Rubber seal 5 Port Solenoid Valve Series SYJ7000

Refer to page 83.) 30 or less 60 or less 5 3 2 position single 2 position double 3 position Operating pressure range MPa Ambient and fluid temperature (C) Response time (ms) (at 0.5 MPa) Max. operating frequency (Hz) Manual override (Manual operation) Pilot exhaust method Lubrication Mounting orientation Shock/Vibration resistance (m/s2) Enclosure 2 position single, double 3 position 2 position

3 Port Air Operated Valve Series SYJA300

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

IR1000/2000/3000

VAC Vacuum pump side Atmosphere 30 AMR 18 50.6 ITV 35 43 2-Rc 1/8 Connection port SET G SET Pad side VAC Vacuum pump side 43 IC 2-Rc 1/8 Pressure gauge connection port 2-Rc 1/8 Pressure gauge connection port 50 60 VBA 02 03 04 IRV30002-Rc 1/4 Connection port 70 VE 2.3 54 VY1 24 G 50 (R) PPA SMC 66 6 P K U C S O H L AL 42 Panel cut Panel thickness: Max. 4 10.5 x 8.5 2-Rc 1/8 Pressure gauge

AC Servo Motor Driver (Pulse input type/Positioning type ）

_ _ 2 B 41 _ _ 4 B 10.4 _ _ 0 C 187 _ _ 2 C 40 _ _ 4 C 10 _ _ 0 D 173 _ _ 2 D 38 _ _ 4 D 9.7 _ _ 0 E 160 _ _ 2 E 37 _ _ 4 E 9.4 _ _ 0 F 150 _ _ 2 F 36 _ _ 4 F 9.1 _ _ 1 0 140 _ _ 3 0 35.2 _ _ 5 0 8.8 _ _ 1 1 132 _ _ 3 1 33.1 _ _ 5 1 8.3 _ _ 1 2 125 _ _ 3 2 31.3 _ _ 5 2 7.8 _ _ 1 3 118 _ _ 3 3 29.6 _ _ 5 3 7.4 _ _ 1 4 112 _ _ 3 4 28.1 _ _ 5 4 7.0 _ _ 1 5 107 _ _ 3 5 26.8 _ _ 5 5 6.7 _ _ 1

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Symbol 02 2 stations 2 stations Note 1) Connector mounting position Double wiring specification Double wiring specification ... ... ... ... ... ... ... ... 10 02 11 02 11 stations 10 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout Note 2) Specified layout (up to 22 solenoids possible) (up to 21 solenoids possible) 20 20 20 stations 20 stations PG: Flat cable

Silencer Series AN

Performance Weight g Effective area mm2 Sonic conductance C [dm3/(sbar)] Recommended flow m3/min(ANR) Model AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 5 1 0.4 or less 0.5 10 2 0.8 or less 1 15 3 1.0 or less 2.5 35 7 3.0 or less 4 60 12 5.0 or less 5.5 90 18 8.0 or less 8.5 Note) Recommended flow rate is the flow at 72.5psi (0.5 MPa) in the inlet pressure.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2

JXCx-OMT0023

Table 11.2 Wire size selection example 2 (HIV wire) Driver Wires [mm2] (Note) 1) L1 L2 2) 24V 0V 3) U V W 4) P C 5) B1 B2 LECSA-S1 2(AWG14) 2(AWG14) 2(AWG14) 2(AWG14) 1.25(AWG16) LECSAS3 LECSA2-S4 Note. Wires are selected based on the highest rated current among combining servo motors. 11 16 11.

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

5 Port Solenoid Valve SY Series

/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23 0.93 4.1 3.3 0.33 0.81 0.61 0.44 0.16 0.64 0.45 0.18 Double Double

2-Color Display Digital Flow Switch Series PFM

A B 4 (5/32") C4 10.1 8.1 6 C6 10.3 8.3 8 (5/16") C8 12 10 1/4 N7 10.3 8.3 PFM -01/02--X693 PFM -01/02--X694 7 5 7 5 10.2 10.2 43 1 1 IN OUT A 43 (34.2) (34.2) 13 3 13 3 A 18 C 18 B C OUT B 48 20 IN 20 48 2 x 3.4 2 x 3.4 C (Width across flats) A B Port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 13 11 17 17 15 G 1/4 21 940 Series PFM7/PFM5 Made to Order 2 Please contact SMC for detailed specifications

LEC-OM07605CN

(b)(SW1) 164( (3)(c)) (SW1) 8 7 6 9 A 5 B 4 C 3 D 2 1 0 F E (c) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D

0.01

SFD-EL101 SFD SFD Element set Element set 1 1 With O-ring With O-ring Bracket Bracket 2 2 Material: Stainless steel 304 Material: Stainless steel 304 SFD-BR101 SFD-BR101 LLB Dimensions AD SFD101-02 SFD102-02 GD 25 66 66 25 19 19 24 24 50 40 50 40 13 2 x 4.5 Bracket Bracket 13 2 x 4.5 325 SFD Series Made to Order Specifications 2 Please contact SMC for detailed specifications, delivery and

Series AK1000

pressure Code Code Bonnet Standard Panel installation4) Bonnet port (NPT 1/8 inch) Connections (Inletq, Outletw) 02 06 10 15 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) No code P Code Connections NPT 1/4 inch NPT 3/8 inch NPT 1/2 inch 1/4 inch compression 3/8 inch compression 1/2 inch compression 4 6 8

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2.5 depth 6 2 x P Q PF2M711/721S-02(-L) 98 17 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N2(-L) 98 17 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-F2(-L) 106 21 2.8 depth 6.2 2.5 depth 5 PF2M7mW-m1/2(-L) A D 58 48 18 OUT1 OUT2 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 38.5 (30.9) 3 C 18 2 x 3.4 Width across flats B 2 x Port size Port size: 1, 2 OUT IN 68 [mm] 28 Model A C B D P PF2M705/710/725/750W -01(

VM

One way roller lever VM220-02-02 VM230-02-02 VM220-02-02S VM230-02-02S JIS Symbol 2 port 17 polyacetal or hard steel roller 3 port EXH port (3 port only) 0.5 MPa supply 7.0 mm P.T. 22 N F.O.F. 5.0 mm O.T. 2-5.5 mounting hole 12.0 mm T.T.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.

5 Port Solenoid Valve

(B) 2 Port size 1 3 Nil Without sub-plate (For manifold) VF 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2-position double 3-position exhaust center 02 1/4 03 3/8 (A) 4 (B) 2 (A) 4 (B) 2 VP4 Metal 4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 Porting specifications 2-position double 3-position pressure center (A) 4 (B) 2 (A) 4 (B) 2 Rubber Nil Side ported B Bottom ported VQ 4/5 5 1 (P) 5

AC Servo Motor Driver (Network card type ）

_ _ 2 B 41 _ _ 4 B 10.4 _ _ 0 C 187 _ _ 2 C 40 _ _ 4 C 10 _ _ 0 D 173 _ _ 2 D 38 _ _ 4 D 9.7 _ _ 0 E 160 _ _ 2 E 37 _ _ 4 E 9.4 _ _ 0 F 150 _ _ 2 F 36 _ _ 4 F 9.1 _ _ 1 0 140 _ _ 3 0 35.2 _ _ 5 0 8.8 _ _ 1 1 132 _ _ 3 1 33.1 _ _ 5 1 8.3 _ _ 1 2 125 _ _ 3 2 31.3 _ _ 5 2 7.8 _ _ 1 3 118 _ _ 3 3 29.6 _ _ 5 3 7.4 _ _ 1 4 112 _ _ 3 4 28.1 _ _ 5 4 7.0 _ _ 1 5 107 _ _ 3 5 26.8 _ _ 5 5 6.7 _ _ 1

AC Servo Motor Driver (CC-Link Type ）

(a) Transmission Transmit command [1][2] and data No. [C][0].