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Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154 20 44.5 84 36 25 163 50 100 70 9 37 3 x 3/4 1/4 96 43 60 163 24 60.5 100 49 34 175

Low Profile Slide Table Series MXF

H G 5H9 depth 5 +0.030 0 33.5 6 5H9 +0.030 0 depth 5 (mm) N G H NN J M Z ZZ Model MXF20-30 4 29 30 4 57 91 91 104 MXF20-50 4 36 45 4 77 113 113 126 MXF20-75 6 40 45 6 125 162 162 175 MXF20-100 6 59 60 6 175 211 211 224 144 Low Profile Slide Table Series MXF Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V (mm) B E

Air Slide Table Series MXS

11 12 12 6.6 B A 16 34 16 34 G H Section AA Section BB (NN 1) x H (mm) Model F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 GA 22 22 22 22 55 61 102 154 190 HA 45 45 45 55 35 70 70 76 80 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175

Air Slide Table Series MXQ

, G 1/8) 4 16 Max. 17 (Retraction end adjuster) 22 50 65 6H9 depth 6 +0.030 0 HA GA NN x M8 x 1.25 thread depth 16 7 B A 35 12 12 6H9 depth 6 +0.030 0 6.6 6.6 11 11 B H A 32 11.5 32 11.5 (NN 1) x H G Section AA Section BB (mm) ZZ 123 123 123 133 157 182 221 274 299 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 K 35 45 55 65 75 100 125 150 175

VDW

VXR 2.5 Approx. 300 14.7 20 VXH (24.5) 4.5 VXF 49 28 38 VX3 24.5 VXA R2.25 L3 L2 L1 2 x 3/8 (IN port) (: Thread type) 10.5 5.5 VCHm VDW 1 Stations D side 2 3 4 5 n U side VQ LVM VCA VDW33-*G-* VDW33-*G-* VDW33-*G-* VDW33-*G-* VCB 83 VCL VCS 34 21 5.5 16 VCW n x 1/8 17.25 17.25 (OUT port) n x 1/4 P = 34.5 2 L Dimension (mm) n (stations) Dimension 2 10 5 7 8 9 3 4 6 L1 70 315 350 105 140 175

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

For details, refer to page 175.

Digital Gap Checker ( compatible)

Relationship between boundary value and display value of the level bar/switch point value bar and process data Distance type Level 1 Level 2 Level 3 Level 4 Level 4 60 or less (60 to 36) X+30 X+25 X+20 ISA-F (35 to 31) (30 to 26) (25 to 21) ISA3-G 300 or less X+150 X+125 X+100 Display (300 to 176) (175 to 151) (150 to 126) (125 to 101) value ISA3-H 500 or less X+300 X+250 X+200 Constantly

Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order Bore size 10 16 10mm 16mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.

End Lock Cylinder Series CBG1

Rear trunnion type (mm) With front lock/R Bore size (mm) Rear trunnion type/CBG1T (with front lock-R only) Z (rear trunnion) ZZ (rear trunnion) With rod boot With rod boot Without rod boot Without rod boot 124 + l 145 + l 20 125 104 131 + l 152 + l 25 130 109 133 + l 157 + l 32 135 111 147 (154) + l 175 (182) + l 40 155 (162) 127 (134) 168 (179) + l 200 (211) + l 50 180 (191) 148 (159) Z

Plate Cylinder with Lock Series MLU

Foot type Flange type Knuckle joint Clevis type Flexible mounting: Possible to mount on all surfaces except for the one with ports Bottom mounting type Side mounting type Axial surface mounting Series Variations Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Extension lock 32 MLU 40 Retraction lock 50 Features 2

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Standard strokes Bore size (mm) Standard stroke (mm) Long stroke (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Intermediate strokes and strokes of 75mm or less can also be manufactured.

Soft Start-up Valve AV2000/3000/4000/5000

128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Compact Hydraulic Cylinder Series CH
KGB

CHKGB50 5 (M) 5 (M) 55 x 85l x 60l 85 10 (M) 10 (M) 60 x 90l x 60l 90 15 (M) 15 (M) 65 x 95l x 70l 95 20 (M) 20 (M) 70 x 100l x 75l 100 25 (M) 25 (M) 75 12.4 x 105l x 80l 105 30 (M) 30 (M) 80 15.5 x 110l x 85l 110 35 (M) 35 (M) 85 x 115l x 90l 115 40 (M) 40 (M) 90 x 120l x 95l 120 45 (M) 45 (M) 95 x 125l x 100l 125 50 (M) 50 (M) 100 x 150l CHKGB25 M5 x 55l 150 75 (M) 5 (M) 55 x 175l x 60l 175

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

One-touch Fittings/Stainless Steel Series AS-FG P. 20 One-touch Fittings/Stainless Steel Series KG P. 21 Miniature Fittings MS P. 25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Dual Type Flow rate and effective area Model ASD230FM-M5 ASD330FM-01 ASD430FM-02 8, 10 6 6, 8 Metric sizes 4, 6 Inch sizes Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" l/min (ANR) {Nl/min} 7 12 38 Flow rate Controlled flow Effective area mm 0.1 0.6 0.2 Free flow l/min (ANR) {Nl/min} Flow rate 175 350 295 75 Effective area mm 4.5 1.1 5.3 2.7 Note) Flow rates are values

End Lock Cylinder Series CBJ2

Information End Lock Cylinder Series CBJ2 / 16 Cylinder stroke (mm) 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer. For types with auto switch, refer to Minimum Strokes for Auto Switch Mounting on page 2.

Refrigerated Air Dryer Series IDF/IDU

210 210 250 200 230 320 385 335 380 210 240 200 230 170 200 175 210 165 195 165 195 165 195 165 195 165 195 50Hz 60Hz 50Hz 60Hz AC 100V AC 200V Power consumption (W) Note2) 50/60Hz Refrigerant Air connection Weight R134a 28 Rc3/8 23 Rc1/2 27 Rc3/4 28 Rc3/4 27 23 Rc1/2 22 18 Rc3/8 17 16 (kg) White1 (Munsell 10Y8/0.5) Coating color Note1)The data for l/min (ANR) is under the conditions of

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Dimensions/LJ1S202SC Scale: 10% When two dimensions are shown, the top dimension is for 100 to 600mm stokes, and the bottom dimension is for 700 to 1200mm strokes. 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 140 184 176 Z section detail 52 52.5 169 18 22 175

Single Axis Electric Actuator Series LJ1

Without motor brake Without motor brake With motor brake With motor brake Without motor brake 50 Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175

MXS Series Air Slide Table

70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175