VP4

exhaust center Closed center Exhaust center Silencer (AN101-01) Component Parts No.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

7 !8 !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

7 !8 !

ML1

7 !8 !

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Note 7) Note 7) PVQ Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Note 7) Note 7) ITVX Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

ML1C

4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

Digital Flow Switch Series PFA For Air Series PFW For Water

View A PFA3-B DIN rail type Sensor Blue Brown Black Analog output 1 2 3 4 3 x 7.2 (= 21.6) 8-M3 36 15 6.4 2 3.4 5 6 7 8 OUT1 N.C. Load Load 2 1 3 4 6.5 12 to 24VDC + 26 SMC FLOW SWITCH PFA312-(-M) 35.5 30 15.2 56 (4.5) 44 UNIT RESET SET Sensor Blue Brown Black Analog output 1 2 3 4 5 6 7 8 5 6 7 8 29 OUT1 N.C.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Electrical entry q Description 01 02 03 01 02 03 01 02 03 Mounting bolt and gasket are not included. Platinum silver Body C: Conduit VS4010-CSSub-plate Platinum silver Aluminum die-casted w T: Conduit terminal VS4010-TSSpool/Sleeve Stainless steel e U: Grommet, D: DIN terminal VS4010-SReplacement Parts Part no. No.

Dual Speed Controller with One-touch Fitting Series ASD 1

7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Note Description U seal U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Gasket Spacer ASD230F only Material HNBR HNBR POM, Stainless steel (1) Description No. !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !

ASD

7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Component Parts Note Description U packing U packing Cassette Packing O ring O ring O ring O ring O ring Gasket Spacer ASD230F only Material NBR NBR Description No. !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !

BP1000

47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

PS-OMH0005CN

48 ZS-26-D PSE100PSE200 -8No.PS-OMH0005CN-D () LED () () () (UP) (SET) ) (DOWN) ()OUT1(CH1CH4)OUT2(CH1)ON LCD() (UP)ON/OFF (DOWN)ON/OFF (SET) () SI(MPakPa) kgf/cm 2barpsiinHgmmHg ()CH1CH4 -9No.PS-OMH0005CN-D 7 7 "8"7 "-"()7 D digit() 1digit=1kPa 1,2,3,,99,100 1kPa F F.S.

AR Series Modular Type Regulator

v Note 7) v Note 7) v Note 7) v Note 7) Note 1) Option B, G, H, M are not assembled and supplied loose at the time of shipment.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Refer to "How to Order" on page 7 for auto switch model numbers.

PSxx-OMH0002CN

"-"()7 D Digit () 1 digit=0.01 MPa 0.01 MPa 0.01,0.02,,0.99,1.00 F 01[MPa] F.S.=1-0=1[MPa] (1F.S.=10.01=0.01[MPa]) F.S.

Swivels

A B Hex 1 Hex 2 Port 1 Port 2 A D Swivels PS410303-4-4 3.11 2.08 .75 1.19 7/16-20 7/16-20 78.9 mm 53.0 mm 19.0 mm 30.2 mm UNF-2A UNF-2A B Hex 2 Hex 1 PS610303-6-6 3.23 2.18 .88 1.31 9/16-18 9/16-18 82.0 mm 55.2 mm 22.2 mm 33.3 mm UNF-2A UNF-2A Port 2 Port 1 PS810303-8-8 3.56 2.38 1.12 1.50 3/4-16 3/4-16 90.3 mm 60.3 mm 28.6 mm 36.5 mm UNF-2A UNF-2A PS810303-10-10 3.76 2.48 1.12 1.50 7/8-

1

Note 7 NCA Non-rotating rod type Lateral load resisting type r, !1, !6, !7, !8, !9, @0, @1, @2, @3, @6, @9, #0, #1, #3, #4, #5, #6, #7 20, 25, 32, 40, 50 !9 is type L only. -XC6A r, !0, !5, !6, !7, !8, !9, @0, @1, @3, @4, @7, @8, @9, #1, #2, #3, #4, #5, #9, $0 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. Dr, !1, !

5

01 03 50 12 Part no.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8