VXA21/22

Valve (Port size) VQ 1 (1.5mm) 2 (2.2mm) 3 (3mm) 4 (4mm) VXA31 VXA32 01 ( ) 1 8 02 ( ) 1 4 03 ( ) 3 8 02 ( ) 1 4 Ordering Example (Example) Series VXA31, Orifice size 1.5mm, Rc(PT)1/8 (Part number) VXA3114-01 4.1-69 VXA31/32 Air How to Read the Graph In the sonic flow region: For a flow of 100 l/min.

NCQ8

4-1/8 1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 3-3/8 3-5/8 3-7/8 4-1/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 3-1/2 3-3/4 4 4-1/4 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 4-1/4 4-1/2 4-3/4 5 0.19 0.33 0.25 0.21 0.39 0.27 0.45 0.27 27 Series NCQ8 Mounting Bolt Size for NCDQ8B056 to 250-T (With Auto Switch) (Inch) Model D C Bolt size Model D C Bolt size NCDQ8B056-025T 037T 050T 062T

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

SYJA3000

120 PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center SYJA7520-01 Base mounted 01 02 01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position closed cente SYJA7340(1) M5 X 0.8 200 (120) 1/8, 1/4 9 (0.5) [6.5 (0.36)] 3 position exhaust center SYJA7440PA, B: 13.5 (0.75) [7 (0.39)] A, BR1

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

HRX-OM-S004

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Option B [Earth leakage breaker] . 4-2 4.2.3 For HRS100/150-**-20-B1,HRS100/150-**-40/46 . 4-3 4.2.4 Setting of circulating fluid temperature . 4-3 4.3 Preparation of circulating fluid . 4-4 4.4 Operation Start and Stop . 4-7 4.4.1 Starting the product . 4-7 4.4.2 Stopping the

TA301

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option 01 1/8 Nil Without bracket 02 1/4 VR B Foot bracket VH Specifications VHS Fluid Air Operating pressure range (MPa) 0 to 1.0 Pilot pressure range (MPa) 0.2 to 1.0 Ambient and fluid temperature (C) 10 to 50C (No freezing. Refer to page 5-11-4.)

HRX-OM-W032

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of Circulating Fluid Supply to Users Equipment . 4-3 4.4 Operation Start and Stop . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check Items during Startup . 4-8 4.6 Adjustment of Circulating

Display Pressure: 0.4MPa, Connection Thread: R 1/8, M5 Female, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Non Removable, Wrench Tighten

Display Pressure: 0.4MPa, Connection Thread: R 1/4, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Non Removable, Wrench Tighten

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.4MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: Nickel Plated

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.4MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: Nickel Plated

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.4MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.4MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]

Size: 46 (42.5 O.D.), Display Pressure: 4 (0.4MPa), Connection Thread: N02 (NPT 1/4), Clear Cover Material: Polycarbonate, Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Type: Stainless Steel / Clean Pressure Gauge, Maximum Indicated Pressure(Mpa): 0.4, Outer Diameter(φ): 57, Shape: Back side thread, Maximum Indicated Pressure: 0.4 MPa, Connection screw: R 1/8, Option: With M5 (female thread), Size: 57, Grade: Parts: general degreasing, Assembly: general production line, Transparent cover material: Polycarbonate (Hard coated), Attachment: Clear cover has

Type: Stainless Steel / Clean Pressure Gauge, Maximum Indicated Pressure(Mpa): 0.4, Outer Diameter(φ): 57, Shape: Back side thread, Maximum Indicated Pressure: 0.4 MPa, Connection screw: R 1/4, Option: None, Size: 57, Grade: Parts: general degreasing, Assembly: general production line, Transparent cover material: Polycarbonate (Hard coated), Attachment: Clear cover has no protrusion (clear

Size: 42.5 O.D., Display Pressure: 0.4MPa, Connection Thread: NPT 1/4, Clear Cover Material: Polycarbonate, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: -

Display Pressure: 4 (0.4MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Grade: SRB (General Degreasing, Production Line), Attachment: C (Clear Cover Non Removable, Wrench Tighten)