Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.

0.55

Conduit terminal: VP3185-T A B DIN terminal: VP3185-D A B Conduit terminal with indicator light (TL) Light Light position Max. 11 Applicable cable 6 to 12 [ ]: With indicator light (TL) 1500 Made to Order: Series VP3145/3165/3185 Main Valve Double Acting Type: -X80/X81 How to Order 1 D Z A N X 06 5 1 4 VP31 81 CE-compliant Body size CE-compliant Nil 4 6 8 1 2 Q Electrical entry: D/DO only

Environment

LEF D-M9NAV D-M9NA D-M9BA D-M9BAV D-M9PAV D-M9PA Auto switch model In-line Perpendicular In-line Perpendicular In-line Perpendicular Electrical entry direction LEJ 3-wire 2-wire Wiring type NPN PNP Output type LEL 24 VDC relay, PLC IC circuit, Relay, PLC Applicable load 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage LEM 10 mA or less Current consumption 24 VDC (10 to 28 VDC) Load voltage

VS7-6

ISO Interface Solenoid Valve/SIZEq Metal Seal SeriesVS7-6 Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position SV SY VS7-6-FPG-D Closed centre (FHG-D) Exhaust centre (FJG-D) Double pilot check (FPG-D) Pressure centre (FLG-D) SYJ SX VS7-6-FHG-D Option VK Standard Specifications 5 to 60 oC 0.1 to 1.0MPa Air/lnert gas Fluid Operating

VEX1

1 1 DO DIN terminal, without connector 70 1 4 11 4 G Grommet, Lead wire length 300 mm 1 H 50 70 90 Grommet, Lead wire length 600 mm 11 4 90 2 E Grommet terminal 2 T Conduit terminal D DIN terminal Body ported VEX3 12 0 01 5 D B Base mounted VEX3 22 0 01 5 D B Option Operation type (Only bracket or foot may be mounted.) 0 1 2 Air operated External pilot solenoid Internal pilot solenoid Nil

Refrigerated Thermo-chiller

SG Connector location P3: Not used for the maintenance purpose port D-sub9 (Male receptacle) P2: Serial RS-485 D-sub9 (Female receptacle) P1: Contact input/output D-sub25 (Female receptacle) Power cable entry E S O L C SMC N E P O Rear side 93 Series HRZ Operation Panel Display Description No.

Plug-in Unit

5 D-side end plate assembly Manifold block assembly !6 D-side end plate assembly part no. !7 Manifold block assembly part no.

Cylinder

L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIOd, H B C I NTP.()06 I 6 M3XQ.5 1.8 5,5 6,' SNP.oo6 6 Ml0X1.0 3 I. 16.2 _ ~.c1D. '1.0 Mt2X1.0 3 17 19,6 I NTP.()10 10' . M4 X0;7 2.4 , "la.tV NTP.()15 15 M5XO.a I 3,2 I 8 9.2 L.

VEX1

1 1 DO DlN terminal, without connector 1 4 11 4 70 G Grommet, 300mm lead wire 1 H 50 Grommet, 600mm lead wire 11 4 2 90 70 E Grommet terminal 2 T Conduit terminal 90 D DlN connector Body ported VEX3 12 0 01 5 D B Base mounted VEX3 22 0 01 5 D B B Bracket (Except VEX332) Option 0 Air operated Operation F Foot (Only VEX312, VEX332) 1 External pilot solenoid N Silencer for pilot exhaust (P2)

Slider Type Ball Screw Drive/11-LEFS Series

0 Driver type * Select D for the vacuum port for suction of 50 L/min (ANR) or more. o Cable length Note 3) !

JXCx-OMU0004

RESET B 8.3 P.41 RESET C OFF I/O STOP OFF OFF 8.5 ONP.44 RESET C D RESET C RESET D 66 No.JXC-OMU0004-A (M24V) RESET D RESET D 3.4 P.14 (C24V) RESET D RESET D ( E ) 67 No.JXC-OMU0004-A E ON E BK RLS E EEPROM EEPROM E 10 CPU CPU E 68 No.JXC-OMU0004-A 13. / 50mm ( ) 5m 5m 10% 15m 20% 69 No.JXC-OMU0004-A 14. / 14.1.

Programless controller Step motor (servo 24 VDC)

C c OFF OFF OFF ON OFF D d OFF OFF OFF OFF ON Power off Turn on the power E E OFF OFF OFF OFF OFF again When multiple alarms in alarm groups A to D occur, the relevant OUT 0 to 3 will be ON.

1.1

IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 Mass (kg) 275 259 355 299 320 35 355 299 320 42 IDF-TR-8 E C G B D A 4 x F (mm) A 540 B 400 C 260 D 300 E 11 F 30 G 94 Transformer part no.

Power Valve: Economy Valve Series VEX5

Port 3 (R) 1/4 (P1) Refer to page 2449. 2 x port size Port 2 (A),1 (P) 2 x d Mounting hole A (Air operated) For bracket mounting Max. O Min.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot Conduit terminal with surge voltage suppressor TZ Conduit terminal

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

Note Diaphragm Assembly Note4) Tightening torque(N.m) Product number At normal At high At normal At high temperature temperature temperature temperature VXF(A)21A(A,B,C,D) VXF-21AA VXF-21AC 5.26.3 6.37.3 VXF(A)22A(A,B,C,D) VXF-22AA VXF-22AC VXF(A)23A(A,B,C,D) VXF-23AA VXF-23AC 24.529.5 29.534.3 VXF(A)24A(A,B,C,D) VXF-24AA VXF-24AC VXF(A)25A(A,B,C,D) VXF-25AA VXF-25AC 12.515 1517.5 VXF(A)26A

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

VP4

Product Profile: ISO Standard Solenoid Valve: Size 1, 2 Rubber Seal Series VP7-6/7-8 Solenoid valve conforming to ISO standard Size (1)/VP7-6 Size (2)/VP7-8 (Rubber seal) Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position Closed center (FHG-D) Exhaust center (FJG-D) Double pilot check (FPG-D) Pressure center (FLG-D) Courtesy

VP3145/3165/3185

DIN terminal: VP3185-D Conduit terminal: VP3185-T A B A B VQZ VZ Conduit terminal with indicator light (TL) G 1/2 Max. 11 Applicable cable 6 to 12 VS Light Light VFN Rc 1/4 G 1/2 Rc 1/4 ( ): With indicator light (TL) 4-10-7 8 Made to Order Specifications: Series VP3145/3165/3185 Main Valve Double Acting Type: -X80/X81 How to Order 1 D Z A N X 06 5 1 4 VP31 81 80 Type of actuation Body size

Digital Flow Switch (Remote type sensor unit)

D: Contents revised in several places. E: Contents are added. F: Contents are added. G: Contents revised in several places. H: Contents are added. I: Contents revised in several places.[March 2017] J: Contents revised in several places.