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depth 4 6.4 12 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7 7.8 2.5 2.6 30 14 15.2 10.7 4.5 * For splash proof use (IP65), insert an air tube into the atmospheric release port. 1.5 01: R 1/8 T1: NPT 1/8 (Refer to Specific Product Precautions 4 on the back cover for details.)

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

PSE200

When setting the pressure, allow 7 digits or more.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

C Ambient temperature C Dew point indicator purge air flow rate Port size (nominal size B) 1/4, 3/8 1/8, 1/4 Weight kg (with bracket) 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (0.87) 0.77 (0.90) Note 1) With no freezing Note 2) ANR indicates the flow rate converted to the value for 20C at atmospheric pressure.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

Type: -, Maximum Indicated Pressure(Mpa): -, Outer Diameter(φ): -, Shape: Back side thread, Maximum Indicated Pressure: 0.7 MPa, Connection screw: R 1/4, Option: None, Size: 42.5, Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly, Unit Specifications: MPa

Display Pressure: 7 (0.7MPa), Connection Thread: 02M (R 1/4, M5 Female)

Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4)

Display Pressure: 0.7MPa, Connection Thread: R 1/4, M5 Female, Attachment: -

3M/SMseries

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

G36-10-01) indicates thread. Specify no symbol for Rc, and N for NPT. Please consult with SMC if NPT gauge is required. Note 6) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown. Use a sealant tape for sealing. Note 7) Piping adapter, O-ring, Hexagon socket bolt, Hexagon socket bolt assembly.

PSxx-OMH0002CN

"-"()7 D Digit () 1 digit=0.01 MPa 0.01 MPa 0.01,0.02,,0.99,1.00 F 01[MPa] F.S.=1-0=1[MPa] (1F.S.=10.01=0.01[MPa]) F.S.

LMU100/200 Series Mist Spray Unit

7!8ON/OFF valve for air blow !6ON/OFF valve for oil mist 190 190 t y q t y q 6 6 !0Supply pressure gauge !0Supply pressure gauge R3.5 R3.5 OIL, AIR OIL, AIR Rc1/4 Rc1/4 L L K K C C O O AIR BLOW SUP SUP !1Tank pressure gauge !1Tank pressure gauge 272 272 153 238 153 238 e e 189.5 153 2 189.5 2 u u w r i w r i o o Material Note Main Parts List Part no.

0.01

wiring/Supply port right) IN Spacer Seal for additional station End plate L End plate R Y200-A ISA-7-B ISA-6-B ISA-7-A When a 2 port solenoid valve is connected to the right: ISA-6-A When 2 air catch sensors are connected or when a 2 port solenoid valve is connected to the left: Bracket ISA-4-A Straight, 5 m A pair consists 1 set.

EXxx-OMS0026CN

/ 0 1 2 Reserved 3 () 1 4 () 5 Reserved 6 7 0 0 1 1 2 2 3 3 2 4 4 5 5 6 6 7 7 0 8 1 9 2 Reserved 3 Reserved 3 4 Reserved 5 Reserved 6 Reserved 7 Reserved 01 -63No.EX-OMS0026CN EDS PLC EX600 EDS PLC EX600 EDS ex600_sen3_4_v10.eds ex600_1.ico Logix Designer TM TMEX600 Rockwell Automation Logix Designer EDS Generic Ethernet Module 1EDS [Tools][EDS Hardware Installation

IZ-OMU0031-CN

L(2) ZS-27-01 -7No.IZ*-OMU0031 LCD (OUT1)() (OUT2)() (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 ON/OFF ON/OFF -8No.IZ*-OMU0031 (2 m)ZS-28-A (1 )ZS-28-C 0.140.2mm 0.81.0 (M3X5 L(2))ZS-28-B (M3X8 L (2 ))ZS-27-C (M38 L(2))ZS-27-D ZS-27-01 -9No.IZ*-OMU0031 M3X5 L(2) 0.50.7 Nm M3X5L (ZS-28-B) M3X5L M3X8 L(2 ) M3X8L ( ZS-27-01) (ZS-27-C) 90 2 -10No.IZ*-OMU0031 ,FG 20mm () SMC 3M

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8