CQS

With auto switch A 22 22 24.5 27.5 B 36 36 47 50.5 A 27 27 34.5 37.5 B 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 31 31 37 40.5 B + Stroke A + Stroke Bore size (mm) 12 16 20 25 FD FT FV FX FZ L L1 Rod end male thread 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 3.5 3.5 4.5 5 14 15.5 18.5 22.5 Flange bracket material: Carbon steel Rod end nut Double clevis style: CQSDS

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

C85

26 B 26 7 23 A B 11.5 Hs Hs 8.5 D-A7H D-A80H 1 10.2 7 22 A B D-C73C D-C80C A 36.7 B 16 Hs Hs 8.5 10 13.3 13.3 D-A73C D-A80C B 24 A Hs 18.6 B 16 A 29 D-H7 D-H7W D-H7BAL D-H7NF Hs 8.5 1 7 23.5 A B D-A79W 14 Hs A 38.2 B 16 D-H7C Hs D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F 23 A B 1 8.5 Hs 11 13.3 13.3 10 A B 26 Auto Switch Mounting Position (mm) D-J79C 17 D-C7 D-C80 D-C73C D-C80C D-A73 D-A80 D-A7H

Electric Actuator with Integrated Guide

a=1000 a=2000 a=3000 L2 (mm) Mer Rolling Yawing 100 m L2 Mer 0 30 20 10 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100 L3 m Mey a 0 30 20 10 Transfer load m (kg) Refer to page 71 for deflection data. 36 40 Non-standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPH(X10) Scale: 20% Photo micro sensor 50 30 thread depth 8 4-M5 x 0.8 E D Proximity sensor (2

Air Slide Table

Mr = 1 x 9.8 (30 + 10.5)/1000 = 0.39 A6 = 10.5 Mar = 36 Mrmax = 36 K = 1 = 1 '2 = 0.39/36 = 0.011 Find the static moment M (Nm).

IIIIIII

-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) A (3 x 3.2) Section SD SD Auto switch mounting groove dimensions (2 locations) MHSJ3-16D MHSJ3-20D MHSJ3-25D 4 4 5 4 6 5 3 6.5 5 3 3 20 20 5 5 90 90 20 20 20 20 (mm) NB 5h9 6h9 6h9 K 4 5 6 J 10 12 14 HB 36 42 50 HA 44 50 59 FX 12 15 18 EO 9.5 10 12.5 EC 7.5 8 9.5 DO 19.5 22 26.5 A 39 42 47 CB 14 14 17.5 DC 17.5 20 23.5 B 30 36 42 CA 7 7 7.5 AE 27 28 32 Q 6 7 8 AA 46 49 55 AD 16 18 20

Mechanical Valves Series NVM, NVFM, NVZNI

-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t

KR

(mm) Model N L A N-applicable tubing O.D.

One-touch Fittings

Plug-in elbow Female connector P.34 KQ2F Universal female elbow P.38 KQ2VF Use to branch a male or female thread in the same direction and at a 90 angle. Multiple connections possible. Use to change the tube direction of One-touch fittings by 90. KQ2L P.36 Use to pipe a male thread of a pressure gauge, etc.

LJ1H

B 89 A A B Section BB Coupling P.C.D.

Basic type / Direct mount type Series CY3B/CY3R

45 51 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5

10

flow rate of 14.1 scfm [400 L/min] (ANR) is P1 29 psi (0.2 MPa) for a 4 orifice and P1 84 psi (0.58 MP)a for a 3 orifice.

Possible to transfer a workpiece at low-speed.

17 to 30 18 to 32 18.5 to 36 Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 CRQ2X MSQX CRQ2X MSQX MRQ Symbol: A20 Symbol: A21 Symbol: A22 The long shaft can be further shortened by machining it into a stepped round shaft with a double-sided chamfer.

VCL

A B C D E F G H J L Port size Valve model VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting

AC Servo Motor Driver

A 9 CONTENTS 1.

Electric Actuator

2 . ; A A LEFS40 : = B > > 8 @ A-A . ; 2 A A No.

AC

equipped with a limit indicator on which the prescribed pressure range can be viewed at a glance.

CV/MVGQ

' view RE A B Breathing hole REC A-A' view CX CY MQQ M RHC Manual button MK(2) RS Q G RS H A RZQ MI W S Non-lube type Long stroke type CEP1 CE1 Component Parts CE2 Note Material Material No.

CV/MVGQ

If a cover is rotated when installing a cylinder or screwing a fitting into the port, it is likely to damage the junction part with cover.