High Power Cylinder Series RHC

d D D C C H B H B B C D d H B C D d H Part no.

0.4

(D-sub connector) y u @0 i o !

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

5 Port Solenoid Valve

, D-sub connector, 25 pins, 16 outputs EX600-DYPE PNP output, D-sub connector, 25 pins, 16 outputs EX600-DYNF NPN output, Spring type terminal box, 32 pins, 16 outputs EX600-DYPF PNP output, Spring type terminal box, 32 pins, 16 outputs w Digital Output Unit EX600-DMNE NPN input/output, D-sub connector, 25 pins, 8 inputs/outputs EX600-DMPE PNP input/output, D-sub connector, 25 pins, 8 inputs

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Compact Cylinder

D-M9NV D-M9N D-M9B D-M9BV D-M9PV D-M9P Auto switch part no.

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

VZS

from D side as the 1st one.

Compact Cylinder with Solenoid Valve/

D-A90(V) OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT() Blue Weight (g) D-A93(V) Model D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V LED Brown OUT (+) Brown 41 Lead wire length (m) 0.5 6 6 6 6 8 8 Contact protection box CD-P11 CD-P12 Resistor 3 30 30 30 30 41 Reed switch Zener diode Dimensions (mm) OUT () Blue Blue D-A90/D-A93/D-A96 2 2.8 4.5 2.7 D-A96(V) DC (+) Brown 4 LED

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

D-G

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

MGC

/B64 D-B59W D-G5BAL D-G59F D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C Auto switch model D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C D-H7C D-G5NTL D-G5W D-K59W D-G5BAL D-G5 D-K59 D-G5NTL D-H7W D-H7BAL D-H7 D-H7C/H7NF D-C7/C80 D-C73C D-C80C D-C73C D-C80C D-B5/B64 D-G59F D-B59W Applicable bore (mm) Hs Hs Hs A A A A A B B B B B B 16 (24) A 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5)

Heavy Duty Stopper Cylinder Series RSH/RS1H

, D-Z76, D-Z80 Auto Switch Specifications Grommet D-Z7 (with indicator light) D-Z73 D-Z76 Auto switch part no.

MGC

MXQ MXF MXW MXP MG MGP MGQ MGG MGC MGF CY1 MY1 3.20-13 Series MGC Auto Switch Proper Mounting Position (Stroke End) D-C7, C8 D-H7 D-B5, B6 D-G5, K5 D-B7, B8 D-G7, K7 Auto Switch Mounting Position Auto Switch Mounting Height (mm) (mm) D-G5, K5 D-G5lW D-K59W D-B5, B6 D-B59W D-G5BAL D-G59F D-B7, B8 D-B73C D-B80C D-G7, K7 D-K79C D-H7C D-G5NTL D-C7, C8 D-H7 D-H7lW D-H7lF D-H7BAL Auto switch D-B7

Air Slide Table Series MXP

Reed Auto Switch D-A90(V), D-A93(V), D-A96(V) Reed Auto Switch D-A90(V), D-A93(V), D-A96(V) (mm) Tightening Torque Stroke (mm) 20 45 25 45 25 51 31 Stroke (mm) 10 34.5 35.5 14.5 15.5 Model Model Tightening Torque of Auto Switch Mounting Screw (Nm) 25 50.5 30.5 30 59 39 10 35 15 35 15 15 40.5 20.5 A B A B A B A B A B C D Auto switch model Tightening torque MXP8 D-A9(V) D-M9(V) D-M9W(