A

E 10 M5 20 18 14 30 14 38 40 38 12 0 Standard 1 With Built-in Gauge 2 With Built-in Gauge for right to left flow (1 & 2 available for body sizes 20~40 only) P O R T T H R E A D O P T I O N A L S P E C S Rc(PT)* Remove (N) when ordering F PF N NPT* Remove (N) when ordering P O R T S I Z E A C C E S S O R I E S M5 M5 01 18 02 14 03 38 04 12 06 34 Without D W/ Auto Drain B Bracket D

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

AL H1 l 10.2 U N BN CX C B ZZ + l + Stroke Z + l + Stroke h + l L RR ZZ + Stroke Z + Stroke H S + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C CDH10 CX D E F GA GB GC GD GL GR H1 Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 96 1/4 1/4 44 10 +0.058 0 15 0.1 0.3 16 32 10 85 15 26 54 10 10 8 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 12 +0.070

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A A F F A F MX L L L L = 100 mm 8 L = 100 mm 8 MTS MXP8-10 MXP8-10 MXP8-20 MXP8-20 MXP8-10 MXP8-20 8 L = 100 mm 0.03 0.04 MY 0.06 Table displacement (mm) Table displacement (mm) Table displacement (mm) MXP8-10 MXP8-10 MXP8-20 MXP8-20 MXP8-10 MXP8-20 0.05 MXP8-10 MXP8-10 MXP8-20 MXP8-20 MXP8-10 MXP8-20 0.03 CY 0.02 0.04 0.02 0.03 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Cylinder with Lock

211 50 70 9 12 45 90 110 25 230 63 80 9 12 50 100 120 25 249.5 80 100 12 16 63 126 153 30 300 100 120 14 16 75 150 178 35 328.5 Center trunnion: C96NT-W XV + 1/2 + stroke Z + 1/2 + stroke UW TD TL TM TL L1 [mm] Bore size L TDe8 TL TM UW XV Z 32 17 12 12 50 49 131 153 40 22 16 16 63 58 150 174 50 22 16 16 75 71 166 198 63 28 20 20 90 87 179 211 80 34 20 20 110 110 221 261 100 40 25 25 132

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

RD SD LRUN PW B B B B B SZ R5.5 31 11 SMC SMC SMC SMC VP4 50 67 S0700 81 1 2 3 4 5 6 7 n Stations D side U side VQ 1(P), 5(R1), 3(R2) port 6 x Rc 3/4 Manual override VQ4 VQ5 SMC 24(23) VQC 179 167 B B B B B B B 132 VQZ 70(71.5) 91 SQ 20 A A A A A A A 3(1) 3(1) 48.5 4(A), 2(B) port 2n x Rc 1/2, 3/4 VFS 51 80.5 EX123: 2 x G 1/2 EX124: 4 x G 1/2 VFR Electrical entry Use a dripproof plug assembly

VFR

1Bore size , VV5FR5-01FUStation 1Bore size Light/Surge voltage suppressor 235.5 204 (72) 60 11 4 60 U side Manual override (Non-locking) 6 [2] 21 R5.5 B B B B A A A A n B B B A A A B B B B A A A A 3 L1 L2 2 11 11 71.5 (Pitch) P = 51 Pitch P = 51 71.5 1 Stations 2n-Rc 1/2, 3/4 (A, B port) 20 24 [23] 105.5 176.5 209 Plug assembly: VVZS3000-21A(Option: Refer to page 3-5-8.) 2n-Rc 1/2 58 28 70

Compact Manifold Regulator Series ARM5

R 04 Z A q w e r u t y N Common Supply Type 1.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

Guide Cylinder Series MGG

Series MGG Guide Cylinder 20, 25, 32, 40, 50, 63, 80, 100 Integration of a basic cylinder and guide rods Linear Transfer Unit Guide Cylinder Series MGG Standard stroke (mm) Bore size (mm) 75 100 125 150 250 300 200 P. 356 20 Integration of a basic cylinder and guide rods. Long stroke is available. Equipped with a shock absorber as standard.

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Circuit Cable color Shield Vcc GND A A B B Z Z Brown Black Red Black Orange Black Yellow Black Connector B terminal no.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1) (Station n) 15.5 (Light/surge voltage suppressor) + + + + + 48.5 [55.5] + + + + + 33.1 20 A A 20 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" A A 5 5 (Pitch) P=10.5 M5 x 0.8 (A port) (Pitch) P=10.5 15.5 15.5 Station L1 L2 3 52 44 Station 20 230.5 222.5 6 83.5 75.5 8 104.5 96.5 10 125.5 117.5 Station 2 41.5 33.5 4 62.5 54.5 5 73 65 7 94 86 9 115 107 11 136 128 12 146.5

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

4 x M2.5 x 0.45 thread depth 2.5 12.5 K Bottom view of MXQ6-30 13223 6.5 20 16 13 3.5 0.3 19.2 20 Z ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16

ISO Standard Hydraulic Cylinder

57 3/4 159 9 41 45 68 76 100 25 to 1000 96.9 M16 x 1.5 19 32 172 128 16 M42 x 2 101 130 216 72 50 20 63 168 26 56 47 3/4 56 10 52 79 91 Bore size (mm) X2 Y Y1 Y2 ZA Z V X1 ZZ 32 5.5 73 153.5 60 20 13 10 128 26 40 6.5 98 185 22 62 20 10 153 31 50 7 92 199 20 67 29 13 159 28 63 12 86 216 16 71 33 17 168 22 80 15 105 251 23 77 37 17 190 29 100 15 102 275 18 82 44 22 203 23 347 CHSG Series Dimensions

NCQ8

NCDQ8A(B)Z-(C)(M) (in) NCDQ8A(B)Z-100T(M) (025st to 100st) (in) D-A9, D-A9V D-M9(V), D-F9W(V) D-A9, D-A9V D-M9(V), D-F9W(V) D-F9BAL D-F9BAL Bore size Bore size A B HS A B HS A B HS A B HS A B HS A B HS 056 075 106 150 200 250 056 075 106 150 200 250 0.24 0.14 0.33 0.31 0.2 0.35 0.04 0.08 0.12 0.12 0.2 0.28 0.71 0.81 0.96 1.18 1.45 1.6 0.39 0.3 0.49 0.47 0.35 0.51 0.2 0.24 0.28 0.28 0.35 0.43

Air Slide Table Series MXP

MXP Dimensions: MXP12 2 x M4 x 0.7, depth 6 Metal stopper Z 3 V K 5 MXH Max. 4 MXU 4 20 G Max. 3 MXS M Stroke: S 7.5 Note) Since the body and table are made of a magnetic substance, it could become magnetized if touched by a magnet, etc.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

3 -X 20#1 Data Slide bearing Long stroke View A-A @9 Component Parts Material Material Note Note No. Description No.

100

Tightening with excessive force may damage the product. 18 Multistage Ejector Max. suction flow rate: 300 L/min (ANR) Max. suction flow rate: 600 L/min (ANR) ZL3/ZL6 Series Only for the models with a valve or pressure switch RoHS How to Order ZL 3 M 06 06 06 Without valve ZL 3 M K1 5 LO Z E A M G With valve ZL 3 M K1 5 LO Z V A M Pressure switch with energy saving function q w e r u !

Rotary Actuator

Applicable shaft type: Y Applicable shaft type: K X = Y = X = Long shaft side Long shaft side (mm) (mm) Long shaft side Y= X = X Y X Y Size Size Body (B) Body (B) 10 10 Body (B) 3 to 14 Body (A) Body (A) 3 to 14 1 to 14 1 to 14 15 15 Body (A) 4 to 18 4 to 18 1.5 to 18 1.5 to 18 Short shaft side Short shaft side 20 20 4.5 to 20 4.5 to 20 1.5 to 20 1.5 to 20 Y = 30 30 5 to 22 Short shaft side

Slide Unit Series CX2/CXWM/CXWL

For the strokes indicated in the parentheses of the 20 and 32, a shock absorber is to be mounted on single side of the plate. Note2) For the strokes other than those indicated above, refer to page 474. Note3) For 16, 20 and 25, strokes up to 300, and for 32, strokes up to 250 are available as made-to-order.

Slide Unit Series CX2/CXWM/CXWL

For the strokes indicated in the parentheses of the 20 and 32, a shock absorber is to be mounted on single side of the plate. Note2) For the strokes other than those indicated above, refer to page 474. Note3) For 16, 20 and 25, strokes up to 300, and for 32, strokes up to 250 are available as made-to-order.