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as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 97 Thermo-chiller Standard Type HRS100/150 Series

U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. 417 XLA/XLAV Series Specifications Model XLA(V)-16 XLA(V)-25 XLA(V)-40 XLA(V)-50 XLA(V)-63 XLA(V)-100 XLA(V)-160 XLA(V)-80 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLA 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLAV 5 to 50 1 x 10-6 to atmospheric pressure Operating

K39 Solid state auto switch 5 V, 12 V 3-wire (NPN) 5 V, 12 V M9NW V V V v v IC circuit 3-wire (PNP) M9PW V V V v v 2-wire 12 V M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 3-wire (NPN) 5 V, 12 V M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PA*1 v v V v v 2-wire 12 V M9BA*1 v v V v v 24 V Water resistant (2-color indicator) Grommet With diagnostic output (

K39 Solid state auto switch 5 V, 12 V 3-wire (NPN) 5 V, 12 V M9NW V V V v v IC circuit 3-wire (PNP) M9PW V V V v v 2-wire 12 V M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 3-wire (NPN) 5 V, 12 V M9NA1 v v V v v IC circuit 3-wire (PNP) M9PA1 v v V v v 2-wire 12 V M9BA1 v v V v v 24 V Water-resistant (2-color indicator) Grommet With diagnostic output (2-color

(output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 24 V (control and input) X3 24 V (control and input) X2 24 V (control and input) X1 24 V (control and input) X0 0 V (control and input) X2 0 V (control

, 12 V 12 V IC circuit Terminal conduit M9NW 3-wire (NPN) Relay PLC Yes G59W 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit M9PW 3-wire (PNP) G5PW 24 V M9BW 2-wire 12 V K59W Grommet M9NA1 M9PA1 M9BA1 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Water resistant (2-color indicator) 12 V 2-wire G5BA G59F F59F 4-wire (NPN) 5 V, 12 V IC circuit IC circuit Diagnostic output (2

0 0.01 V = up to 100mm/s V = up to 300mm/s 20 40 60 80 100 0.05 Overhang L (mm) Weight m (kg) Graph V = over 400mm/s; up to 10mm 11 2 CXSM CXSL 1 CXSL6 CXSM6 0.5 0 0.01 20 40 60 80 100 32 Weight m (kg) Overhang L (mm) 25 Graph up to 50mm 9 0.1 20 0.05 V = up to 100mm/s V = up to 300mm/s 0.05 0.04 15 0.03 10 Weight m (kg) 0 0.01 20 40 60 80 100 Overhang L (mm) 0.02 Graph V = up to 400mm/s

Control circuit power supply (24 V) L11 Control circuit power supply (0 V) L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) Servo motor power (W) Connect to motor cable (U, V , W) U V W V W 60 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAm-m 2 m or less Note 5) PLC FX3U-mmMT/ES (Manufactured by

12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161 Sine Rodless Cylinder/Direct Mount Type Series REAR 10, 15 Replacement Procedure is P.316 Construction @2 @3 @6 @7 !

Most sensitive position 12-13-9 10 Reed Switch Direct Mounting Style D-A90(V)/D-A93(V)/D-A96(V) For details about certified products conforming to international standards, visit us at www.smcworld.com.

V V V V V V c P Note 1) pressure unit 32 79 58 37 13 Both MPa and psi + Nil Mounting Right V V V V V V d m in the model numbers indicates a thread type.

(50 Hz) 200, 220 V (60 Hz) 220 V (50 Hz) 220 to 240 V (60 Hz) IDF-TR4000-5 275 259 240 14 kg IDF55E-30 IDF75E-30 IDU55E-30 IDU75E-30 380, 400, 415 V (50 Hz) 380 to 400, 400 to 415, 415 to 440 V (60 Hz) Threephase Singleturn 200 V (50 Hz) 200, 220 V (60 Hz) IDF-TR4000-6 355 299 320 35 kg 30 4 kVA 440, 460 V (50 Hz) 440 to 460, 460 to 500 V (60 Hz) A 4 x 11 220 200 V (50 Hz) 200, 220 V (60

5 V, 12 V M9NW V V V v v IC circuit 3-wire (PNP) M9PW V V V v v 2-wire 12 V M9BW V V V v v Relay, PLC 24 V Yes 3-wire (NPN) 5 V, 12 V M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PA*1 v v V v v 2-wire 12 V M9BA*1 v v V v v Water-resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 V V IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 V V V V Relay, PLC

Most sensitive position 12-13-9 10 Reed Switch Direct Mounting Style D-A90(V)/D-A93(V)/D-A96(V) For details about certified products conforming to international standards, visit us at www.smcworld.com.

Upper and lower setting limit of user setting Analogue output Settable range during measurement range communication error or idling (Range) (Lwr_Lmt) (Upr_Lmt) (Fault_MA) (Idle_MA) 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0.00 to +10.50 V 0..5 V 0.00 to + 5.22 V +0.03 to +5.25 V 0.00 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V +0.75 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to

Individual spacer ZR1-R1-2 V PV X X Vacuum port Rc 1/8 V port PD + + + + + + X X V X PV 70.5 SMC 16.5 X PD 12 V V (Pitch) 33 35.5 (Pitch) 33 35.5 EXH PD PV PS 13-3-31 31 Vacuum pad connection V port Series ZR Vacuum pad connection V port Ejector System Manifold Nozzle Dia./1.8, 2.0 mm Common exhaust EXH port Common ejector air supply PV port Common pilot valve air supply PS port Common vacuum

) 2 0 V() 3 24 V() 4 0 V() 5 FE (2)EX600-ED3PWR IN7/8 5 1 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() (3)EX600-ED4PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 24 V() 2 24 V() 3 0 V() 3 0 V() 4 0 V() 4 0 V() 5 (4)EX600-ED5PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 0 V() 2 0 V() 3 24 V() 3 24 V() 4 0 V() 4 0 V() 5 -29No.EX-OMN0027CN-D 2 SI IP67 -30No.EX-OMN0027CN-D

12 V Solid state switch Reed switch 12 V IC circuit Diagnostic indication (2-color indication) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit Water resistant (2-color indication) 5 V, 12 V 12 V 3-wire (NPN equivalent) A96 A96V IC circuit 5 V Yes 24 V Grommet A93 A90 A93V A90V 100 V Relay, PLC 2-wire 12 V No 100 V or less IC circuit DSolid state auto switches marked with are

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 2-wire 12 V M9BWV M9BW V V V v v 3-wire (NPN) 5 V, 12 V M9NAV2 M9NA2 v v V v v IC circuit 3-wire (PNP) M9PAV2 M9PA2 v v V v v Water resistant (2-color indicator) 2-wire 12 V M9BAV2 M9BA2 v v V v v 1 Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example