Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Vacuum (V) port (M5) Note 5) 21 10 111 Note 1) (3.7) Dimensions 1 2 3 4 5 6 7 8 (mm) K J 5 6 E F n L1 L2 Note 2) The above dimensions are for ZQ1 3M2 .

Vacuum System Peripherals:

length 0.6 m L Grommet type Lead wire length 3 m 24 VDC 5 12 VDC 6 C Lead wire length 0.6 m 1 Symbol 2 3 4 5 6 7 8 Order of manifold (Station) Connector type 6 VDC V CL CN Lead wire length 3 m Without connector 5 VDC S 05 07 10 Ejector unit nozzle diameter 3 VDC R Note) When F is required, it is Nil.

CL

1 !2 !3 !4 !5 !6 !7 !8 !

Digital Flow Switch (Integrated display type)

(example: If the flow switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) x1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V).

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Inch 1(P), 3/5(R) port: 5/16" 4(A), 2(B) port: 5/32", 1/4" Weight W (g) Note 2) Made to Order Made to Order (For details, refer to page 411.)

Compact Manifold Regulator

5/16 6 6 8, 5/16 3 11.5 19.5 20 23 10, 3/8 10, 3/8 1/4 1/4 7 11.5 22 22 26 1/4 1/4 19 20.5 737 ARM11A/B Series End Block Pressure Gauge ARM11E L Part no.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Actuation type Bracket 1 2 Normally closed Normally open Bracket is mounted. Brackets cannot be retrofitted. External pilot type is not available. (For type 20 manifold) 10 M 1 SYJ3 2 5 M M3 Body ported 10 M SYJ3 4 5 M 1 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only.

Combination Cylinder

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Table of Contents

VQ1 3 C6 Y 5 0 1 D-sub connector kit with 3 m cable VV5Q13-08FU2 1 set Manifold base no. VQ1130-5-C6 4 sets Valve part no. (Stations 1 to 4) VQ1230-5B-C64 sets Valve part no.

SZ3000

1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 w !4 PF2M701/702(-L) PF2M711S(-L) !5 * There is no bypass construction for the 1 and 2 L ranges. Component Parts No.

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

CRBU

Since L1 is a standard chamfer, dimension E1 is 0.5 mm or more, and 1 mm or more with a shaft bore sizes of 30 or 40.

SZ3000

1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

Rotary Actuator

1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

Vacuum Module Series ZX

valve side is station 1.)

MXQ

1 !2 !3 !4 !5 !6 !7 !8 !

A_HEC-OM-I009

-2 Fig. 4-4 Electrical diagram -4-3 Fig. 4-5 Circulating fluid circuit -4-3 Fig. 5-1 HEC002-A -5-1 Fig. 5-2 HEC006-A -5-1 Fig. 5-3 Air Filter -5-2 Fig. 5-4 Top view -5-2 Fig. 5-5 Operation panel-5-3 Fig. 5-6 Display -5-3 Fig. 5-7 Reservoir Cap -5-4 Fig. 6-1 Cooling capacity -6-2 Fig. 6-2 Heating capacity -6-2 Fig. 6-3 Pump capacity -6-3 Fig. 9-1 Alarm indication in the event ERR14 arises

Fieldbus system PROFIBUS DP compatible SI unit

Content 0 1: There is an error in unit 0. 1 1: There is an error in unit 1. 2 1: There is an error in unit 2. 3 1: There is an error in unit 3. 4 1: There is an error in unit 4. 5 1: There is an error in unit 5. 6 1: There is an error in unit 6. 7 1: There is an error in unit 7. Unit 8 to 9 7 6 5 4 3 2 1 0 Byte 21 Bit No.