Stroke+191 (23) Rreference plane (25) Stroke+15 130 21 63.5 Stroke+214 130 LG-240Z-Y 1 LG-240Z-Z 2 120 (23) 86 (90) Stroke+15 60 Stroke8 (For 100 to 150 strokes) 192 (For 200 to 1000 strokes) Stroke+191 Stroke+214 Select the unit specifications after confirming the Y and Z axes specifications. 1 ) For detailed dimensions and specifications, please refer to the body dimensions.
Made to Order (For details, refer to pages 16 to 21.)
.63 Pnol z5tt 5.t2 (lf)IYs.lzU t .38 Ll3 1.20 3.41 l{/a N/A .21 1.25 PR0220tt 8. t4 8.34 {lt} I /4-12 UNt .38 Ll3 1.20 5.03 N/A N/A .21 Ll2 .63 PR0225tt 8 . l 4 8.34 (lf)IYs,l?U f .38 Ll3 r.20 5.03 N/A N/A .21 1.25 .DJ Notes: 1.
Up to 700 45 25 150 Up to 700 25 45 MK(2) 1500 32 150 Up to 1000 32 50 RS Q G 40 200 Up to 1000 40 60 Note 1) The cylinder performance may not as expected when stroke is shorter than recommended stroke even they are available.
Lead wire color Dot marking Orange Orange Yes Black Black Yes Green Green Yes Yellow Yellow Yes Brown Black Brown Orange Yellow Purple White White Red Yellow Red Black White Black 14 15 Pink 16 Blue 17 20 Red 21 22 Pink Red 23 Gray Red 24 25 18 Gray 19 13 14 15 17 Pink 19 Gray 21 23 16 18 Pink Yes 20 Gray Yes 22 24 Terminal no. Lead wire color Dot marking Terminal no.
Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.
Panel mounting hole Push button (Extended) VFM350-02-32R/B/G/Y (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. (EXH port) 2-4.2 mounting hole (SUP CYL port) 1.7 mm O.T. 6.5 mm T.T. Panel mounting hole Push button (Flush) VFM350-02-33 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.
E N S I O N S A I R P I L O T O P E R AT E D T Y P E (N)VBA2200-03, (N)VBA4200-04 mm Model Port Size A B C D E F G H J K L (N)VBA2200-(N)03 38 300 126.5 53 118 98 44 45 60.5 18 15 (N)VBA4200-(N)04 12 404 167 96 150 130 62.8 62 90 17 15 40 Courtesy of Steven Engineering, Inc. !
Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N)
Optional Standard 1 2 3 Stainless steel Body Brass Tube assembly Stainless steel Coil assembly VDW11/21: Stainless steel, PPS, NBR VDW11/21: Stainless steel, PPS, FKM 4 Amature assembly VDW31: Stainless steel, FKM VDW31: Stainless steel, NBR 5 6 7 8 FKM O-ring (body) NBR Return spring Stainless steel Cover SPCE Clip Stainless steel 5 Compact Direct Operated Series VDW10/20/30 2 Port
Impact/Vibration resistance (m/s2) Note) 150/50 Enclosure Dustproof Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.
1/8 (Finger closing port) 45 DAuto Switch Mounting Groove Dimensions 2032.9 20 20 51 O S 11 11 Rc 1/8 (Finger operating port) 25 13 MHW2-32D1 Right angle finger type 5 6.45 5.5 44 21 14 20 7 18 4-M6 x 1 (Thread for mounting attachment) 34 27 51 12-10-21 21 Series MHW2 Dimensions MHW2-40D Flat finger type (Standard) 30 2-M8 x 1.25 thread depth 15 (Mounting hole) 27.5 104.5 4-M8 x 1.25 thread
27 51 12-10-21 21 Series MHW2 Dimensions MHW2-40D Flat finger type (Standard) 30 2-M8 x 1.25 thread depth 15 (Mounting hole) 27.5 104.5 4-M8 x 1.25 thread depth 16 (Mounting thread) 2-M8 x 1.25 thread depth 15 75.5 Bottom through hole dia. 6.8 (Mounting hole) (Mounting hole) 56.5 37.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)
MHK MHS 32.9 20 20 51 O S 11 11 Rc(PT)1/8 (Finger opening port) MHC2 25 13 MHT2 5 MHW2-32D1 MHY2 6.45 5.5 Right angle finger MHW2 MRHQ Auto switch 44 21 14 MHW2-32D.SMHW2, #3 MHW2-32D1.SMHW2, #6 20 18 7 27 4-M6 X 1 (Thread for mounting attachment) 34 2.8-21 51 Series MHW2 Dimensions MHW2-40D Flat finger (Standard) 30 2-M8 X 1.25 Depth 15 (Mounting thread) 27.5 104.5 4-M8 X 1.25 Depth 16
MSZ Mass CRQ2X MSQX (g) MRQ 1 2 3 7 Size Basic type 75 105 150 250 High precision type 80 115 165 265 Note) Excluding the mass of auto switches Clean Series Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.
Measure B Moment of inertia (kgm2) Size 7 3 2 1 0.0001 0.001 0.01 0.1 MSQB7A MSQB3A MSQB2A MSQB1A 1 0.2 0.3 0.4 0.6 0.5 1.0 0.9 0.8 0.7 Rotation time (s/90) Model With external shock absorber Full size (Picture of MSQB1A) With internal shock absorber 73.5 50.5 60 56 A 34.5 41 30 28 A B For high energy 34.5 30.5 28 25 C For low energy With adjustment bolt 20.5 23 18 16 D mm Mass (g) 70 105 150
27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.
21 1.9 79.6 21 73 42 B B B B 11.1 31.5 6 x 1/4" {P(1), EA(5), EB(3) port} 55.2 M5 x 0.8 (External pilot port) 21 (Pitch) P = 19 Stations 1 n 2 81.5 56.2 52.8 A A 9.4 41 28.9 B B 7 2n x 1/4" {A(4), B(2) port} (Pitch) P = 19 24 L-type plug connector with cover (LL) 53-SS5Y7-42Terminal type (TT) 53-SS5Y7-42L (Lead wire length) 120.5 37.1 L (Lead wire length) 81.5 Stations Stations 81.5 53.5
0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.
0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.