Electro-Pneumatic Regulator IT1000/2000/4000 VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.
0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL ARX20 ARX21
VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.
When working with delicate materials such as Silicone wafers, magnetic disks, or LCD substrates, non-shock actuation must be balanced with high speed/throughput. The REA provides the features needed to allow rapid transfer with a speed of up to 300mm/sec but virtually eliminates shock impact. Integrated cushion spears allow smooth acceleration and deceleration, while also simplifying construction
N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.
D1 L1 Urethane 2.5 Kl 2 3 11 3.2 4 6 8 8 10 KQ2L06-10 38.5 19 KQ2L23-04 KQ2L04-06 KQ2L04-08 7 17 25 26 35 13.5 14.5 22 18 24 15.5 9.6 10 8 4 10.4 16 18 4.2 4.2 Ml 6 KQ2L06-08 12.8 10 19.5 30.5 11.4 9.0 12 17 20 22.5 Hl 8 10 KQ2L08-10 15.2 12 23 33.5 21.6 14.9 20 20.5 18.5 12 KQ2L08-12 40.5 27 26 Dl 10 12 KQ2L10-12 18.5 17 26.5 42 35.2 25.0 29 30 21 12 16 KQ2L12-16 20.9 17 28.5 49.5 50.2 39.7
(same side) n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 Different sides 120 90 2 pcs. "n" pcs. 2 pcs. "n" pcs. 2 pcs.
(mm) DQ HQ HP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 2.6 4.8 31 12 7 26 10 7 31 12 9 26 10 9 10 10 26 26 2.6 4.8 32 13 7 32 13 9 DQ HQ HP ZP ZC(D)UKD16 ZC(D)UKR16 12 12 31 31 15 12 33 18 16 37 28 20 44 DQ HQ HP 12 18 12 15 36 15 18 20 41 12 16 37 ZC(D)UKD20 ZC(D)UKR20 ZP 12 33 12.5 18.5 33.5 23 14 38 39.5 28 14 38 34 29 53 35 22 27 24 48 DQ HQ HP ZC(D)UKD25
Option Bracket J: With drain guide (Option) female thread T: With element service indicatior Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35
TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100
kpa 400 kpa [L/min] [L/min] PFMB7202(2000L/min) 200 kpa [kpa] 400 kpa [L/min] -65No.PF-OMP0001CN-F IN 3F.S.8 cm IN OUT [cm] -66No.PF-OMP0001CN-F PFMB7501/7102/7202 2x A B D E F H K L N PFMB7501/7102 70 30 43.7 37.2 15 14 26 18 13.6 PFMB7202 90 35 49.2 42.7 17.5 24 31 28 16.8 S T U V W PFMB7501/7102 24 22 32 40 50 PFMB7202 30 30 42 48 58 -67No.PF-OMP0001CN-F (ZS-33-D) (ZS-33-F) -68No.PF-OMP0001CN-F
RB1411 70 47 12 78.3 19 12 M6 X 12 27 13 25.5 M6 X 25 MXS25 MXS-BT25 RB1412 80 54 15 79.3 19 12 M8 X 16 33 17 25.5 M8 X 25 Mounted to body MXS-BT 8, 12, 16 MXS-BT 20, 25 WIDTH ACROSS FLATS E D WIDTH ACROSS FLATS E B C B D WIDTH ACROSS FLATS F C A A P P Mounted to table HOW TO ORDER H Q MXS 12 BS I J Bore size (stroke mm) 8 12 16 20 25 10,20,30,40,50,75 10,20,30,40,50,75,100 10,20,30,40,50,75,100,125
(n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 95 100 D-M9A 85 15 80 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 95 + 40 (n 4) 2 100 +
(Part no.: AS-T-1) 100 200 205 300 400 M5 standard 1/8 standard Applicable tubing O.D. 1/4 standard Metric sizes 23 04 06 08 10 12 Inch sizes 3/8 standard 3.2 01 03 05 07 09 11 13 1/8 1/2 standard 4 5/32 6 3/16 With One-touch fitting 8 1/4 10 5/16 12 3/8 1/2 Use 1/8 tubing.
(12, 14 port) 10.5 (2, 4 port) VS4 85.5 72.5 VQ7 10.5 PE port 29 14 SMC EVS M5-2 port 12, 14 port 1/8, 1/4-2 port 2, 4 port 1/8, 1/4-2 port 3, 5 port 21 21 VFN 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35
4 12 4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6 4 12 8 8 0 Note 1) ( ): D-A96, A9V Note 2) When setting an auto switch, confirm the operation and adjust its mounting position.
ring Flange Hexagon socket head cap screw Piston rod y Except 12, 16 Except 12, 16 Bumper Ring nut Scraper pressure Rubber magnet u i o !
Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.
Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications