VKF300 Printed in Japan. 1st printing August, 1998 D-SMC.L.A. P-69.5 (JT)
MK(2) b) Type B mounting (When using the cylinder tube threads) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B E t E t C J G5-S Compatible Mounting Bolt Dimensions CV Model Type A mounting Type B mounting E (mm) D: Bolt length (mm) C (mm) Mounting bolt size Mounting bolt size MVGQ MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D 8 to 11 M3 x
MK(2) b) Type B mounting (When using the cylinder tube threads) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B E t E t C J G5-S Compatible Mounting Bolt Dimensions CV Model Type A mounting Type B mounting E (mm) D: Bolt length (mm) C (mm) Mounting bolt size Mounting bolt size MVGQ MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D 8 to 11 M3 x
Size Order no. 25 LE-D-6-2 14 32 LE-D-6-3 40 LE-D-6-4 -12- 3. Product Outline 3.1 System construction Refer to the Driver operation manual for system construction. 4.Elictric actuators / Common precautions 4.1 Wiring/Cables Warning 1. Adjustment, installation, inspection, or wiring changes should be conducted after the power supply to this product has been turned off.
ZS-46-B Panel mount adapter ZS-46-D Panel mount adapter + Front protection cover ZS-46-5L Power supply/output connection lead wire 5-core, 2 m ZS-27-01 Front protection cover B Panel mount adapter Connection Example ZS-46-B PFG300 Sensor connector D Panel mount adapter + Front protection cover PF3A7 H Power supply/output connection lead wire ZS-46-D Lead wire and M12 connector (Option for
size Lubrication Model Rubber Air M3 x 0.5 12-CY3B6 6 300 50, 100, 150, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250
Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.
Series Variations Applicable auto switch models Standard variations Lock system Standard stroke (mm) Bore size (mm) Solid state switch Reed switch Type Model Action Series Built-in auto switch magnet With rod boot Spring lock Grommet Grommet Mounting 3 wire 3 wire 2 wire D-F59 D-F59W D-J59W D-F5P D-F5PW D-F5BAL (2 color indicator) (2 color indicator) 2 wire 4 wire 3 wire D-J59 D-F59F D-F5NTL
Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE
(Length 300 mm) Without lead wires Without connector Misc.
D) In the state of C), adjust shim w so that the arm side block contacts the workpiece.
Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9
Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.
Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.
1 1 DO DlN terminal, without connector 1 4 11 4 70 G Grommet, 300mm lead wire 1 H 50 Grommet, 600mm lead wire 11 4 2 90 70 E Grommet terminal 2 T Conduit terminal 90 D DlN connector Body ported VEX3 12 0 01 5 D B Base mounted VEX3 22 0 01 5 D B B Bracket (Except VEX332) Option 0 Air operated Operation F Foot (Only VEX312, VEX332) 1 External pilot solenoid N Silencer for pilot exhaust (P2)