5 Port Solenoid Valve Series SV1000/2000/3000/4000

Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% 30% AS3201F -02-12 SV 400 SYJ 200 70% 50% 10% SZ 0 MB 80 800 VP4 600 S0700 AS5000-02 AS420-02 400 VQ 200 VQ4 0 SV400 AN300 -KM12 T1209 VQ5 800 MB 100 VQC 600 AS5000-02 AS420-02 400 VQZ 200 SQ 0 VFS CS1 125 800 VFR 600 VQ7 AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Dual Rod Cylinder Series CXSJ/CXS

A C Auto Switch Proper Mounting Position D-M9, D-M9W D-M9AVL D-A93 D-A90, D-A96 D-M9V, D-M9WV Bore size (mm) A B C D A B C D A B C D A B C D CXSJ15 to 32 B D 6 10 15 20 25 32 15.5 13.5 5.5 15.5 11 8 19.5 0.5 9.5 9.5 19.5 0.5 11.5 7.5 25.5 23.5 3 25.5 21 5.5 29.5 3 19.5 7 29.5 3 21.5 5 31.5 6 29.5 4 31.5 6 27 1.5 35.5 10 25.5 0 35.5 10 27.5 2 39 9 37 7 39 9 34.5 4.5 43 13 33 3 43 13 35

C95

, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

CV/MVGQ

C J G5-S Standard Stroke CV Bore size (mm) Standard stroke (mm) Symbol Specifications 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500 -XA Change of rod end shape MVGQ 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80, 100 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 Piston rod and rod end nut

155

KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 17 17 17 17 17 17 17 17 29.5 27.7 41.3 31.2 40.1 38.4 45.6 43.9 17 17 19 19 24 24 27 27 14 14 17 17 22 22 26 26 D H2 H1 L2 L1 Nozzle with Male Thread / KN (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 Connection thread KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Flow Rate Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 12 (PA) 23 (AR) Valve model Flow rate characteristics Weight (g) Note) Actuation type Port size Effective area (mm2) L/M plug connector M8 connector Grommet 10-SYJ312M 10-SYJ322M 10-SYJ314M Body ported N.C. 0.41 0.36 0.18 0.31 0.086 0.089 0.35 0.36 0.33 0.31 0.086 0.089 32 M3 x 0.5 33 0.9 37 N.O.

Refrigerated Air Dryers

[C] Correction factor 2 to 25 1.14 30 1.04 32 1 35 0.96 40 0.9 Ambient temp. [C] Correction factor 2 to 25 1.06 30 1.02 32 1 35 0.99 40 0.98 45 0.92 Ambient temp. [C] Correction factor 2 to 25 1.10 30 1.05 32 1 35 0.95 40 0.90 Ambient temp. [C] Correction factor 2 to 25 1.2 30 1.04 32 1 35 0.93 40 0.84 Ambient temp.

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

VQ4000

SQ Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ0 Passage/Stations Station 1 Station 5 Station 10 Station 15 Model VQ4 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv

C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

Thermo-dryer

[Space required for maintenance] Front: 600 mm Back: 600 mm Top: 600 mm Right side: 600 mm Left side: 600 mm Caution 1. Provide ventilation space. Unless a necessary ventilation space for each piece of equipment is provided, this product could cool poorly or stall.

Cylinder with Lock Series MNB

C ??

0.55

Applicable cable Cable O.D.: 4.5 to 7 (Reference) 0.5 mm2 to 1.5 mm2, 2-core or 3-core, equivalent to JIS C 3306 Applicable crimped terminal O terminal: R1.25-4M that is specified in JIS C 2805 Y terminal: 1.25-3L, which is released by JST Mfg. Co., Ltd.

SMC Electronic Switch Series Variations

10.2 8 10 17.6 10 5.5 2-3.3 Mounting hole 3.10-4 ZSE2/ISE2 Dimensions/Standard: ZSE201 T1 01 T1 01 T1 Grommet style/ZSE2-15 Connector style/ZSE2-15C Pressure setting Pressure setting Indicator light Indicator light trimmer trimmer 15 Lead wire length 600 15 (3000) H H L L 20 20 Lead wire length 600 Lead wire length 600 Lead wire length 600 (3000) 9.5 39 8.5 39 8.5 3.5 3.5 3.5 Mounting hole

AC Servo Motor Driver (Network card type ）

750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 7 7.

15

1 y, z + A = 200 y, z + A = 300 1 y, z + A = 200 0.1 y, z + A = 300 0.01 0.1 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the

HEC_001W-E

Therefore, if the target temp. is 23.0 C and 1.5 C is set in this item, the warning [WRN] arises when temp. lowers 21.5 C. H i g h T e m p . C u t o f f M O D E < 7 0 . 0 C 8. High Temp. Cutoff Setting range : 11.0 to 70.0 C Min. increment : 0.1 C Indicated content : High temp. cutoff by internal temp. sensor (Ex. : 70.0 C).

New

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to be described by L (liter). 1 dm3 = 1 L 31 Series VXZ C : Sonic conductance [dm3/(sbar)] b : Critical pressure

Compact Electric Actuator Series LG1

100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-F LG1H202300-F LG1H202400-F LG1H202500-F LG1H202600-F LG1H202700-F LG1H202800-F LG1H202900-F LG1H202-1000-F LG1H202-1200-F 100 200 300 400 500 600 700 800 900 1000 1200 245.7 345.7 445.7 545.7 645.7 745.7 845.7 945.7 1045.7 1145.7 1345.7 400 500 600 700 800 900 1000 1100