EX500

R C US US C R R R R R R R US C US C US C US C US C US C TYPE1 SERIAL NO.

Air Cylinder NCA1 Series

2 WIRE D-A64 100VAC 25MA (10~28VDC) 200VAC 12.5MA D-F5BAL 24VDC 5~40MA 2 WIRE (NPN) D-A67 24VDC 30MA (10~28VDC) D-F59F 28VDC 40MA 4 WIRE (NPN) D-F5NTL 28VDC 80MA 3 WIRE (NPN) NCA1 XA 27 M Mounting Auto Switch Suffix Stroke Bore THREAD FORM CODE S P E C I A L R O D T H R E A D X A O P T I O N Thread Form Code M .

Electric Actuator Triple Axis P&P Unit

(Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5 4-6.5 20 20 12.5 C 31 63.5 13.5 E-100 4H10depth5 5 (26) (44) 110 100 Stroke69 (Stroke+131) 10 92 85 (For 100 to 150 strokes) 208 (For 200 to 1000 strokes) C section detail

ZP

D J K Y A J K B Y C D Misc.

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Shaft Pattern Sequencing I Applicable shaft type: S, W, Y How to Order F59 B C P D C S 50 90 X RA1 A2 A24 C10 -X6 Built-in magnet Auto switch Nil D None Built-in magnet Refer to page 11-7-13 for the part no. of auto switches.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Shaft Pattern Sequencing I Applicable shaft type: S, W, Y How to Order F59 B C P D C S 50 90 X RA1 A2 A24 C10 -X6 Built-in magnet Auto switch Nil D None Built-in magnet Refer to page 11-7-13 for the part no. of auto switches.

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

20

Outside diameter Nozzle size L2 Note1) D L1 H1 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 1.5 2 1.5 2 1.5 2 1.5 2

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

from the D side.

Compact Guide Cylinder

D-G

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Inch Threads Bore size (mm) Bore size (mm) 12 16 20 25 Dd9 (inch) l d d H B C Part No.

•

Flal with rib (mm) (mm) Model M ,8 C D E F G H I Flat Flat with rib " . y Y Model 8 D E F H I C G >'A ,. " Flat F)at '!jilh ~ .

Manifold Specifications

connector D-SUB { } JIS-X-5101 MIL-C-24308 (Rail mounting hole pitch 12.5) (mm) D side connector (Station n)(Station 1) 3 148 137.5 116 16 4 160.5 150 135 13 5 185.5 175 154 16 6 198 187.5 173 12.5 7 223 212.5 192 15.5 8 235.5 225 211 12.5 9 260.5 250 230 15.5 10 273 262.5 249 12 2 123 112.5 97 13 Stations L1 L2 L3 L4 C6C C8C VV5Z5-45FU DStation B(2 to 10 stations) Separation lever (Push

1.63

D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V 20 to 63 B A Hs 32 to 63 D-P3DWA B A Hs Auto Switch Proper Mounting Position Auto Switch Mounting Height (mm) (mm) D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model Auto switch model D-A9V D-P3DWA D-M9V D-M9WV D-M9AV D-A9 D-A9V D-P3DWA Bore size (mm) Bore size (mm) B 11 12.5 13 15 16 20 A 11 10.5 12 14 13.5 16.5 B 7 8.5 9 11 12 16 A 6 7.5

Table of Contents

conforming to MIL-C-24308.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

53

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C Cooling capacity = Considering a safety

HRX-OM-S010

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.