51

Bore size (mm) 20 25 32 40 50 63 80 100 2 foots, 8 mounting bolts Note) 2 Foot CG-L025 CG-L032 CG-L020 CG3-L040 CG-L050 CG-L063 CG-L080 CG-L100 1 flange, 4 mounting bolts 1 clevis, 4 mounting bolts, 1 clevis pin, 2 retaining rings 1 CG3-F020 CG3-F025 CG3-F040 Flange CG-F032 CG-F050 CG-F063 CG-F080 CG-F100 1 CG-D020 CG-D025 CG-D032 CG3-D040 CG-D050 CG-D063 CG-D080 CG-D100 Clevis Pivoting bracket

Compact Cylinder with Lock Series CLQ

CLQ-D025 CLQ-F025 CLQ-L025 A96V A96 A76H IC circuit 5V CLQ-D032 CLQ-F032 CLQ-L032 A72H A72 200V Yes Reed switch CLQ-D040 CLQ-F040 CLQ-L040 Grommet A73H A73 12V 100V CLQ-D050 CLQ-F050 CLQ-L050 A93V A93 Relay, PLC CLQ-D063 CLQ-F063 CLQ-L063 100V or less IC circuit 5V, 12V No A80 A90V A90 A80H 2 wire 24V CLQ-D080 CLQ-F080 CLQ-L080 12V Yes A73C Connector CLQ-D100 CLQ-F100 CLQ-L100 5V,

Air Cylinder

Mounting bracket Order qty Bore size (mm) Contents 20 25 32 40 50 63 80 100 Axial foot 2 Note) CG-L020 CG-L025 CG-L032 CG-L040 CG-L050 CG-L063 CG-L080 CG-L100 2 foots, 8 mounting bolts Flange 1 CG-F020 CG-F025 CG-F032 CG-F040 CG-F050 CG-F063 CG-F080 CG-F100 1 flange, 4 mounting bolts Trunnion pin 1 CG-T020 CG-T025 CG-T032 CG-T040 CG-T050 CG-T063 2 trunnion pins, 2 trunnion bolts, 2 flat

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

CLQ

147 181 241 317 377 495 589 841 935 1360 1510 2140 2360 118 157 189 245 302 402 528 628 825 982 1400 1560 2270 2510 3570 3930 165 220 264 344 422 563 739 880 1150 1370 1960 2180 3170 3520 5000 5500 IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT 20 25 32 40 50 63 80 100 CLQ-D020 CLQ-D025 CLQ-D032 CLQ-D040 CLQ-D050 CLQ-D063 CLQ-D080 CLQ-D100 CLQ-F020 CLQ-F025 CLQ-F032 CLQ-F040 CLQ-F050

Compact Cylinder

(mm) Unit: g Bore size (mm) 5 C55-C020 C55-L020 C55-F020 20 10 15 20 25 30 35 40 45 50 60 80 100 125 150 C55-C025 C55-L025 C55-F025 25 113 126 139 152 165 178 191 204 216 229 255 307 359 424 489 20 C55-L032 C55-F032 C55-C032 32 154 170 185 201 217 232 248 263 279 294 325 388 450 528 606 25 C55-F040 C55-C040 C55-L040 40 254 277 299 321 343 366 388 410 432 455 499 588 677 788 900 32 C55-F050

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

MXS Series Air Slide Table

10,20,30,40,50,75,100 10,20,30,40,50,75,100,125 10,20,30,40,50,75,100,125,150 10,20,30,40,50,75,100,125,150 Stroke adjuster/shock absorber option BS BT With shock absorber at extension end* With shock absorber at retraction end* *Shock absorber option is not available for MXS6 52 Air Slide Table MXS Series Construction/Parts list, Seal list 3 6 8 9 br bs bt bp 7 2 1 bl bk bq 4 bm bn bo 5 ck cp cm cn co cq

2–4

CAT.ES20-179 A Compact Cylinder/Guide Rod Type Lateral Load Resisting 24 times Compared to compact cylinder series CQ Non-rotating accuracy 0.2 or less Refer to page 3 for details. Guide Rod Load can be directly mounted. Load can be directly mounted. External Dimensions Slide bearing Compatible mounting dimensions with the series CQS, CQ2.

Compact Cylinder with Lock Series CLQ

1370 1960 2180 3170 3520 5000 5500 0.5 118 157 189 245 302 402 528 628 825 982 1400 1560 2270 2510 3570 3930 0.3 71 94 113 147 181 241 317 377 495 589 841 935 1360 1510 2140 2360 IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT 20 25 32 40 50 63 80 100 CLQ-L020 CLQ-F020 CLQ-D020 20 CLQ-L025 CLQ-F025 CLQ-D025 25 CLQ-L032 CLQ-F032 CLQ-D032 CLQ-L040 CLQ-F040 CLQ-D040 32 CLQ-L050 CLQ-F050

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

CLQ

CLQ-D025 CLQ-F025 CLQ-L025 A96V A96 A76H IC circuit 5V CLQ-D032 CLQ-F032 CLQ-L032 A72H A72 200V Yes Reed switch CLQ-D040 CLQ-F040 CLQ-L040 Grommet A73H A73 12V 100V CLQ-D050 CLQ-F050 CLQ-L050 A93V A93 Relay, PLC CLQ-D063 CLQ-F063 CLQ-L063 100V or less IC circuit 5V, 12V No A80 A90V A90 A80H 2 wire 24V CLQ-D080 CLQ-F080 CLQ-L080 12V Yes A73C Connector CLQ-D100 CLQ-F100 CLQ-L100 5V,

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

SMC

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Vacuum

cq 2,/7X1-s,2 (For gide mountirE) il[ilil Grovidd as standard) (PV po.t) Air supply pressure port Exterml v*uun pressure port Not6) l&Oirnensions:For mountjng &ackt B !

Vacuum

cq 2,/7X1-s,2 (For gide mountirE) ) il[ilil Grovidd as standard) ) (PV po.t) Air supply pressure port Exterml v*uun pressure port Not6) l&Oirnensions:For mountjng &ackt B !

PFxx-OMA1007

or P24 short circuit 0: No short circuit 1: Short circuited 1 Air Management Hub internal error 1 Port communication status 0: Device not connected 1: Operate or Pre-operate 2 VP short circuit VP short circuit detection 0: No short circuit 1: Short circuited 3 4 5 Reserved 6 7 Byte 27 and 28 Details Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Description PQ Dev-Err Dev-Com DSStatus CQ-Short

Fieldbus system EtherCAT compatible SI Unit

Device specific object Index Name Meaning 4000 40A0 Parameter Data Parameter setting data 5000 50A0 Diagnostic Data Diagnostic data F030 Configured Module Ident List EX600 unit ID information F050 Detected Module Ident List -91No.EX-OMA1023 Device specific object example Parameter Data and Diagnostic Data are shown with the following unit configuration as an example.

Free Mount Cylinder Series CU

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031