP SW+ TOP SW BTM SW+ BTM SW Ui (Vmax) Ii (Imax) Pi (Pmax) Li Ci L 14 L 13 NOTE 8 L+ L 14 16 L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii (Imax) Po Pi (Pmax) 15 L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.

SFOD-OMT0010

Caution When mode CIR-R/L is repeatedly used, there will be an accumulated error in the achieved position due to the motor resolution. Use the instruction ABS once or twice every 2 or 3 times of using mode CIR-R/L for correcting the positional accuracy.

VQ5000

Note 3) When specifying more than one option, enter symbols in alphabetical order. 23 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Lead Wire Kit) L 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R2 5 R1 3 1 P SMC 2-G1 (electrical entry) 6-3/4 Ports P(SUP), R(EXH) Cable length L 0: 600mm L 1: 1500mm L 2: 3000mm U D U D U D 179 106 46.8 59.2 83.5 55.5 M5 ground screw

CNG

NDH10 MM MM MM NDH10 MM L L R1 R1 R1 R R R1 R R E1 E1 E1 E1 U1 NX NX A1 U1 A1 L1 U1 A1 NX U1 A1 L1 NX L1 NZ A L1 A NZ A A ND Part no. Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L Applicable A Applicable bore size (mm) MM R1 U1 NDH10 NX R1 R Part no. R pin part no.

IDG

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

Magnetically Coupled Rodless Cylinder

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Intrinsically Safe Valve

with cover (LL) 53-SY5 40(R)-LL-02 3 4 5 L (Lead wire length) 156 Insulator: Red (+) Insulator: Black () 0.3 mm2 4.1 34.5 37.2 84.3 Terminal type (TT) 53-SY5 40(R)-TT-02 3 4 5 Max. 10 189.6 L (Lead wire length) Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 5.9 101.1 25 Base Mounted Series 53-SY5000/7000/9000 Dimensions: 53-SY7000 2-position single L-type plug connector (L) 53-SY7140(R)-

EX510

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

Cylinder with Lock Series CNS

0.3 56 53 182 290 1/2 3/8 144 32 144 20 40 40 90 63 43 14 18.5 215 35 35 Up to 1200 (mm) Bore size (mm) GR J K KA L M MA MM N P Q R RR S T U V VA H Z ZZ 125 140 160 30 M14 x 1.5 15 31 65 19 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 29 303 87.5 35 20 23 110 478 507 30 M14 x 1.5 15 31 75 19 M12 x 1.75 M30 x 1.5 35 1/2 93.5 25 32 343 95 40 20 28 110 528 560 35 M16 x 1.5 17 36 80 22 M12 x 1.75 M36

2-Color Display Digital Flow Switch Series PFM

/min 30% 70% 40% 60% 8% 92% 1.0 to 52.5 l/min 1.0 to 50.0 l/min 20.0 mA 5.00 V 0 to 52.5 l/min 10% 90% PFM750 20% 80% 1.0 to 42.0 l/min 1.0 to 40.0 l/min 16.8 mA 4.20 V 0 to 42.0 l/min 30% 70% 40% 60% 8% 92% 2 to 105 l/min 2 to 100 l/min 20.0 mA 5.00 V 0 to 105 l/min 10% 90% PFM711 2 to 95 l/min 2 to 90 l/min 18.4 mA 4.60 V 0 to 95 l/min 20% 80% 30% 70% 2 to 84 l/min 2 to 80 l/min 16.8 mA

ITV

Approx. 172 Applicable products and accessories Applicable model ITV ITV20 ITV30 q Air filter w Mist separator e L-bracket r Spacer t Spacer with L-bracket (e + r) AF30 AF40 IC AFM30 AFM40 B310L B410L VBA Y30 Y40 234 Y30L Y40L VE qAF40 wAFM40 VY1 G Accessory (Option)/Part No. PPA AL Flat bracket Dimensions Part no.

VZS

For details, refer to pages 3-7-19 and 3-7-20.

LX Series Compact Electric Actuators

[r[ $$or tE L X P B T I o.l O",u*o, "r,"p"f i?'Ic.dffiAil a Number ot auto switch t1--'l-G'l [?T,,*l ffi swltch type Screw lead Origin point switch Wilh (Wire length: d.3m) Origin Home Switch Informalion LX series acluators are available with an optional photo micro sensor as an origin home switch to detect when the acluator is fully retracted.

Direct Operated

Class B Class H Rated voltage S L Z S L Z Example VVX311-05-1 . 1 set VX3111A-00-1GR1 .. 4 sets VVX31-4A-F . 1 set is the symbol for mounting. Add an in front of the part numbers for solenoid valves, etc. to be mounted.

240

6N q w e r t y u i o !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

3

Low temperature operation 1) The valve can be used in an ambient temperature of between 20 to 10C.