Series 10-, 21- AW-B Filter Regulator

-06-B 10-/21-AW60K-B 142.1 174.1 176.1 261.1 93.9 122.1 154.1 156.1 241.1 91.4 Dimensions B B B B Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20K-B 10-/21-AW30K-B 10-/21-AW40K-B 10-/21-AW40K-06-B 10-/21-AW60K-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5

Fluoropolymer Piping Equipment

type Type Metric Inch Symbol 1, 2 A, B LVP LVW Size combination (Metric) Size combination (Inch) B side (Center) C side (Right) A side (Left) LQ1 LQ1 B side (Center) C side (Right) A side (Left) Class Model Applicable tubing size (mm) Class Model Applicable tubing size (inch) LQ3 10 x 8 8 x 6 10 x 8 10 x 8 10 x 8 8 x 6 10 x 8 8 x 6 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10

Electric Actuator Miniature Rod Type Miniature Slide table Type

Confirm the position where the pushing operation starts. a b c d e f g h i j k No.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Lightweight and Compact

No anchor bolt is included. 77 A HRS090 Series Standard Type Cooling Capacity HRS090-A-20/40 (50 Hz) HRS090-A-20/40 (60 Hz) 12 12 10 10 Ambient temperature 32C Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 40C Ambient temperature 40C 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature

Hydraulic Filters

Bracket mounting base port size 10 to 24 G50 SSA40 Bracket mounting base port size 03 to 08 D D J J' 16 G60 SSA50 X X' X X' J 20 24 G75 G85 SSA65 SSA80 2 x K depth L 4 x K depth L DRAIN Note) The companion flange mounting base conforms to JIS B 2291 (21 MPa pipe flanges for hydraulic use) SSA. (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P

SFOD-OMT0010

speed [mm/s] 20 10 20 10 20 10 (Independent and interpolation) Min. speed [mm/s] 25 13 27 14 30 15 (Speed tuning control) Supplement 1.4 Initial setting of LEP series Model LEP8 LEP16 Lead symbol J K J K Lead [mm] 8 4 10 5 Stroke [mm] Others 25 Others 25 Max. speed [mm/s] 300 250 150 350 250 200 Min. speed [mm/s] 20 10 20 10 (Independent and interpolation) Min. speed [mm/s] 25 13 27 14 (

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Circuit Cable color Shield Vcc GND A A B B Z Z Brown Black Red Black Orange Black Yellow Black Connector B terminal no.

Modular Type Air Filter Series AF

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance

CC

Data The stop and skip valves must be normally closed. 10-17-5 6 Air-hydro Unit Series CC How to Order The air-hydro unit consists of a converter and a valve unit that are compactly integrated.

o

a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03 (51.5) Stations 7 8 10 ']l 12 't3 14 15 16 17 1a 't9 20 L1 1.40 1.41 (46) (56.512.64 (67) 3.O5 3.46 (77.5) (88) 3.84 (e8.5) 4.29 (109) 4.70 (119.5) 5.12 h30) 5.53 (140.s) 5.94 6.36 (15r) (161.s) \172) (182.5) 7.60 (is3) 8.O1 8.43 (203.5)

o

a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03 (51.5) Stations 7 8 10 ']l 12 't3 14 15 16 17 1a 't9 20 L1 1.40 1.41 (46) (56.512.64 (67) 3.O5 3.46 (77.5) (88) 3.84 (e8.5) 4.29 (109) 4.70 (119.5) 5.12 h30) 5.53 (140.s) 5.94 6.36 (15r) (161.s) \172) (182.5) 7.60 (is3) 8.O1 8.43 (203.5)

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03 (51.5) Stations 7 8 10 ']l 12 't3 14 15 16 17 1a 't9 20 L1 1.40 1.41 (46) (56.512.64 (67) 3.O5 3.46 (77.5) (88) 3.84 (e8.5) 4.29 (109) 4.70 (119.5) 5.12 h30) 5.53 (140.s) 5.94 6.36 (15r) (161.s) \172) (182.5) 7.60 (is3) 8.O1 8.43 (203.5)

CC

Data The stop and skip valves must be normally closed. 10-17-5 Air-hydro Unit Series CC How to Order The air-hydro unit consists of a converter and a valve unit that are compactly integrated.

Mist Separator

Semi-standard: 6 Semi-standard: 6C Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc C2SF-6-A C2SF-6C-A G G NPT C2SF-6(Z)-A NPT C2SF-6C(Z)-A Option symbol Semi-standard symbol J 6J CJ 6CJ Semi-standard: J Semi-standard: CJ Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc C2SF-J-D Rc C2SF-CJ-D G C2SFF-J-D G C2SFF-CJ-D NPT C2SFN-J

Micro Mist Separator

Semi-standard: 6 Semi-standard: 6C Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc C2SF-6-A C2SF-6C-A G G NPT C2SF-6(Z)-A NPT C2SF-6C(Z)-A Option symbol Semi-standard symbol J 6J CJ 6CJ Semi-standard: J Semi-standard: CJ Piping port Piping port (4) Part No. thread ty pe (4) Part No. thread ty pe Rc C2SF-J-D Rc C2SF-CJ-D G C2SFF-J-D G C2SFF-CJ-D NPT C2SFN-J

Cylinder with Lock

D-Z7m D-Z8m D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NT D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250

Modular Type Lubricators Series AL

Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B

Cylinder with Lock Series MNB

C 4FD A K BN F GF GB Width across flats B1 Cushion valve 4-J MM H1 Q D E B V FB FY FT N FX FZ Width across flats ZZ + Stroke (mm) Width across flats 10 Effective thread length (mm) Bore size (mm) Stroke range (mm) BP A B1 H1 BN C D Ee11 F FT FX FY FZ GA GB GC GD FB B FD 32 1/8 22 17 6 97 32.5 12 30 13 10 72 38 87 83 13 45.5 13 56 54 to 500 7 19.5 40 1/8 30 22 8 104 38 16 35 13 10 83 46