Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Nil (Example) M9N 1 m . M (Example) M9NM 3 m . L (Example) M9NL 5 m .

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

, NPT, G) Width across flats KA J DL DL RF MO DL MM HR E D E HN Air-hydro CA2H Air-hydro CA2WH Auto switch Made to order Precautions H1 AL Width across flats B1 Width across flats of hexagon hole WB 2-cushion valve A N F K N B C M H S + Stroke ZZ + Stroke With rod boot e 9 l f h + l ZZ + l + Stroke (mm) HN Stroke range Bore size (mm) B C (MAX) P A AL B1 D DL E F G H H1 HR J K KA M MM MO N

LEC-OM02904

m i m 4 8 1 . 5 1 6 1 ( 1 8 . 5 5 ) m a x .

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(Type 20 manifold) 10 SYJ3 2 5 M 1 M3 3 Body ported Base mounted (4 port) 2 3 SYJ3 10 3 5 M (Manifold use only) Base mounted (5 port) 10 4 M 2 5 3 SYJ3 Clean series 4 port Manual override Port size Body option Nil: Non-locking push type Nil: Without sub-plate 3: Main/Pilot valve common exhaust type For type 31, S31, 32, S32 manifold 5 port R port P, E port (With gasket and screws) D: Push-turn

SMC

Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit: Class M1 to M7 U descriptor: Particles diameter smaller than 0.1 m (SI unit) (British

Electric Actuators

3 e u !

Compact Manifold Regulator Series ARM5

56) (16) (9) (18) (19) (52) (9) (11.5) (4.8) NARM2000 .18 1.36 1.69 1.10 1.06 2.76 .79 .45 .94 1.10 2.60 .45 .65 .19 (4.5) (34.5) (43) (28) (27) (70) (20) (11.5) (24) (28) (66) (11.5) (16.5) (4.8) Dimensions by number of stations Model Symbol A C E F G H J K M P NARM1000 L1 1.42 2.17 2.91 3.66 4.41 5.16 5.91 6.65 7.40 8.15 (36) (55) (74) (93) (112) (131) (150) (169) (188) (207) L2 1.06 1.81

Dual Rod Cylinder Series CXSJ/CXS

Model Selection Vertical Mounting l l m m Mounting orientation Max. speed (mm/s) Up to 200 Up to 400 Up to 600 Up to 800 Stroke (mm) All strokes 6 10 15 Selection graph z x c v 20 25 32 Horizontal Mounting l Mounting orientation m m Refer to the caution notes below.

Cylinder with Lock Series MNB

1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: D (Fork Lever-type Fitting S), External Scale Plate: H (w/External Scale Plate), LCD Window: None, Connection, Air - Electric: M (Rc1/4 - M20x1.5)

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: H (w/External Scale Plate), LCD Window: None, Connection, Air - Electric: M (Rc1/4 - M20x1.5)

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: Fork Lever-type Fitting S, External Scale Plate: w/External Scale Plate, LCD Window: None, Connection, Air - Electric: Rc1/4 - M20x1.5, ATEX Temperature: -

Type: Relay Device, Type: Smart rotary type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: Available, Body cover with window for LCD: N/A, Air connection port: Rc1/4, Conduit connection port: M20 × 1.5, Explosion-proof structure: ATEX Directive

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

d i s U e d i s D n 8 7 6 5 4 3 2 Stations 1 9 60 37 26 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 8 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported 4 4 4 4 4 4 4 4 3 R 7.5 13.1 29.6 (49.4) P 1 2 2 2 2 2 2 2 2 44.1 29.5 P=11.5 One-touch fitting, thread piping [4(A), 2(B) port] Applicable tubing O.D.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 44.5

VDW

Model Port size P B B1 E F C D J K M Grommet Q R 20 VDW1 VDW2 M5 42.5 15 4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5

Ionizer

Note) Bar length (mm) KJH04-M5-X34 460 to 700 860 to 1580 1660 to 2220 Note) Plug (M-5P-X112) 1 pc. is shipped together. Symbol X13 2 Non-standard power supply cable length Available in 1 m increments from 1 m to 20 m. Note 1) 11 m or longer power cables are not CE Marking-compliant. Note 2) Use standard power cables for 3 m and 10 m lengths.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

39

CKZ-63A037 CKZ-63A038 CKZ-63A039 CKZ-63A040 CKZ-63A041 CKZ-63A042 NAAMS code ACA037M ACA038M ACA039M ACA040M ACA041M ACA042M 70 mm Offset-Machined 120 mm Offset-Machined A B C D A B C D E F E F H G H G I J K L M N O I J K L M N O 11 through +0.028 +0.013 8F7 through 8F7 through +0.028 +0.013 11 through 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025

Modular Type Filter Regulator Series AW

IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

MXW Series Long Stroke Slide Table

Lead wire length(m) 0.5 (Nil) Auto switch part no.