End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

+100(n2) 35+30(n2) 100 35 MY 3.8-5 Series CBM2 Accessories/Details are the same as that of standard style of series CM2.

3

Sensor Flow range 0.5 L/min 2 L/min 5 L/min 20 L/min 40 L/min 250 L/min 140 L/min 100 L/min 350 L/min 0.5 L/min 4 L/min PF3W704 PF3W504 0.35 L/min 5.5 L/min 5.5 L/min 0.35 L/min 2 L/min 16 L/min PF3W720 PF3W520 1.7 L/min 1.7 L/min 22 L/min 22 L/min 5 L/min 40 L/min PF3W740 PF3W540 3.5 L/min 3.5 L/min 55 L/min 55 L/min 10 L/min 100 L/min PF3W711 PF3W511 7 L/min 7 L/min 140 L/min 140 L/min

Thermo-con

Contents 1 100 to 240 VAC 2 100 to 240 VAC 3 PE 3 2. Communication connector (RS-232C or RS-485) D-sub 9 pin (socket) Holding screw: M2.6 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products Signal contents 3 2 Pin No. RS-232C RS-485 5 4 1 1 BUS+ Unused 2 BUS RD 3 Unused SD 4 Unused Unused 5 SG SG 6-9 Unused Unused 9 8 7 6 3.

MTS

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100

Electric Rotary Table

30, 50, 75 100, 125, 150 50, 75 50, 100 50, 100 150 16 3 25 9 25 5 Miniature Rotary Table Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Rod type Slide table type Series LEPS Basic type Series LER High precision type Series LEPY Series LERH CAT.ES100-94 CAT.ES100-92 Series LER Series LEPY Series LEPS Max. speed (/s) Rotating torque (Nm) Size Size Max. work load (kg) Stroke (mm) Size

Compact Cylinder

L x 100 L 100 100 (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CQUB32-5 CQUB40-5 M5 x 65 L M5 x 65 L 65 65 -10 -10 x 70 L x 70 L 70 70 -15 -15 x 75 L x 75 L 75 75 -20 -20 x 80 L x 80 L 80 80 -25 -25 x 85 L x 85 L 85 85 -30 -30 x 90 L x 90 L 90 90 10.5 10.5 -35 -35 x 95 L x 95 L 95 95 -40 -40 x 100 L x 100 L 100 100 -45 -45 x 105 L x 105 L 105 105

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

12 16 0.1 5 10 20 30 40 50 100 200 0.01 5 10 20 30 MXW Overhang L (mm) Overhang L (mm) Maximum Speed: Up to 400 (mm/s) Graph (5) Graph (2) Maximum Speed: Up to 300 (mm/s) MXJ 0.3 50 40 30 20 MXP 0.2 10 MXY 0.1 2 3 4 5 Mass W (kg) Mass W (kg) 40 32 MTS 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.01 0.1 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3)

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

Card Motor

) Optical linear encoder (incremental) Sensor 30 None 1.25 Provided 30 None 1.25 Provided 30 None 1.25 Provided Pushing operation 6 1 to 4.8 1 to 5 1 to 3.9 Positioning operation Positioning repeatability (m) Note 4)5) Accuracy (m) Note 4)5) 90 5 90 5 90 5 Measurement Maximum speed (mm/s)Note 6) 100 10 100 10 100 10 400 41 to 104F (5 to 40C) (No condensation) 35 to 85 (No condensation) 6.7

HRL

OFF 4 15 Users power supply usage example Contact output 1-5 common 5 1 Contact output 6: OFF 2 Power supply 24 VDC 24 COM 18 14 Contact output 6 common 3 4 24 COM +15 V 100 11 + Analog output 1: CH2 circulating fluid temperature 15 V 23 Analog output 1 common ANALOG COM 100 +15 V 10 + Analog output 2: CH2 electric conductivity 15 V 22 Analog output 2 common ANALOG COM 1 Make sure that

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

VZS

VVZS2000-22A-1 VVZS2000-22A-2 VFN G L M KZ D Cylinder side pressure (P2) Check valve Applicable valve model VZS2450-FZ VZS24504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 100 Ncm3/ min or less Solenoid one side 1(P) de-energized Leakage (Supply pressure: 0.5 MPa 100 Ncm3/ min or less Solenoid both sides de-energized 1(P) Piston SUP side pressure (P1) SUP side pressure P1 (MPa) 0 Operating

VQ7-6/7-8

(A) 4 (B) 2 FPG 1 (P) 5 (R1) 3 (R2) Coil rated (A) 4 (B) 2 1 2 3 4 9 100 VAC 200 VAC 24 VDC 12 VDC FIG 1 (P) 5 (R1) 3 (R2) Other voltages Option For other voltages, please contact SMC separately.

VQ7-6/7-8

(A) 4 (B) 2 FPG 1 (P) 5 (R1) 3 (R2) Coil rated (A) 4 (B) 2 1 2 3 4 9 100 VAC 200 VAC 24 VDC 12 VDC FIG 1 (P) 5 (R1) 3 (R2) Other voltages Option For other voltages, please contact SMC separately.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

5 !6 Component Parts Component Parts No.

Fieldbus system EtherNet/IP TM compatible SI Unit

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below.

0.4

N.C. 1 2 Note) 3 4 Note) 5 6 4-position dual 3-port valve (B) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 2-position double Metal Rubber 4 2 B Note) 1 5 3 N.O.

0.

Model VQZ100 V115 X110 5 Y VQZ100-GS-5 VQZ200 VQZ200-GS-5 Function VQZ300 VQZ300-GS-5 AC Symbol Specifications DC Note) Above part number consists of 10 units. Each unit has one gasket and two screws.

Electric Actuator / Low profile slider type

Step 1 Step No. 0 Posn 100 .00mm Speed 500mm/s Press the (4) Down key AX IS. Step No. 0 Posn 100 .00mm Speed 500mm/s Press the (1)Number key30 Press the (3)SET key Select Posn Complete Step 1 Step No. 0 Posn 30 .00mm Speed 500mm/s AX IS. 5. Teaching box detailed explanation Please refer to the teaching box manual.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

(mm) 5 10 15 20 25 5 10 15 30 20 25 30 0.2 MXPJ6 1.4 2.3 2.6 3.5 MXP6 50 100 200 300 500 700 6.3 1.7 MXP10 8.5 4.2 Average speed Va (mm/s) Collision speed V (mm/s) 13 9.8 17 4.5 MXP12 Note) Use the average speed when calculating static moment.