Vacuum Pad

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

Vacuum Pad

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

Vacuum Pad

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

Mechanically Jointed Rodless Cylinder Series MY1

. 25) 5.5 22 87 12 82 15 31 100 8 73.2 15 RB2015 4 57 22 74 970 Series MY1B Mechanically Jointed Rodless Cylinder Basic Type Side Support Side support A MY-SA 2 x G 2 x H F MY1B E C D A B MY1M Side support B MY-SB MY1C MY1H 2 x J MY1HT MY1W E A B C D MY2C (mm) MY2H B C D 21 E 3.6 F 1.8 G 6.5 H 3.4 J A 35 Model Applicable bore size MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B

2/3 Port Valve

Ambient and Fluid Temperature Fluid temperature C Ambient temperature C (3) High temp. water (D, E, N, P) (3) High temp. oil (D, N) Temperature Power Water (Standard) Air (Standard) Oil (Standard) 99 (4) 100 (4) 80 60 10 60 40 40 60 60 40 1 AC DC AC/DC Max. Material No.

•

C!} Width across flats 12 ) ' ;=Yw lll ~ ~ '" 1 I rf" >() I / ~ ~()lliJJ M ~~ ~ ,L (mm) .8 (mm) Model M C D E F G ;. K ,L Y Model 'A .8 C D E F I:MSXQ.8 I: Ji J ;K .L y G H J G H ZPT40B 40 43 34 7.5 60 110 125 5 10 1 1265 6.2 13 4.4 48 16 ZPTSQ8.

CJ2

A1 L1 MM NX NDH10 R1 U1 Dd9 d L m t l 3 15.2 12.2 CD-J010 10 1.2 0.3 Type C 3.2 3.3 0.030 0.060 CM2 10 4.8 22.7 18.3 CD-Z015 16 I-J010B 10 CD-J010 1.5 0.7 Type C 5 8 21 M4 x 0.7 3 15.2 12.2 1.2 0.3 Type C 3.2 5.3 3.3 3.3 +0.048 0 0.030 0.060 0.030 0.060 3.1 8 9 CD-JA010 16 3 18.2 15.2 10 I-J016B 16 IY-J015 1.2 0.3 Type C 3.2 8 25 M5 x 0.8 4.8 16.6 12.2 1.5 0.7 Type C 5 3.3 5.3 5.3 +0.048

CJ2

A1 L1 MM NX NDH10 Set ring 3.3 Bore U1 L t R1 Dd9 d m l 0.030 0.060 0.030 0.060 0.030 0.060 0.3 3 1.2 15.2 12.2 C 3.2 CD-J010 10 0.030 0.060 0.030 0.060 +0.048 0 +0.048 0 0.3 C 3.2 8 21 M4 X 0.7 3.1 8 9 16.2 12.2 3 1.7 0.7 4.8 1.5 22.7 18.3 C 5 I-J010B 10 10 CD-Z015 16 IY-J010 3.3 3.3 5 CD-JA010 0.7 C 5 8 25 M5 X 0.8 6.4 12 14 16.6 12.2 4.8 1.5 3 1.2 0.3 18.2 15.2 C 3.2 I-J016B 16 16 10 IY-J015

Electric Actuator

Connector C (Terminal no.) Cable length (L) [m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 (5.7) 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 10 15 Actuator side Driver side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

A

mm S Y M B O L S AMG150 14 170 63 10 AMG250 38 191 76 10 AMG350 12 220 90 10 AMG450 34 241 106 10 AMG550 1 279 122 10 AMG650 1 12 388 160 10 AMG850 2 479 220 10 H O W T O O R D E R W AT E R S E P A R AT O R S E R I E S AMG AMG S U B-S TA N D A R D S P E C I F I C AT I O N S B O D Y S I Z E 150 1/8 Basis 250 1/4 Basis 350 3/8 Basis 450 1/2 Basis 550 3/4 Basis 650 1 Basis 850 1 1/2 Basis O

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

C10 Option 10 10 stations M Mixed D side For bottom ported: Rc 1/4, 3/8 only.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

pulses) 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses)

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-14A-10 3 pcs.

High Vacuum Angle Valve, XL Series

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Air Cylinder

Clevis Pivot Bracket Pin (For CM2E(V)) Trunnion Nut/Material: Carbon steel (mm) (mm) H Material: Carbon steel B d D m m L2 C D t t L1 d Part no. Applicable bore size B C D d H TN-020B 20 26 28 25.5 M20 x 1.5 10 TN-032B 25, 32 32 34 31.5 M26 x 1.5 10 TN-040B 40 41 45 40.5 M32 x 2 10 Part no.

Step Motor Controller

Connector C (Terminal no.) Cable length(L)[m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 15 16 (5.7) Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C 10 LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) 15 Actuator side Controller side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

2 Phase Stepper Motor/Without Motor Brake Series LXP

L (mm) Refer to page 304 for deflection data. 226 2 Phase Stepper Motor/With Motor Brake Series LXP Dimensions/LXPB2BC Scale: 30% The dimension inside [ ] shows the location at which the home position switch operates. 9 4-M6 x 1 depth 10 Section C 10 [16.5] 7.5 21.5 10 Section F 40.5 4.5 4-M6 x 1 B 4-9.5 4-5.6 +0.1 0 1 30.5 34 10 47.5 5.4 8.4 34 0.02 50 78 91 94 64 26 B 30 D 4H9 +0.030

Thermo-chiller/Rack Mount Type

water flow rate [L/min] Facility water flow rate [L/min] HRR030-W 25 15 HRR024-W 20 15 10 10 HRR018-W 5 5 HRR012-W 0 0 0 10 20 30 40 0 10 20 30 40 50 Facility water inlet temperature [C] Facility water inlet temperature [C] * This is the required facility water flow rate at the circulating fluid rated flow and the cooling capacity listed in the Cooling Capacity specifications.