2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

600 1000 2000 3000 6000 12000 PF2M7(-L) 0.001 L/min 0.01 1 0.02 2 0.01 L/min 0.05 5 Dry air N2 Ar CO2 0.1 10 Thermal type (MEMS) 0.3 25 0.1 L/min 0.5 50 1 100 1 L/min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC(-L) Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Terminal q DC (+) w N.C e DC () r IN (1 to 5 V) e w q Power supply/Output connection cable (Accessory) Power supply/Output connector (8P) Pin no. 7 Green 8 Yellow 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown i u y t r e w q Pin no.

Table of Contents

r t y No. q w e r t y u i o !

Large Size Vacuum Module: Series ZR

(ZSE2) specifications (E) S is not available for AC.

JXCx-OMY0008

J X C E H Electric equipment Actuator Model Controller Stroke example: Controller type For LEFS25FB-100B-S1CE17, E EtherCAT specify LEFS25FB-100.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

WL E MB LL Width across flats Effective thread DL MA lC 2 X 4-J F K A N NB lB H S + Stroke ZZ + Stroke Locking at rod end: MBBB Rl Bore size Stroke Locking at both ends: MBBB Wl Bore size Stroke Hl/Rl (mm) Width across flats Bore size (mm) Effective thread length Stroke range (mm) MM MB MA LL K J HN HR H GB G F E DL D lC lB A 32 40 50 63 80 100 up to 500 up to 500 up to 600 up to 600 up to

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

Electric Actuators

3 e u !

HRX-OM-Q026

*1: To use the power of the device, the total load current must be 500 mA or less.

JXCx-OMT0061CN

<> <> ON(SVON ON) 1-193 E <>ON SVON ON <> 1-194 E <> <> 1-195 E <> <> 1-196 E <> 75 - <>EEPROM 1-197 E <> EEPROM 10 <>CPU CPU CPU 1-198 CPU E <> <>CC-Link WDT CC-Link (01-206) CC-Link WDT E <> *1 (RWr)code"01-***""*** 10.1.2 (RWr RWw)(P.38) 76 - 17.

VQC

Refer to e.

smcmaintenancepartslist

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Part No.

•

/>B ' C . 0 E . F.

Clamp Cylinder with Lock

7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !

15

, 500 750 15 Helical insert thread 1000 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Non-lubricated exterior (without dust seal) 25 1500 Outside of cylinder tube with hard chrome plated 32 Non-lubricated exterior (with dust seal) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 1500 40 Switch rails on both sides (with 2 pcs.)

HRX-OM-M090

Plug (Prepared by customer) L N E [Accessory] Power supply connector N E Earth leakage breaker (Secondary side) L N Cable Crimped terminal (Prepared by customer) E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-M090 Chapter 3 Transport and Setting Up Wiring 1.

PSE540/560

ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.

Series CE1

or 3000 K 7 H G D M E J F L X C B + Stroke Z M E A + Stroke T 2-P Q I (Port size) Metal connector Made by TAJIMI R04-J8M7.3 15.5 M14 X 1 38 (mm) A B C D E F G H I J K Bore size (mm) Standard stroke 50, 75, 100, 125, 150, 175, 200, 250, 300 100, 125, 150, 175, 200, 250, 300, 400, 500 32 131 90 27 16 45 49.5 64 M14 X 1.5 14 4.5 14 40 177 136 27 16 52 57 71.5 M14 X 1.5 24 5 14 50 63 200, 300

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

ALM E Power I sens off An overflow of the position error counter inside of the controller is occurred. Position deviation counter overflow (01-196) overflow E Power Err Make sure there are no obstructions that interfere with the electric actuator movement.

MXW

100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.