45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Pin Clamp Cylinders

(2-color indicator) Grommet Yes 24 V 3-wire (NPN) 5 V,12 V M9NWV V V V v v IC circuit 3-wire (PNP) M9PWV V V V v v 2-wire 12 V M9BWV V V V v v Grommet Yes 2-wire 24 V 12 V 100 V A73 V V V Relay, PLC Diagnostic indication (2-color indicator) A79W V V Reed auto switch * Solid state auto switches marked with v are produced upon receipt of order. * The D-A9l and A9lV cannot be

CE

M9P Solid state switch 12 V 2-wire M9B M9BV Relay, PLC Grommet Yes 3-wire (NPN) 24 V F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) F9PWV F9PW F9BWV F9BW 12 V 2-wire Water resistant (2-color indication) F9BA Solid state switches marked with are produced upon receipt of order.

CE

M9P Solid state switch 12 V 2-wire M9B M9BV Relay, PLC Grommet Yes 3-wire (NPN) 24 V F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) F9PWV F9PW F9BWV F9BW 12 V 2-wire Water resistant (2-color indication) F9BA Solid state switches marked with are produced upon receipt of order.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Z76 5 V IC circuit Yes Grommet Z73 12 V 100 V Relay PLC 24 V 2-wire No 5 V, 12 V Z80 100 V or less IC circuit Y69A Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7PV Y7P 3-wire (PNP) Y69B 2-wire Y59B 12 V Relay PLC Grommet Yes 24 V Y7NWV 3-wire (NPN) Y7NW IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Y7PWV 3-wire (PNP) Y7PW Y7BWV Y7BW 2-wire 12 V Improved water resistance

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

0.55

Surge intrusion circuit example (NPN outlet example) (24 VDC) P Grommet or L/M-type plug connector With light/surge voltage suppressor (lZ) Output circuit Surge voltage (~) 24 V 0 V sol.1: Energized 2 V or less LED Varistor Coil R Surge voltage 0 V (~) sol.2: Deenergized 2 V or less Surge voltage R P DIN or Conduit terminal With light/surge voltage suppressor (lZ) 24 V 0 V Large capacity

Compact Cylinder with Lock Series CLQ

V,12 V Magnetic field resistant (2-color indication) 2-wire (Non-polar) 3-wire (NPN equivalent) IC circuit A96V A96 5 V A72 A72H Grommet 200V 100V Reed switch A93V A90V A93 A90 12 V IC circuit 100 V or less Relay, PLC 5 V,12 V 12 V 2-wire A73C A80C A79W 24 V Connector IC circuit 24 V or less 5 V,12 V Diagnostic indication (2-color indication) Grommet Solid state auto switches

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

CE

M9P Solid state switch 12 V 2-wire M9B M9BV Relay, PLC Grommet Yes 3-wire (NPN) 24 V F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) F9PWV F9PW F9BWV F9BW 12 V 2-wire Water resistant (2-color indication) F9BA Solid state switches marked with are produced upon receipt of order.

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

PFxx-OMU0002

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 71 No.PF-OMU0002-D Characteristics data Flow rate/ Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A703H 30

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Same surface) 60 65 D-Y59/Y69 D-Y7P/Y7PV 2 pcs. (Different surfaces) 20 20 1 pc. 20 20 2 pcs. (Same surface) 70 65 D-Y7W D-Y7WV 2 pcs. (Different surfaces) 25 20 1 pc. 25 20 2 pcs. (Same surface) 70 75 D-Y7BAL 2 pcs.

Compact Guide Cylinder

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 5 Note 1) 5 2 10 Note 1) 10 D-M9W 1 5 Note 2) 2 10 Note 2) 10 D-M9WV D-M9AV 1 5 Note 2) 2 10 D-M9A 1 5 Note 2) 2 10 Note 2) Note 1) Confirm that it is possible

CNA

130 140 D-A44 (n-2) 25+55 2 n=2, 4, 6, 8, (n-4) 110+55 2 n=4, 8, 12, 16 (n-4) 120+55 2 n=4, 8, 12, 16 (n-4) 130+55 2 n=4, 8, 12, 16 (n-4) 140+55 2 n=4, 8, 12, 16 n (Same side) n=2, 4, 6, 8, 75+50(n-2) n=2, 4, 6, 8, 80+50(n-2) n=2, 4, 6, 8, 90+50(n-2) n=2, 3, 4, 55+50(n-2) Same 15 75 90 90 100 100 110 110 10 75 80 90 Different With 1 With 2 With n D-B5 D-B6 D-G5l D-K59 D-G5lW D-K59W

RSQ

3-wire (NPN) 3-wire (PNP) J 5 V, 12 V IC circuit Grommet 2-wire 12 V DConnector 3-wire (NPN) 3-wire (PNP) Relay, PLC 24 V IC circuit Diagnostic indication (2-color indication) 5 V, 12 V -X Grommet Water resistant (2-color indication) 12 V 2-wire 20H7BA 4-wire (NPN) With diagnostic output (2-color indication) H7NF IC circuit 5 V, 12 V Data Solid state switches marked with are produced

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 3-wire (PNP) 5 V, 12 V CC IC Grommet 2-wire 12 V RB Connector 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Grommet J 12 V Relay, PLC 24 V 5 V, 12 V Diagnostic indication (2-color) DIC 12 V -X Grommet 2-wire Water resistant (2-color) IC 5 V, 12 V 204-wire (NPN) With diagnostic output (2-color) 2-wire Magnetic field resistant (2-color) : Manufactured

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

) 3-wire (PNP) 5 V, 12 V CC IC Grommet 2-wire 12 V RB Connector 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Grommet J 12 V Relay, PLC 24 V 5 V, 12 V Diagnostic indication (2-color) DIC 12 V -X Grommet 2-wire Water resistant (2-color) IC 5 V, 12 V 204-wire (NPN) With diagnostic output (2-color) 2-wire Magnetic field resistant (2-color) : Manufactured upon

Table of Contents

(A contact) 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire 0.5 0.5 0.5 0.5 3 3 0.5 3 3 3 D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL None Yes (cable length 0.3m) Nil S N.O. (A contact) Number of auto/ proximity switches N.C. (B contact) N.C. (B contact) Auto/Proximity switch type 1 2 1 pc. 2 pcs. N.C.

Plate Cylinder

(Non-polar) 5 V, 12 V IC circuit Reed auto switch Solid state auto switch 12 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Relay, PLC Grommet Yes 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V Magnetic field resistant (2-color indication) P3DW Note 2) 3-wire (NPN equivalent) A96V A96 5 V 12 V IC circuit Yes Relay