1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification With barb fitting B With drain guide B Metal bowl B 107 160 214 251 255 Metal bowl with level gauge Model B AW10 AW20 AW30 AW40 AW40-06 234 272 275 209 247 250 208 246 249 60 Filter Regulator AW20 to 40 Made to Order Specifications Contact P/A for detailed dimensions, specifications, and lead times. q Special Temperature Environment w
S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.
1 2 L A A-1 1 B B-2 6 B A-2 5 COM-A/COM B-3 3 COM-B/ A-3 4 3 Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) 2 (2) 1 8 1 B1 A1 (14) 17.7 5 6 (3) 1 2 (18) A6 B6 15 16 (11) 30.7 L 15.2 [820m] 1 2 LE CP 2 A B-1 L 1 A A-1 6 B B-2 8 8m * 5 B A-2 3 COM-A/COM B-3 A 10m * 4 COM-B/ A-3 B 15m * 3 Shield C 20m * 12 Vcc B-4 13 GND A-4 * 7 A B-5 6 A A-
(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material PBT ADC Material Note No. q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !
level gauge B B B B B B B Dimensions B Barb fitting Applicable tubing: T0604 Model Standard specifications Optional specifications Bracket mount P M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 A 25 40 53 70 75 90 95 B 77 115 142 176 176 250 268 C 26 36 38 40 38 41 45 D 12.5 20 26.5 35 35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50
B side traveling parallelism to A side Refer to Graph (1).
Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 10-10-4 5 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39
D1 Port B min. port size Weight (g) a b H (Hex.)
Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 3 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39 1.52
Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)
rib O Deep type B Bellows type List o Pad dia.
rib O Deep type B Bellows type List o Pad dia.
R L B 01 1 Nil F G Rc 1 8 ... ...
6 6.5 10.5 13.5 16.5 19.5 B 12.5 15.5 18.5 21.5 A 29 29.5 33 24 28.5 29 B 6.5 7 11 14 17 20 A 26 26.5 30 21 25.5 26 B 3.5 4 8 11 14 17 A 19.5 24 24.5 B 9.5 12.5 15.5 A 31.5 22.5 27 27.5 B 9.5 12.5 15.5 18.5 A 35.5 26.5 31 31.5 B 13.5 16.5 19.5 22.5 MK220 MK225 MK232 MK240 MK250 MK263 Auto Switch Mounting Bracket Part No.
B Z + Stroke DB DX DD 90 B 4DT A DS DH 4DR DB DU DO DO DC DE DU DL Rotation (mm) No.
3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6-10 13-/22-MXQ6-20
MGC MGF CY1 q B MY1 Normally ON w * Adjust the switch position according to load and speed.
l 1 d e.l .o.ta.l $lh No:e 2) SpecfeC avcll:ln.ica1e w ing specrcar ons of a 'nrnilo d specili.a.l on sfee:. iN.te th..ld.L.le afd 3 pos I on r'avescaf.ol b. lsed lvhere s ng e soerc. d ri.g has been specihed I A, B port size (metric) A. B port size (inch) : . case oiniixed spe.ili.alon (rv]) ndcalcs.pararoyonamanlold ' :i:.1.: -:-i. -l' .1i -'l.; Manifold EX250 Serial Wiring .
D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 14 Series ZPT/ZPX How to Distinguish