Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

20 Stroke: S MXP12-15 A Piping port 2-M5 x 0.8 (Plug: M-5P) 8 Width across flats 2 Width across flats 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com H 8.5 14 M4 x 0.7 18.2 4.2 24 25 8.5 A 20 4-M5 x 0.8 4-M4 x 0.7, depth 4.5 Bottom hole diameter 4.2 19 1.5 W 22

CRQ2

M5, M6 M4, M5, M6, M8 Symbol: A36 Symbol :: A37 Symbol :: A38 The long shaft can be further shortened by machining it into a stepped round shaft.

Stainless Steel 316

Connection thread R M Weight (g) A D L2 L1 (mm) L1 L1 2 x Applicable tubing M M KQGT04-M5 KQGT04-01S KQGT06-M5 KQGT06-01S KQGT06-02S KQGT08-01S KQGT08-02S KQGT08-03S KQGT10-02S KQGT10-03S KQGT12-03S KQGT12-04S 18 23.1 26 4.5 M5 x 0.8 4 10.6 20.5 18 1/8 21.5 25.6 27 6 D 10 A 19 25 39 4.5 M5 x 0.8 L2 6 13 22.5 1/8 22.1 27.5 41 18.8 11 H Connection thread (In case of R) 14 26.5 1/4 29.5 50 12

Manifold Specifications

for 4 Rc 1/8 G B3 One-touch fitting for 5/32" 20 20 stations 4(A), 2(B) port 1(P) port NPT Rc 1/8 How to Order Flat ribbon cable type 41P Applicable solenoid valve VV5Z3 41P 05 M5 1 3 5 6 1 3 5 6 VZ343MOZ Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 4(A), 2(B) port 03 VZ353MOZ 3 stations M5 x 0.8 M5 M5 x 0.8 Rc Nil F N Z NPTE Applicable blanking plate assembly DXT192-13-

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

180° Angular Style Air Gripper Series MHY2/MHW2

Calculate the moment of inertia of attachment. z r1 Material of attachment: Aluminum alloy (Specific gravity = 2.7) A part z1 r1 = 37 (mm) Calculation of weight m1 = a x b x c x Specific gravity m1 = 40 x 7 x 8 x 2.7 x 10-6 = 0.006 (kg) Moment of inertia around Z1 axis Z1 = {m1(a2 + b2)/12} X 10-6 z1 = {0.006 x (402 + 72)/12} x 10-6 = 0.8 x 10-6 (kgm2) A = 0.8 x 10-6 + 0.006 x 372 x 10-6

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 o A !5 @7 A !0 @2 @4 @5 @6 !4 !3 A-A w * Motor bottom mounting type is the same. Component Parts No. Description Material Note No.

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

MGP

3 Set of above @3, @4, @5, @6, @7 and @8 16 20 25 32 40 50 63 80 100 MGP16-A-PS MGP20-A-PS MGP25-A-PS MGP32-A-PS MGP40-A-PS MGP50-A-PS MGP63-A-PS MGP80-A-PS MGP100-A-PS Hex. socket head tapered plug Slide bearing Felt Resin Ball bushing Set of above @3, @4, @5, @6, @7 and @8 !4 !5 !6 !

3 Port Air Operated Valve Series SYJA300 1

x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting

SMC Electronic Switch Series Variations

Do not use a screwdriver with a large grip or with a tip that does not fit into the trimmer groove.

AC Servo Motor Driver

(a) Transmission Transmit command [1][2] and data No.[6][0].

Fieldbus System

DIN rail clamping screw 8 R R 11.5 63.5 62.5 56.6 3 3 12 X 12 X 40.5 B B B B B B B B P P 25 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)

Auto Switch Guide

screw, use a watchmakers screwdriver with a grip diameter of 5 to 6 mm.

MXW

Dimensions B A D C M (mm) Stopper bolt Stroke adjustable range (mm) 5 Applicable size B A C D M Model Lock nut MXW-A812 21 MXW8 8 M5 x 0.5 2.5 6 MXW-A812-X11 15 31 MXW-A1212 5 23.5 MXW12 8 M5 x 0.8 2.5 6 Avoid operating within 1 mm. The effectiveness of the shock absorber and urethane damper will not be brought into full play, and could be adversely affected.

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B C D E 19.5 20.5 8.5 9.5 1.8 3 6.5 8.5 7 8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 90 Miniature Fittings M3, R(PT) 1/8, M5 Series M Series M5 Barb fitting for nylon tube: M-5AN-4, -6 Weight (g) 1.6 1.7 Effective orifice(mm2 Part No. A B C ) 2.1 4.0 12 14 5 8 1.8 2.5 M-5AN-4 M-5AN-6 Barb fitting for soft tube: M-5AU-3, -4, -6 Part No.

Low Profile Air Gripper Series MHF2

depth 3 6 -X 30 8 30 8 3 MRHQ 2 x M6 x 1 thread depth 6 (Mounting thread) MA Groove for auto switch mounting D25 144 467 Series MHF2 Body Option: Side Piping Type MHF2-DR Body Option Dimension (mm) B A Model A B C D 25 MHF2-8DR 5.5 37 11 M3 x 0.5 MHF2-8D1R Axial piping port side 61 MHF2-8D2R C 38 MHF2-12DR 7 54 14.8 M5 x 0.8 MHF2-12D1R 90 MHF2-12D2R 54 MHF2-16DR D D 9 76 19 M5 x 0.8 MHF2-

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100