Digital Flow Switches

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption

Air Pilot Operated Series NVSA

Jr., l,t, 3 . j ':;',14 . , : ; , , I r , ' ' . , I I I I r . . , , r , , , , . . , , . . r l r l , r r t r t r r _ : , r r r t , r ' : , ' , , , r , , , . , , . ' 1 1 1 i , , 1 : : : ; , , , , 1 ' . 1 i , , , " " ' . , : : ; : : l i , : , : : . l i : : ; , , , , : : , : , , ; , , , " . : : : ; ; : : , : . : . 1 ; i : : : : : : : : : ; ; " ' . 1 , , r 1 1 i , r r " : : " ' l i , ' r . : 1

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 AS221F-01 AS231F-01 R 1/8 AS221F-02 AS231F-02 R 1/4 AS321F-02 AS331F-02 R 1/4 AS321F-03 AS331F-03 R 3/8 AS421F-04 AS431F-04 R 1/2 AS121F-U10/32 AS131F-U10/32 10-32 UNF AS221F-N01 AS231F-N01 NPT 1/8 AS221F-N02 AS231F-N02 NPT 1/4 AS321F-N02 AS331F-N02

Free Mount Cylinder

D Double acting Acting 16 16 mm Nil 20 20 mm Q Rod piping/Male thread 25 25 mm Bore size Stroke (mm) 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 TN TF R Rod piping/ Pad direct mounting 32 32 mm Note) In the case of rod piping (Q, R), TF (G1/8) is not available.

NCQ8

Series NCQ8 Compact Cylinder Double Acting, Single Rod Dimensions/Mounting Both ends tapped NC(D)Q8A-(C)(M) Symbol Bore O1 R R R O1-Thread 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2") 250(2 1/2") 300(3") 400(4") #4-40UNC 0.34 #6-32UNC 0.34 #6-32UNC 0.50 #10-24UNC 0.50 #10-24UNC 0.53 1/4-20UNC 0.65 1/4-20UNC 0.69 5/16-18UNC 0.84 Note) Fully threaded tap for 012 stroke Rear clevis

VP300/500/700

(Non-locking) Manual override 69.4 (30.5) 24 13.5 2-6.5 (For mounting) (X port) (M5 x 0.8) (R port) Rc 1/4 101.6 26.7 (17.5) 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) 3(R) 27 50 V100 1(P) MAX.10 D: 112.8 26.7 Y: 112.3 101.6 102.4 MAX.10 112.8 (P port) Rc 1/4 SY SYJ 300 (Pitch) Pg9 Pg9 85.6 95.6 27.5 28 (Lead wire length) 95.1 105.1 Y: 97.6 114.6 L1 L2 7.5 90.1 100.1 D: 95.6 112.6 Applicable lead wire

Electric Grippers

Note 3) 10 to 15 in decimal number are displayed as follows in the 7-segment LED. Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock. 68 Series LECP1 Controller Details e r No.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.

90

Note 10) Fixed unit: kPa Note 11) When K, Q, R or S is selected, select K for e Combination of Supply Valve and Release Valve.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS120M-M5 M5 x 0.8 9 9 8 10 28.2 24.8 10.3 29.8 33.2 AS120M-U10/32 10-32 UNF AS220M-01 12 R 1/8 Rc 1/8 14.3 14.6 18 31.4 27.4 14.1 32.4 36.4 AS220M-N01 NPT 1/8 12.7 AS220M-02 17 R 1/4 Rc 1/4 18 19.5 27.2 35.9 29.9 18 34.9 39.9 AS220M-N02 NPT 1/4 17.5 Dimensions of R and NPT threads after installation. 15-9-63 8 Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

Series KG Stainless Steel One-touch Fittings

M5 Nylon Urethane KGT04-M5 KGT04-01 . 15.5 M5 0.8 14 22 15.5 23 13 3.5 4.3 4.3 7 9.5 1 8 4 13 M5 0.8 14 10 10 18 10.4 6.0 6.0 16 1 4 KGT04-02 26 25 19 4.2 13 KGT06-M5 KGT06-01 15 23 17.5 14 25.5 16 4.3 4.3 11.5 7 . 1 8 10 6 10 20 12.8 1 4 KGT06-02 27 27.5 17 17 14 13.9 13.9 21 3 8 KGT06-03 29 29 35 1 8 1 4 KGT08-01 KGT08-02 24.5 28.5 28 30 12 15 23 R(PT) 8 14 15.2 18.5 26.3 18.2 12 23 3 8

Stainless Steel One-touch Fittings Series KG

(mm) Weight (g) M2 D 4 6 8 10 6 KGH04-06 34.5 17 18.5 21 22 12.8 16 4.2 4.2 5 8 KGH06-08 38.5 15.2 17 10.7 10.7 7 10 KGH08-10 42 18.5 18.5 24.1 16.7 11 12 KGH10-12 44.5 20.9 21 37.6 28.2 14 Male elbow: KGL Effective orifice(mm 2) Nylon Urethane Applicable tube O.D. (mm) Connection thread R(PT) H (Hex.) Weight (g) M5 Part No.

EX500

24VDC/650mA 16 VOLTAGE INPUT US C TYPE1 IP CODE IP65 R C US R R R R R R R US C US C US C US C US C US C US C SERIAL NO.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

One-touch fitting 10 Clip 11 SJ3000-CL-1 (10 pcs.) 6 4 Port Solenoid Valve Series SJ2000/3000 Construction: SJ3000 SJ3A60 [N.C. valve x 2] JIS symbol 4 position dual 3 port valve SJ3A60 [N.C. valve x 2] SJ3A60K with back pressure check valve !0 y t r q e u q !2 i !

RSQ

B 48 52.5 54 N 5.5 5.5 6.6 O1 M6 x 1 M6 x 1 M8 x 1.25 R 10 10 14 Model RSQA32 RSQA40 RSQA50 These 3 figures show the piston rod extended.

Environment

0 i o e r t q u !1 !2 !3 !

M-E05-1-LQ1

Metric size Inch size 3 4 6 8 10 12 19 25 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" LQ GP R 3 Type Body class Insert pin (single) Body class (Refer to Table 1) Tubing size symbol (Refer to Table 1) 1 Note) 03 04 Note) 03 LQ GHR 07 2 Note) 03 04 06 Note) 03 05 07 Holder (single) Tubing size symbol (Refer to Table 1) 3 06 08 10 07 11 R 4 10 12 11 13 Parts case (2) 5 12 Note) 19 13 Note) 19 Description

Membrane Air Dryer

Q r Q1 Inlet air Series IDGr 206, therefore YES 10 1.35 3.00 proceed to Step 6 15 1.22 2.17 Step 6 20 1.10 1.52 Confirmation of pressure drop $P1 [MPa] Step 6 25 1.00 1.00 30 0.92 0.65 Single unit (Refer to pages 7 and 8.)