Series VQ Metal Seal/Rubber Seal Body Ported

6 Voltage 1 to 6 L M 2 3 (VQ0) (VQ1000) (VQ2000) L M 2 3 (VQ0) (VQ1000) (VQ2000) VQ110L VQ110L Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The direction of the L and M connectors of a pilot valve is opposite to that of the single and double styles.

Guide Cylinder Series MGG

Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.

RSQ

MI W S 100 200 50 CEP1 130 50 100 50 40 40 CE1 40 Weight of transferred object m (kg) Weight of transferred object m (kg) 32 30 40 50 CE2 20 30 32 20 ML2B 20 16 10 C J G5-S 10 12 5 4 CV 3 4 5 3 MVGQ 2 2 CC 1 1 RB 1 5 10 20 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) J Lateral Load and Operating Pressure DThe larger the lateral load, the higher the operating pressure required

OMU0023

[m] Note1) 1 More than 0 Note 1) No D9115 4 AREA B position 2 [m] Note1) 1 More than 0 Note 1) No D09117 Writing is not available. to D0911F Note 1: The maximum value is the same as for the Card Motor maximum stroke [m].

MXS

60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 M 71 71 71 83 103 149 203 GA 15 15 15 42 51 61 111 KA Z 70 70 70 82 102 148 202 NA 2 2 2 2 2 4 4 Refer to "Dimensions" of MXS 12 on p.3.11-17 for one with shock absorber as symmetric.

Compact Cylinder with Air Cushion Series RQ

range (mm) A L L1 RQ 32 20 to 100 7 28.5 52 M FV CQM 40 20 to 100 7 28.5 59 50 30 to 100 8 33.5 66.5 MU All dimensions but A, L and L1 are identical to those of the rod side flange style.

MIW/MIS

Auto Switch Internal Circuits Auto Switch Weights Unit: g D-F8N D-F8N D-F8P D-F8B Model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 32 32 Main switch circuit Main switch circuit Main switch circuit OUT Black 5 52 52 52 DC () Blue Auto Switch Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting thread M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

4/5 Port Air Operated Valve Series SYJA3000

L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 94.4 86.9 61.6 [68.6] M8 x 1 66.1 75.6 0.6 0.6 46.2 48.6 0.6 105.2 0.6 0.6 0.6 74.5 [76.7] 64.7 [66.9] 84.5 83.6 107 [111.4] 73.6 87.4 [91.8] 103.4 [107.8] 66.2 123 [127.4] 125.2 90.4 127 106.4 Max. 10 141.2 121.2 143 72.7 [79.7] Approx. 300 (Lead wire length) Pg7 Approx. 300 (Lead wire length) Applicable code O.D

Escapements Series MIW/MIS

Auto Switch Internal Circuits Auto Switch Weights Unit: g D-F8N D-F8N D-F8P D-F8B Model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 32 32 Main switch circuit Main switch circuit Main switch circuit OUT Black 5 52 52 52 DC () Blue Auto Switch Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting thread M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

2-Color Display Digital Flow Switch Series PFM

Z Without lead wire with connector W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) ZS-33-F S 1 2 ZS-33-D S 1 2 ZS-33-D IN IN Lead wire length 2 m Lead wire length 2 m Option 2 R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) T Panel mount adapter (For without flow adjustment valve) Nil None ZS-33-J ZS-33-M ZS-33-

MK

MK40-M MK50-M MK63-M MVGQ M8 x 1.25 25 9 35.5 18 45 36 20 53.5 67 14 18 6 6.2 M8 x 1.25 25 9 43 18 45 36 20 61 67 14 18 6 6.2 CC M10 x 1.5 40 11.5 53 23 65 46 22 77 88 18 22 8 8.2 M10 x 1.5 40 11.5 52.5 23 65 46 22 76.5 88 18 22 8 8.2 RB J Mounting arms for width across flats D-X 20Data When installing the arm for the parllel section at the rod end, the strength of the piston rod might be

Filter Regulator

Model Tool size Amount of retightening Reference torque AW20-D 34/38 2.0+/-0.2 N m 2 to 5 notch AW30-D 52/55 3.5+/-0.3 N m AW40-D 52/55 4.0+/-0.4 N m 8-2. AW60-D Bracket 1) Mounting of bracket A Insert bracket A from the front of the filter regulator so that the fingers of the bracket A hold the regulator at the groove and the bottom of the body.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since there are other applicable auto switches than listed, refer to page 8-29-10 for details.

155

3 Auto switches Nil M L Z 0.5 m 1 m 3 m 5 m Nil M A B C E F G Without auto switch (without magnet) Without auto switch (with built-in magnet) Nil S 2 pcs. 1 pc. 0.5m (Nil), 1m (M), and 5m (Z) for D-M9mA will be produced on receipt of order. With auto switch Select a model, referring to the table Applicable Auto Switches below. The auto switches are included when shipped (unmounted).

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2

MHF2

Note) F9NWV F9NW 3-wire (NPN) Diagnostic indication (2-color display) F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire Lead wire length symbols: 0.5 mNil 3 m L 5 m Z (Example) M9N (Example) M9NL (Example) F9NWZ Note) Be careful for the differential of 2-color display type.

MHF2

Note) F9NWV F9NW 3-wire (NPN) Diagnostic indication (2-color display) F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire Lead wire length symbols: 0.5 mNil 3 m L 5 m Z (Example) M9N (Example) M9NL (Example) F9NWZ Note) Be careful for the differential of 2-color display type.

240

Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m. (At 15 m: Reduced by up to 20%) Note 7) A reference value for correcting an error in reciprocal operation. Note 8) Impact resistance: No malfunction occurred when the actuator was tested with a drop tester in both an axial direction and a perpendicular direction to the lead screw.

Regulator

Regulator Model Tool size Amount of retightening Reference torque AR20-D 34/38 2.0+/-0.2 N m 2 to 5 notch AR30-D 52/55 3.5+/-0.3 N m AR40-D 52/55 4.0+/-0.4 N m 7-2. AR50-D/ AR60-D Bracket 1) Mounting of bracket A Insert bracket A from the front of the regulator so that the fingers of the bracket A hold the regulator at the groove and the bottom of the body.

ITV

L-bracket 2.3 30 36 52 40 22 Straight type 3 m Cable connector TM-4DSX3HG4 50 Right angle type 3 m 4 x 5.5 8 x 4.5 4 x 7 22 TM-4DLX3HG4 50 36 40 84 40 36 22 40 5 36 7 4 x 5.5 8 x 4.5 22 14 20 60 70 12 1.6 14-8-15 16 Series ITV1000/2000/3000 Working Principle When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF.