CE2

0.5 0.6 0.7 F 200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Dimensions 1 2 3 4 5 6 7 8 (mm) K J 5 6 E F n L1 L2 Note 2) The above dimensions are for ZQ1 3M2 .

Tie-rod Type Hydraulic Cylinder

9 i q @2 e y @3 @0t!6 !7 w !1 !0!3 @1 !4 !2 u !5 o CHK CHN CHM CHS CH2 @2 CHA CHA Related Products 40 DDescription Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

9 e r t y u q !3 @9 #0 #1 #2 #3 #4 #5 #6 !4 !5 w !2 @0 @8 o !0 !1 i Manual release non-lock type: Suffix N @4 @5@6@7 Manual release lock type: Suffix L Parts List No.

0.4

VQ1000/2000 Series VQ1000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P

Programless controller Step motor (servo 24 VDC)

Set "1" to "14" with the position switch (h). ("1" to "9", "A" to "E") is displayed (f) (e) (c) in hexadecimal on the 7-segment LED (f). There are 2 types of modes on the controller (manual mode, auto mode). Setting and operating methods are different. Mode is switched by mode Switch (e).

New

C h 25 E R T g d C J IN OUT G1/2 j f 2 x M Depth 5 J J IN OUT H G A 2 x P Port size B B1 2 x M Depth 5 H B1 G A 2 x P Port size B i b Faston type D 11 Q F Terminal part Faston connector 250 Series Bracket mounting hole dimensions a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) 11 E C R 9 6.5 6.5 IN OUT 15 2 x M Depth 5 H B B1 G A 10.5 2 x P Port size (mm) Model A B B1 C D E F G Port size P 1

Modular Type Filter Regulator Series AW

Note 2) Symbol Nil B C D E G H Port size Body size Symbol Port size Float type auto drain (N.O.)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 109 109 119 129 145 177 220 245 13-/22-MXQ16L10 13-/22-MXQ16L20 13

LEC-OM02904

EMC (2) EMC EMC MCCB MC MCCB MC L1 1 4 (1) 1 L2 2 5 L3 3 6 E L11 L21 2 1 RAV-781BXZ-4 (2) 1 (RAV-781BYZ-2) () 1 2 3 2 2 RAV-781BXZ-4 (2) 2 (RAV-781BXZ-4) () 1 2 3 1.

Table of Contents

Refer to page 7-2-5. 2-M3 x 0.5 (Port size) M3 x 0.5 (Relief port: 10See above) (Vacuum port: 11See above) 3.5 20Data C + Stroke 3 B + Stroke A + Stroke Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 7-2-7 7 Series CUJ Construction Double acting !3 w e q !1 r y o e t !

VDW

Model Port size P B B1 E F C D J K M Grommet Q R 20 VDW1 VDW2 M5 42.5 15 4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5

Compact Manifold Regulator Series ARM5

Appearance 2.

CHKD/CHKG

2 u t e w 32 to 100 Without auto switch e 20 to 25 Parts List Replacement Parts/Seal kit Material Seal kit no. Content Description Bore size (mm) No. Note 20 Aluminum alloy 1 CHKG20-PS Black anodized Rod cover 25 Aluminum alloy 2 CHKG25-PS Black anodized Head cover 32 Aluminum alloy 3 CHKG32-PS Hard anodized Cylinder tube 40 CHKG40-PS 20, 25 Stainless steel Nos. u, !1, !2, !3 and !

39

0 q e !1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

SMC

ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 N 4 4 4 4 6 6 6 NA 2 2 2 2 2 4 4 GA 15 15 15 42 51 61 111 KA 125.5 179.5 HA 40 40 40 25 36 72 76 13-/22-MXS12L-10 13-/22-MXS12L-20 13-/22-MXS12L-30 13-/22-MXS12L-

Electric Actuators

2 e w i !1 t !

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

screw 103.3 (131.5) A 4 SMC 37.6 53.6 B 2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(For details, refer to page 359.) 344 5 Port Solenoid Valve 10-SYJ7000 Construction (A)4 2(B) 2(B) (A)4 2 position single 2 position double 1 (P) (R1)5 3(R2) 3(R2) 1 (P) (R1)5 y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 t q r w 3(R2) 1 (P) (R1)5 (A) 4 (B

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ1100-52 setsValve No. (Stations 1 to 2) VQ1200-54 setsValve No. (Stations 3 to 6) VQ1300-52 setsValve No. (Stations 7 to 8) VVQ1000-10A11 set Blank plate No. (Station 9) VQ1000 VQ2000 1 2 Indicator light and surge voltage suppressor Configuration 1 2 3 4 5 2 position single Yes No E 2 position double Write sequentially from the 1st station on the D side.