22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125 13-/22-MXS25-150 795 MXS 1322Air Slide Table Dimensions: MXS25 1322Axial piping
18 17 17 10 29.5 29.5 21 24 14 T 1 2 KAH10-U04 22 14 28 22 16 22 Connection thread 1 4 3 8 KAH12-U02 KAH12-U03 24.5 19.5 30.5 25.5 19 VMG 19 12 46.1 46.1 22 1 2 KAH12-U04 24.5 16.5 22 28 Reference dimensions after Uni thread installation.
306 13-/22-MXQ2010 13-/22-MXQ2020 13-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure
-: 50 to 400 mm/s +1.4 0 Bottom mounting style/Front mounting style Mounting style 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Grade 2, 21-: Grade 3 11-/22-: Grade 1 Grease Particle generation grade (Refer to front matter pages 13 to 22 for details.)
9 17 1 2 22 3 8 KQ2L13-03S 33.5 21.7 38.5 36 62 28 17 9.6 1 2 KQ2L13-04S 37.5 40 22 Reference dimensions after R thread installation.
10 M22 x 1.5 182(196) 22 22 80 Rc 3/8 60.5 Up to 300 301 to 1400 20 108(122) 37 60 16(20) 71 110 M12 x 1.75 depth 22 10 M26 x 1.5 182(196) 22 22 100 Rc 1/2 71 Up to 300 301 to 1500 CP95 Note) ( ): Denotes the dimensions for long stroke.
22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 65 80 25 to 1800 100 39 15 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 80 100 25 to 1800 Rod series Tolerance (mm) B-series rod C-series rod Bore size (mm) Bore size (mm) LH LX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 66 220 0.025 0.064 0.15 0.18 40 40 40 36
22 60.5 20 100 Rc1/2 22 22 71 20 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 MB MB1 CA2 CS1 For dimensions other than listed above, refer to the dimensions with rubber bumper
16 24 43 45 39 80 62 80 H M 14 8 18.5 14 42 A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19 22 12 34 22 Connection thread Reference dimensions of R thread after installation.
6 12 9 16 14 9.5 16 19.7 6H9 16 M5 x 0.8 M16 x 1.5 M6 x 1 18.3 6.2 24 8 5 10 13 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 32 11 62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case
1 49.5 55.1 (Lead wire length) Approx. 300 37.6 61.7 [68.7] Pg7 105.8 86 [88.2] 94.9 87.5 81 18 18 18 18 18 18 18 18 28 4.3 28 28 28 4.3 9.5 9.5 4.3 4.3 9.5 9.5 22 22 22 22 Note) Refer to page 340 for dimensions of connector types. 135 Series SY3000/5000/7000/9000 Dimensions: Series SY5000 [ ]: AC 2 position double Grommet (G), (H): SY5240(R)-02 G H (A, B port) 1/4 18 9.5 (Light/surge voltage
For other specifications, refer to page 6-4-22.
solenoids available) Lead wire length (L1/L2/L3) 24 24 stations 22 22 stations Symbol Type 1 0.6 m 2 1.5 m 3 3 m SI unit output polarity, End plate type (S6m) Refer to page 63.
(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..
18 25 14 17.5 9.5 M8 x 1.25 18 32 20 M14 x 1.5 30 22 1/4 37 15 106 50 19 50 25 9 73 53 14H9 24 20 28 17 17 13 M10 x 1.5 20 35 22 M16 x 1.5 30 26 3/8 43 18 112 63 21 55 28 8 80 60 16H9 28 22.4 30 17 17 13 M10 x 1.5 22 40 25 M18 x 1.5 30 26 3/8 47 20 116 80 26 65 M12 x 1.75 32 8 100 75 18H9 32 28 32 22 20 15 26 45 29 M22 x 1.5 35 30 1/2 57 22 127 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 90
Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 24 26 27 22 22 24 26 27 22 10 to 16 10
If rotational torque are applied unavoidably, refer to page 22.
25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150
CA2 B port Without auto switch With auto switch Bore size (mm) ZZ S ZZ S CS1 Stroke A Stroke B 125 334 197 334 197 140 Series CQS 334 197 334 197 C76 Bore size (mm) Stroke Both of S1, S2 160 363.5 213 363.5 213 B1 A B2 L 180 401 231 393 223 C85 12 42.5 22 (52.5) 3.5 17 (27) (22) 200 411 241 393 223 5 to 30 16 42.5 22 (52.5) 3.5 17 (27) (22) 250 484.5 283 C95 S + Stroke (A + B) 20 50 26
22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 100 19 15 25 to 1800 Rod series Tolerances (mm) B series rod C series rod Bore size (mm) Bore size (mm) LH LX E E A MA D K G H ZZ MM A MA D K G H ZZ MM 32 32 34 25 22 18 7 14 66 220