MXF

M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8

4/5 Port Air Operated Valve Series SYJA3000 1

Note 3) 5 port base mounted without sub-plate: SYJA540 5-2-23 6 Series SYJA5000 Dimesions: Body Ported Dimensions: Base Mounted 2 position single: SYJA5140-01 2 position single: SYJA5120-M5(-F) 41.5 (For mounting) 2-4.3 M5 x 0.8 (Pilot port) 1 Manual override 15 5 11 A B A B 1 M5 x 0.8 (Pilot port) 10 24 A B 19 R P 2-2.6 2-3.5 4 37.5 (For mounting) (For manifold mounting) (Bracket) 47 42

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

SMC Pneumatic Clean Series

(mm) 26 20 16.5 14 C 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 13<10> 20<18> 20 20 GA 50 40 40 35 H 8 6 6 5 H1 19 17 17 13 B1 47 38 31 26 I 187 175 173 163 ZZ M6 x 1 depth 12 M5 x 0.8 depth 8 M5 x 0.8 depth 7.5 M4 x 0.7 depth 7 J 27 19.5 19.5 15.5 AL Bore size A M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 44 35.5 29 24 NA 1/8 1/8 1/8<M5 x 0.8> 1/8<M5 x 0.8> P 9 7 7 7 RA 87 95 93 93 S 6 5.5 5.5

Magnetically Coupled Rodless Cylinder

M5 6 47 8 61 26 70 9.5 6.0 28.5 41 92 40 M6 x 1.0 M5 6 55 8 71 Note 1) Dimension F provides a clearance of 1mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type S41 How to Order Applicable solenoid valve Note) SY114SY114ASY124SY124AApplicable blanking plate assembly SY100-77-1A SS3Y1 S41 05 M3 Stations A port side 02 M3 M5 M3 x 0.5 M5 x 0.8 2 stations 20 20 stations P R R port M5 x 0.8 P port M5 x 0.8 A port M3 x 0.5 M5 x 0.8 Note) SY114(A) and SY124(A) cannot be mounted on the same manifold.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

4.5 Note) 30 4 x M4 x 0.7 thread depth 5 (Opposite side: Same) (Opposite side: Same) 4 x M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 5 10 10 8 46 2 x M4 x 0.7 thread depth 6 (30) (Z) 2 x M5 x 0.8 thread depth 8 5 450.2 8 Note) 11-, 22-: Vacuum suction port Vacuum air from 2 ports on both sides. 10-/12-, 21-: Relief port Exhaust air from a port on one side.

Rotary Gripper Series MRHQ

10 3-3H9 long groove depth 3 + 0.025 0 M5 x 0.8 37h9 0 0.062 Port A M5 x 0.8 (one each on three sides) Port B 4-M4 x 0.7 Depth 6 N I J E A D P A A M N R R SMC E O P T P A I R R 6 G Y R A I 18 2 6 21 9 5 23 5 Side A Side B Scale: 60% 9 Series MRHQ Rotary Gripper Dimensions (mm) 1in = 25.4mm Scale: 60% MRHQ16 A B 41 50 66.5 30 4-M5 x 0.8 Depth 6 47h9 0 0.062 20.6 opened 5 0 0.1 8 4-M3

ARJ1020F

M5 x 0.8 6 3.5 15.5 50 17.2 ARJ1020F-M5-06 22 12.8 6 VY1 Manifold Base (Option)/Dimensions G PPA 2-3.5 (Mounting hole) 31 (ARJ1020F-M5-04) 32 (ARJ1020F-M5-06) AL Applicable tubing O.D. 4, 6 (Mounting hole) IN (Common) Stations Manifold base part no. 4 6 10 B dimension A dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 14-4-5 3 Miniature Regulator Series ARJ210 Lightweight body

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

D2 D3 L1 L2 L3 L4 L5 A M1 Model D1 Model AS121F-M5-23D AS121F-U10/32-01D 1/8" 8.4 17.3 22.1 12.3 3.2 8.4 22.1 5/32" 9.3 12.7 17.3 12.3 12.7 AS121F-M5-04D AS121F-U10/32-03D M5 x 0.8 9.6 4.7 0.7 27.4 8 4 9.3 31 31 0.7 27.4 10-32 UNF 8 9.6 4.7 AS121F-U10/32-05D AS121F-M5-06D 22.9 3/16" 11.4 21.3 26.1 16.5 6 18.1 11.7 13.5 11.6 18.3 23.1 11.7 AS221F-01-23SD AS121F-U10/32-07D 13.5 1/4" 12 3.2

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

Pressure Gauge Guide

This will cause a malfunction. 14-11-6 6 Pressure Gauge Guide How to Order G M C 46 10 01 X2 Option Specifications Symbol Pressure gauge F.R.L.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

type: Stainless steel 615 Series AS20-T Dimensions L4 D3 H (Hexagon width across flats) T2 L3 A L2 D1 D2 T1 L1 Dimensions A AS120-U10/32-T 10-32 UNF 10-32 UNF AS120-M5-T M5 x 0.8 8 9 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 Weight (g) 13 9 4.5 10 31 10.3 0.7 27.4 AS220-N01-ST NPT 1/8 12.7 NPT 1/8 AS220-F01-ST G 1/8 AS220-01-ST Rc 1/8 12 14.3 R 1/8 33 14.6 7 18 34.7 13.2 1.5 31.6 AS220

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

M5 6 47 8 61 26 70 9.5 6.0 28.5 41 92 40 M6 x 1.0 M5 6 55 8 71 Note 1) Dimension F provides a clearance of 1mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

VK3000

Port size (P, A and B port) Rated voltage M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz R1, R2: M5 4 Option 5 6 24 VDC 12 VDC Nil None With bracket (Not assembled) 7 240 VAC, 50/60 Hz 9 Other Option F Option Part No. Description Part no.

CLQ

switch Bore size (mm) A B A B Rod end nut 28.5 88.5 29.5 39.5 78.5 88.5 10 to 50 75, 100 39.5 40 Double clevis type: CLQD40 4-M5 x 0.8 Cap bolt 10 hole H10 Shaft d9 6 B + Stroke 34 7 14 22 10 18 +0.4 +0.2 Double clevis type (mm) A + Stroke CL + Stroke 36 -0.1 -0.3 Stroke range Without auto switch With auto switch Bore size (mm) A B CL A B 92.5 102.5 CL 112.5 29.5 39.5 102.5 112.5 10 to 50

MY1

A MY-SA 2 x G 2 x H E E F A B C D Side support B MY-SB 2 x J 2 x H C D A B A B C D E F G H J Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A 61 71.6 15 26 4.9 3 6.5 3.4 M4 x 0.7 B MY-S20A 67 79.6 25 38 6.4 4 8 4.5 M5 x 0.8 B MY-S25A 81 95 35 50 8 5 9.5 5.5 M6 x 1 B MY-S32A 100 118 45 64 11.7 6 11 6.6 M8 x 1.25 B 120 142 MY-S40A M10 x 1.5 55 80 14.8 8.5

VDW Series

Proper tightening torque Nm Tightening torque for piping (ftlb) Connection threads M5 1.5 to 2 (1.11 to 1.48) Rc 1/8 7 to 9 (5.16 to 6.64) Rc 1/4 12 to 14 (8.85 to 10.33) Rc 3/8 22 to 24 (16.23 to 17.70) Reference Tightening of M5 fitting threads After tightening by hand, tighten approximately 1/6 turn further with a tightening tool.

VHK

(mm) M5 M5 4 4 Port size R Port size R 1 8 1 8 6 6 1 4 1 4 8 8 3 8 3 8 10 10 1 2 1 2 12 12 Flame Resistant Type (UL-94 Standard V-0 equivalent) 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): Male thread 2(A) 2(A) Port size R Applicable tubing O.D. (mm) 1 8 1 4 3 8 1 2 1(P) 4 6 8 10 12 1(P) Applicable tubing O.D.