CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D When mounting Series CU, refer to the below table. Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Heavy Duty Stopper Cylinder ø 50, ø 63, ø 80 RS2H Series

Cylinder stroke 30 40 30 mm (50, 63) Flange side Auto switch 40 mm (80) Nil Nil Without auto switch (Built-in magnet) Action D B T For applicable auto switches, refer to the table below. Auto switches are shipped together, (but not assembled).

Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released., CYL, COMPACT, BALL BEARING, ACTUATOR, CXSJ COMPACT CYLINDER, CB, YMM CXSJ BALL BEARING, .35273 lb, ModelStandard stroke (mm) 102030405075100CXSJL60.0480.0580.0680.0780.088

Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released., Cyl, Compact, Ball Bearing, GUIDED CYLINDER, 575, 0.21 lb

Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released., Cyl, Compact, Ball Bearing, GUIDED CYLINDER, 575, 0.22 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Magnet: D (Built-in), Series: 85 (Standard), Head Cover Type: N (Basic Integrated Clevis), Bore Size: 25mm, Stroke: 40mm, Cushion: Rubber Cushion, Rod Boot: None, Mounting Bracket: None, Accessory: None, Auto Switch Mounting Type: B (Band), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: Built-in, Series: Standard, Head Cover Type: Basic Integrated Clevis, Bore Size: 25mm, Stroke: 40mm, Cushion: Rubber Cushion, Rod Boot: None, Mounting Bracket: None, Accessory: None, Auto Switch Mounting Type: Band, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -, Piston Rod Variation: -

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Series CXSJ 11-/12- ø6, ø10 21-/22- Dual Rod Cylinder/Compact Type

mNil (Example) A93 3 mL A93L PLC: Programmable Logic Controller Refer to page 889 for the applicable auto switch list.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

Please consult with SMC regarding water resistant type with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked with are produced upon receipt of order.

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Nil (Example) A93 3m . L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches marked "" are produced upon receipt of order.

Slit Valve

Auto switch specifications Connector wiring diagram D-A93 Auto switch type C: Multiple connector (6P) Applicable load Relay, PLC Auto switch Lead wire color Terminal item no. 1 2 3 4 5 6 Blue Brown Brown Blue OPEN () OPEN (+) CLOSE (+) CLOSE () Load voltage 24 VDC 100 VAC 6 5 4 Load current range and maximum load current 5 to 40 mA 5 to 20 mA 3 2 1 Contact protection circuit None Internal

NCG/CG1

40 50 58 58 71 71 6 7 7 8 9 9 11 14 5.5 5.5 6.6 6.6 9 11 11 14 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 40 44 53 61 76 92 104 128 20 25 32 40 50 63 80 100 28 32 38 46 58 70 82 100 Note) ( ): Denotes the dimensions for long stroke.

1

32, 40 1001 to 2000 100 to 1000 CY3B 20, 25, 32, 40 2001 to 3000 100 to 1000 CY1B 50, 63 From 2001 200 to 2000 2001 to 4000 (25, 32) 2001 to 5000 (40) 2001 to 6000 (50, 63) REA 25, 32, 40, 50, 63 200 to 1000 (5), 10, 15, 20, 25, 30 35, 40, 45, 50, 75, 100 CQ2AH 125, 150, 175, 200, 250, 300 32, 40, 50, 63, 80, 100 6-17-31 27 Made to Order Common Specifications: Long Stroke Made to Order Common

Table of Contents

d1 = d3 for sizes 20 to 40. A parallel keyway is used on the long shaft for size 40. Minimum machining diameter for d1 is 0.1 mm.

Parallel Style Air Gripper Series MHZ

MHW -X MRHQ MA D399 Series MHZ2 Specifications 6 Fluid Air 6: 0.15 to 0.7 MPa 10: 0.2 to 0.7 MPa 16 to 40: 0.1 to 0.7 MPa 6: 0.3 to 0.7 MPa 10: 0.35 to 0.7 MPa 16 to 40: 0.25 to 0.7 MPa 10 to 60C 6 to 25: 0.01 mm 32, 40: 0.02 mm 6 to 25: 180 c.p.m. 32, 40: 60 c.p.m.