CQ2

A B A B A B A B A B A B U U U U U U U U U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 9 10 (4.5) 12 19.5 20.5 26.5 23 26 22 7.5 (5.5) 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 12 (10) 9.5 16 22.5 23.5 29.5 26 29 25 (11.5) 20 25 32 40 50 24.5 25.5 31.5 28 31 27 4 7.5 8 7 11 12 6.5 5 27.5 28.5 34.5 31 34 30 11.5 4.5 7.5 8 7.5 12 7 5 31.5 32.5 38.5 35 38 34 27 29 26.5 8 13.5 12 11 10.5 3.5 9 9.5 6.5 8 9 6

1

Reference) R D Bore size (mm) 11 41 11 36 8 8 C76 6 1 13 13 46 13 38 10 10 10 2.5 21 15 54 15 46 12 12 Connecting port side C85 15 3 27 21 64 21 56 14 14 20 3 32 25 78 25 80 25 25 Dimensional Range Not Possible to Machine Additionally C95 25 4 39 25 86 25 90 25 25 32 A B Model MGF40 MGF63 MGF100 5 50 30 110 30 100 30 30 CP95 40 90 120 6 59 30 124 30 110 30 30 50 120 160 6 75 34 156 34 140

5

A B A B A B A B A B A B Hs Hs Hs Hs 20 33 32 29 28 28.5 27.5 29.5 28.5 25 24 23.5 22.5 26.5 23.5 20 25.5 24.5 27 27.5 25 32.5 32.5 28.5 28.5 28 28 29 29 24.5 24.5 23 23 26 26 25 28 27 29.5 30 32 34 33 30 29 29.5 28.5 30.5 29.5 26 25 24.5 23.5 27.5 26.5 32 31.5 30.5 33 33.5 40 36 35 37.5 38 40 39 36 35 32 34.5 31.5 35.5 32.5 31 28 29.5 26.5 32.5 29.5 50 41.5 40.5 43 43.5 50 46 44 42 40 41.5

Table of Contents

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Applicable bore size (mm) 12 16 20 25 32, 40 50, 63 80 100 Dd9 d H B C Part no.

Air Cylinder Series CM2

Applicable bore size Z + Stroke CX CD A + B + 90 A Bore size (mm) 20 25, 32 40 B 20 25 32 40 133 137 139 177 CM2C (Single clevis style) 25 21 26 85 81 86 200 192 202 10 9 44 60 CM-B032 15 10 49 65 CM-B040 Note) Pivot brackets do not come with pivot bracket pins and retaining rings.

Fluoropolymer Piping Equipment

21 52.5 50.5 48.5 45.5 29 25 7.5 LQ3E41-R2 8 6.4 LQ3E51-R1 19 12 7 14 26.5 24 24 22 32 24 64 61.5 58.5 56.5 37 29 9.5 LQ3E51-R2 10 22.5 19.5 21 61.5 53.5 50.5 25 7.5 LQ3E61-R1 25 19 8 18 30 26 26.5 24 41 32 78 74 70 67.5 49 37 16 LQ3E61-R2 12 24 22 24 74 64.5 62.5 29 9.5 M1 H1 1/4 (E1, E1) A side L1, L1 B B side Inch Size M2 C Model A side B side B C E1 E1 E2 E2 H1 H2 L1 L1 L2 L2 M1 M2 Min

4/5 Port Solenoid Valve

Type S31 Manifold: Side Ported 91.7 [96.1] Approx. 300 (Lead wire length) SS5YJ3-S31Stations -M3 L1 L2 3.5 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 52.2 [54.4] 51.4 [53.6] 17.3 30 3 91.7 [96.1] 78.8 [83.2] 78.8 [83.2] 13.5 A A A A A B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4 [53.6] 52.2 [54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting)

Vacuum Pad

ZPT40 25-(B/N/T)01-A18 ZPT40 50-(B/N/T)01-A18 ZPT40 75-(B/N/T)01-A18 ZPT50 25-(B/N/T)01-A18 ZPT50 50-(B/N/T)01-A18 ZPT50 75-(B/N/T)01-A18 ZPT63 25-(B/N/T)01-A18 ZPT63 50-(B/N/T)01-A18 ZPT63 75-(B/N/T)01-A18 ZPT80 25-(B/N/T)01-A18 ZPT80 50-(B/N/T)01-A18 ZPT80 75-(B/N/T)01-A18 ZPT100 25-(B/N/T)01-A22 ZPT100 50-(B/N/T)01-A22 ZPT100 75-(B/N/T)01-A22 ZPT100 100-(B/N/T)01-A22 ZPT125 25-(B/N/T)01

Vacuum Pad

ZPT40 25-(B/N/T)01-A18 ZPT40 50-(B/N/T)01-A18 ZPT40 75-(B/N/T)01-A18 ZPT50 25-(B/N/T)01-A18 ZPT50 50-(B/N/T)01-A18 ZPT50 75-(B/N/T)01-A18 ZPT63 25-(B/N/T)01-A18 ZPT63 50-(B/N/T)01-A18 ZPT63 75-(B/N/T)01-A18 ZPT80 25-(B/N/T)01-A18 ZPT80 50-(B/N/T)01-A18 ZPT80 75-(B/N/T)01-A18 ZPT100 25-(B/N/T)01-A22 ZPT100 50-(B/N/T)01-A22 ZPT100 75-(B/N/T)01-A22 ZPT100 100-(B/N/T)01-A22 ZPT125 25-(B/N/T)01

Vacuum Pad

ZPT40 25-(B/N/T)01-A18 ZPT40 50-(B/N/T)01-A18 ZPT40 75-(B/N/T)01-A18 ZPT50 25-(B/N/T)01-A18 ZPT50 50-(B/N/T)01-A18 ZPT50 75-(B/N/T)01-A18 ZPT63 25-(B/N/T)01-A18 ZPT63 50-(B/N/T)01-A18 ZPT63 75-(B/N/T)01-A18 ZPT80 25-(B/N/T)01-A18 ZPT80 50-(B/N/T)01-A18 ZPT80 75-(B/N/T)01-A18 ZPT100 25-(B/N/T)01-A22 ZPT100 50-(B/N/T)01-A22 ZPT100 75-(B/N/T)01-A22 ZPT100 100-(B/N/T)01-A22 ZPT125 25-(B/N/T)01

Vacuum Pad

ZPT40 25-(B/N/T)01-A18 ZPT40 50-(B/N/T)01-A18 ZPT40 75-(B/N/T)01-A18 ZPT50 25-(B/N/T)01-A18 ZPT50 50-(B/N/T)01-A18 ZPT50 75-(B/N/T)01-A18 ZPT63 25-(B/N/T)01-A18 ZPT63 50-(B/N/T)01-A18 ZPT63 75-(B/N/T)01-A18 ZPT80 25-(B/N/T)01-A18 ZPT80 50-(B/N/T)01-A18 ZPT80 75-(B/N/T)01-A18 ZPT100 25-(B/N/T)01-A22 ZPT100 50-(B/N/T)01-A22 ZPT100 75-(B/N/T)01-A22 ZPT100 100-(B/N/T)01-A22 ZPT125 25-(B/N/T)01

Table of Contents

9.5 MHS A C 32 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port MHC MHT 25 25 MHY 3-3 depth 6 +0.02 0 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port (A, B, C common view) MHW 6-M3 x 0.5 thread depth 6 (A, B, C common view) MRHQ Misc.

0.4

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of double sided type)) [Communication connector D-sub] (DIN rail clamping screw) R R R BUS OUT BUS 76.7 76.5 12 3 12 3 3 72 BUS IN X 49.5 B B B B B B B B P X P X P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.

ZP

Form w 1 Material e Vacuum inlet B2 10 25 2.5 Construction p. 117 13 27.5 16 29 20 32.5 4 25 33 32 38 10 Adapter Assembly p. 121 B5 M5 x 0.8 5 8 25 2.5 13 27.5 16 29 20 32.5 4 25 33 32 38 40 47.5 4.9 12 50 51.5 20 M6 x 1 6 8 B6 N S U F GN GS ZP T B 38.5 3.5 M8 x 1.25 8 12 25 39 32 44 40 47.5 6.6 50 51.5 10 B8 31 2.5 13 33.5 16 35 20 38.5 3.5 25 39 32 44 40 47.5 7 50 51.5 Rc1/8 NPT1/8 NPTF1

Electric Actuator

7 r t w q y @6 When selecting the grease holding function LEYG Mll -llF: 50st or less 25 32 A B C LEYG M: 50st or less 16 25 32 LEYGlM #3 #4 #5 #6 #1 #8 #7 #2 LEYG Mll -llF: Over 50st 25 32 A B C LEYG M: Over 50st 16 25 32 Note) Felt material is inserted to hold grease at the sliding part of the slide bearing.

Electric Actuator/Slider Type

, 32, 63 Size Construction Motor top mounting type: LEY 25 32 63 @4 @5 A-A B-B A B !

ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

AC Servo Motor Driver (Pulse input type/Positioning type ）

B-phase 0 A-phase A-phase B-phase B-phase 1 _ _ x _ Encoder output pulse setting selection 0h Refer to app. 15 for details.

Table of Contents

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.