VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

S Couplers Series KK/KKH/KK13

H L2 L1 Female thread type (mm) Body size H Width across flats T Connection port size Effective area mm2 L1 Min. bore size Mass g L2 Model KK2P-M5F 8.1 2.6 8 3.4 12.3 M5 x 0.8 17.6 M5 T KK3P-01F 10.4 14 18.4 Rc 1/8 28.3 -02F 22.6 20.8 17 6.0 Rc 1/4 1/8 35.0 19.9 -03F 23.2 19 Rc 3/8 36.8 KK4P-02F 23.9 17 Rc 1/4 37.2 50.9 H L2 9.0 25.2 1/4 -03F 24.6 39.8 19 Rc 3/8 L1 KK6P-03F 28.6 43.3 106.2

One-touch Fittings Series KQ2

H (Hex.)

ISO Standard Hydraulic Cylinder

Bore size (mm) NTH-040 NTH-050 NTH-060S NTH-080S NTH-100S B C d D H CH2 21 26 39 48 62 10 12 16 20 25 25.4 31.2 47.3 57.7 75 M16 x 1.6 M20 x 1.5 M27 x 2 M33 x 2 M42 x 2 40 50 63 80 100 22 27 41 50 65 CHA Related Products D339 CHSD Series Auto Switch Mounting Refer to pages 431 to 490 for detailed specifications.

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

A

10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

FQ1

Symbol Symbol No. x 50 001 005 010 020 050 075 100 005 010 020 040 074 105 q w q 0.01 0.01 e w 0.005 0.005 r 0.002 10 50 100 0.002 5 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Fiber element (Cotton): FQ1011N-06-H HEPO II element (PP): FQ1011N-06-R Symbol Symbol Fluid: Water Temperature: Normal temperatures Filtration material: Fiber (Cotton) Fluid: Water Temperature: Normal temperatures

Clean Regulator

Model XT13-394-06 XT13-394-10 INA-48-1-06 INA-48-1-10 INA-48-16-10 INA-48-16-06 INA-48-58-10-H INA-48-58-06-H Port size Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Relief mechanism Non-relief Relief Non-relief Fluid Deionized water (Pure water) Air, N2 Proof pressure 1.9 MPa 1.5 MPa Max. operating pressure 1.3 MPa 1.0 MPa Set pressure 0.1 to 1.0 MPa 0.05 to 0.5 MPa 5 to 60C Ambient and fluid

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Soft Start-up Valve AV2000/3000/4000/5000

10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Symbol Symbol No. x 50 001 005 010 020 050 075 100 005 010 020 040 074 105 q w q 0.01 0.01 e w 0.005 0.005 r 0.002 10 50 100 0.002 5 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Fiber element (Cotton): FQ1011N-06-H HEPO II element (PP): FQ1011N-06-R Symbol Symbol Fluid: Water Temperature: Normal temperatures Filtration material: Fiber (Cotton) Fluid: Water Temperature: Normal temperatures

FQ1

Symbol Symbol No. x 50 001 005 010 020 050 075 100 005 010 020 040 074 105 0.01 0.01 0.005 0.005 0.002 10 50 100 0.002 5 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Fiber element (Cotton): FQ1011N-06-H HEPO II element (PP): FQ1011N-06-R Symbol Symbol Fluid: Water Temperature: Normal temperatures Filtration material: Fiber (Cotton) Fluid: Water Temperature: Normal temperatures Filtration

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

JXCx-OMT0023

OPTIONS AND AUXILIARY EQUIPMENT (b) Cable internal wiring diagram MR-J3ENCBL2M-L/-H MR-J3ENCBL5M-L/-H LE-CSE-SA LE-CSE-RA LE-CSE-SB LE-CSE-RB MR-J3ENCBL10M-L/-H Encoder side Servo amplifier Driver connector side connector P5 LG 1 2 3 P5 6 LG MR MRR MR MRR 3 4 5 4 9 2 SD Plate 9 SHD 11 6 11.

1

Different Diameter Module: KBR T KBP2 KBV2-06 3 KBL2-R2S 1 KBP2 1 Model Body size KBR2-1 KBR3-2 KBR4-3 VMG KBV2-06 KBL2-R2S Plug/Cap: KBP, KBC (P . 15-3-117) 4 Component module KBV2-06 3 KBE2-06 1 KBP2 1 KBP2 KB P 1 KBE2-06 Body size KBE2-06 KBV2-06 Model Plug: KBP Cap: KBC Component module KBV2-06 2 KBE2-06 2 KBN2 1 Model Model Bracket mounting thread M6 x 1 x 8 l KBC1 KBC2 KBC3

CV/MVGQ

18 22 26 86 83 83 84 85 27 30 31 37 40 38 43.5 49 63 73 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11 11 13 16 18 18 18 20 20 Bore size (mm) 40 50 63 80 100 Without rod boot With rod boot ZZ 221 231 239 271 283 W l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke H 51 58 58 71 72 ZZ 229 239 247 280 292 h 59 66 66 80 81

VZ5000

-D-01 C6: MAX. 6 C8: MAX. 6.5 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-57 Series VZ5000 2 Position Double VZ5220 Grommet (G), (H) VZ5220-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01