2/3 Port Valve

Refer p.4.1-20, 4.1-21 for specifications and models.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

325 337.5 337.5 93.3 103.3 113.3 123.3 133.3 143.3 153.3 163.3 173.3 183.3 193.3 203.3 213.3 223.3 233.3 243.3 253.3 263.3 273.3 283.3 293.3 303.3 313.3 24 19 20.5 21.5 22.5 23.5 18.5 20 21 22 23 24.5 19.5 20.5 21.5 22.5 24 19 20 21 22 23.5 18.5 21 Series SJ2000/3000 Dimensions: SJ3000 with Elbow Fittings SS5J3-60FD U 1 2 L B Stations (Pitch) [External pilot spec.]

Step Motor Controller

(N.C.) 21 Series LECP6 Series LECA6 Step Data Setting 1. Step data setting for positioning 2. Step data setting for pushing The actuator moves toward the pushing start position, and when it reaches that position, it starts pushing with less than the set force. The following diagram shows the setting items and operation.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

KF

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

JA/JAH/JB/JS

23 25 29 5.5 7 8 10 13 13 17 17 17 19 19 19 22 24 24 27 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 10 10 11 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 5.3 6.8 7.8 9.8 12.5 12.5 16.5 16.5 16.5 18 18 18 21 23 23 26 CE2 ML2B C J G5-S CV MVGQ CC RB Floating Joint Replacement Parts Dust cover Order with the following part no. if dust cover is damaged.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Speed Controller with Indicator

63.1 61.7 54.6 53.2 24.5 19.2 45 AS331FS1-G03-08 8 13.2 38 23.5 52.2 14.2 46 AS331FS1-G03-10 10 15.9 17.4 23 42.2 28.1 50.3 15.6 47 AS331FS1-G03-12 12 18.5 43.5 28.3 52.2 17 49 AS431FS1-G04-10 10 1/2 27 15.9 17.4 18.8 25.6 47.9 26.1 61.2 64.1 62.5 55.1 53.5 15.6 26 19 80 AS431FS1-G04-12 12 18.5 21 26.2 49.8 28.3 63.4 17 82 10.4 12.9 16.6 20.2 36.6 21.4 50.1 13.3 3/8 21 55.4 54 47.9 46.5

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

ZP

Model d H B C NTJ-015A 9.2 8 4 M8 x 1 M6 x 1 M5 x 0.8 SNJ-006A 9.2 8 3 SNJ-010A 3 12 13.9 SNJ-015A 16.2 14 3 M10 x 1 M14 x 1 SN-015A 21.9 19 5 Pad diameter: 10 to 50 ZP10B to 50B Model Size B06 A 6 ZP06B B 7 C 2.5 D 7 E F 13 G 3.3 H 9.1 Y 4 B08 8 ZP08B 9 2.5 7 13 4.7 10.1 4 B10 10 ZP10B 12 4 13 11.7 16 5.5 13.8 5.5 B13 13 ZP13B 15 4 13 14.2 18.5 8.7 19 7.5 B16 16 ZP16B 18 4 13 15.7 20 9.9 21

JA/JAH/JB/JS

23 25 29 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 10 10 11 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 5.3 6.8 7.8 9.8 12.5 12.5 16.5 16.5 16.5 18 18 18 21 23 23 26 CE2 ML2B C J G5-S CV MVGQ CC RB Floating Joint Replacement Parts Dust cover Order with the following part no. if dust cover is damaged.

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-21 5-21 HRX-OM-X010 Chapter 5 System Operation 5.3.19 Initial Setting screen 4 POWER ON 1 2 Figure 5-22 Initial Setting screen 4 Table 5-19 Initial Setting screen 4 No. Item Descriptions Setting Range Factory Default Allows the selection of automatic collection stop mode. AUTO: Collection operation stops automatically when cllection finished normally.

SFOD-OMT0009CN

No. 1 11 21 31 2 12 22 32 3 13 23 33 4 14 24 34 5 15 25 35 6 16 26 36 7 17 27 37 8 18 28 38 9 19 29 39 10 20 30 40 I/O1 I/O2 38 No.SFOD-OMT0009CN-B (1) I/O1 No. 1 +COM1 DC24V24V IN0IN10SETUPHOLDDRIVERESETSVON OUT0OUT8BUSYAREASETONINPSVRE*ESTOP*ALARM 21 +COM2 2 IN0 22 IN1 Bit No. ( 512) 3 IN2 23 IN3 Bit No.

SFOD-OMT0010

Signal name Description 1 +COM3 Connects the power supply 24 V to the input/output signals For BUSY1 to BUSY4, AREA1 to AREA4, INP1 to INP4, and ALARM1 to ALARM4. 21 +COM4 2 22 3 23 4 24 5 25 N.C. Unused 6 26 7 27 8 28 9 29 -Output side Pin No.

Electric Actuator / Low profile slider type

/See 3.3.Step data setting method on page 21 9) The step data position is not Check the step data. changed correctly after the return /See 3.3.Step data setting method to origin direction is changed. on page 21 10) Because the operation of the Check the step data.

VZ100/300/500

Mounting Screw Tightening Torques M3: 0.8 Nm 4-6-34 35 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Manifold for Internal Pilot How to Order Applicable solenoid valve VZ512--01 VZ512M--01 VZ522--01 Z522M--01 Applicable blanking plate assembly DXT201-15-4A Type 20/21 VV3Z5 20 05 1 A port A port P/R port thread type Manifold P port Stations 20 21 Type 20 Type 21

VZS

(n) 7 stations (15 stations) New D-sub connector VQ7 Conventional D-sub connector (2) (1) Lead wire color Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red Brown Pink Gray Black White 8 stations (Max. 16 stations) Terminal No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 Dot marking None None None None

Rotary Clamp Cylinders

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 50 7 46 13 350 345 63 17 46 25 350 531 40 6 21 7 200 198 20 6 10 2 100 133 25 7 10 3 100 153 32 7 21 5 200 166 16 32

ARM10/11

L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.