CC

G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 1/2 57 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 3/4 62 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 3/4 80 135 180.5 132.8 135 M6 x 1 10.5 to 12.5

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2-Color Display Digital Flow Switch RoHS *1 Applicable fluid Dry air, N2, Ar, CO2 *1 For the PF2M7-L A wide range of flow measurement is possible with 1 product. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) Foot (1) Flange (3) 50 CQ2X50-PS Double clevis 63 DCQ2X63-PS Gasket: 1 pc. 32 40 50 63 80 100 CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-D080 CQ-D100 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-F080 CQ-F100 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 80 CQ2X80-PS Grease pack (10 g): 1 pc. -X 100 CQ2X100-PS Pneumatic Circuit 2.

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) Foot (1) Flange (3) 50 CQ2X50-PS Double clevis 63 DCQ2X63-PS Gasket: 1 pc. 32 40 50 63 80 100 CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-D080 CQ-D100 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-F080 CQ-F100 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 80 CQ2X80-PS Grease pack (10 g): 1 pc. -X 100 CQ2X100-PS Pneumatic Circuit 2.

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

Short Stroke Electric Actuator Series LX

For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 50 50 2.1 1.1 0.3 0.1 2.1 1.1 0.3 0.1 Speed (mm/s) Speed (mm/s) 100 100 1.1 0.6 0.2 0.1 1.1 0.6 0.2 0.1 200 200 0.7 0.5 0.2 0.1 0.6 0.4 0.2 0.1 For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 50 2.1 1.1 0.3

0.5

mA Residual voltage: 1 V or less (Load current: 100 mA) Maximum applied voltage: 26.4 VDC Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Maximum applied voltage: 26.4 VDC Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Error signal Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Output

New

Stainless 1/8 3/32 2.4 steel 1/8 3.2 B Grommet 100 VAC With surge voltage suppressor C 110 VAC B C D E F 3/32 2.4 1/8 1/8 3.2 D 200 VAC 3/32 2.4 E 230 VAC 1/8 3.2 1/4 F 24 VDC C37 5/32 4 G DIN terminal 24 VDC G 7/32 5.6 With surge voltage suppressor J 1/8 3.2 H 100 VAC K L P Q R S T U 5/32 4 3/8 J 110 VAC Single 7/32 5.6 2 Size 2 Unit K 200 VAC 3/32 2.4 N.C. 1/8 L 230 VAC 1/8 3.2 3/32 2.4

VEX1

N Port size A Model B C D K N O Q R S T U E F G H I J L M P Port 2 (A),1 (P) Port 3 (R) VEX5510 VEX5511 160 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 x 1 x depth 9 116.5 50 25 10 7 25 173 80 60 98 Center , ,1 25 VEX5710 VEX5711 17 82 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 x 1 x depth 6 136.5 1 4 1 4 1,1 1 Bracket mounting dimensions Grommet

JXCx-OMX0009

mm 200 200 mm/s mm/s LE-CP-#-#-# 100 500 100 500 1 1 200 1000 200 1000 2 2 To MOT 50 200 50 200 3 3 or PC To PWR USB cable (A-miniB type) Part No.

20

KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 Nozzle size 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 1.5 2 1.5 2 1.5 2

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

CP95

auto switch CP95KD B 32 100 W S Z76 With auto switch Number of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

High Power Cylinder Series RHC

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

1 Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20Series MSQ now includes smaller sizes 1, 2, 3 and 7 11-9-1 2 Compact rotary table

e-Rodless Actuator

Speed [mm/s] 1 1 100 0.49 2 2 200 0.74 3 3 300 0.98 4 4 400 1.23 5 5 500 1.47 6 6 600 1.96 7 7 700 2.45 8 8 800 2.94 9 9 900 3.92 10 10 1000 4.90 Note) The factory default setting for the switch is No.1 (100 mm/s).

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 5 2 1 3 4 32.4 32.6 15 18 M12 SPEEDCON w 4 3 5 1 2 Plug connector pin assignment A-coded (Normal key) 4.2 M12 SPEEDCON M12 SPEEDCON 17 3 4 Socket connector pin assignment A-coded (Normal key) Wiring #7 PCA-1557798 Y connector (2 x M8-M12) Socket connector pin assignment 40.7 9.9 15.8 8.3 14.8 1 q 1 3 3 4 1 2 3 4 1 2 1 4 21.8 21.7 13 12 M8 4 3 w 1 3 3 4 Plug connector

LEH_C

1mm/s2 / 40~100%1% / 0% ()40~100%1% 1mm/s / 40~150%1% / 150% 0.01mm / /0.5 (+) +(0.01mm) (-) -(0.01mm) () JOG () ON/OFF No.