Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 1200mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m, Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 1200mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 5m, Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 1200mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 1200mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 5m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 1200mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 1200mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 2m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: Connector, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 1200mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 5m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: -, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 1200mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: -, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 1200mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 5m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: Connector, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 1200mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: Connector, Option: -

A

Piston B switching pressure (OpenClosed) 0.5 Secondary pressure MPa 0.4 0.3 0.2 Type Y DIN terminal 0.1 0 0.6 0.1 0.2 0.3 0.4 0.5 0.7 0.8 0.9 1.0 Primary pressure MPa Needle valve flow characteristics Symbol Conditions: Primary pressure 0.5MPa 1800 2000 AV5000 1600 2 1(P) 2(A) 1400 Air flow l/min (ANR) AV4000 1 1200 1000 3(R) 800 AV3000 600 AV2000 400 Accessories/Pressure gauge 200 0 Pressure

,,: ,.

R6teren@ torque sDecificalion Tabl *3 '11 lflU / [[U $enies D0I/$[EfirHu Union 'Y': KVU*_ OO l02C / lffi / lflP $mics D0I/8[EthHt Caps: KQ2C Fitting Boot: KR 6D r-'---t-1 Plugs: KVP 1 2 D0r/$uffnFll|lnm tul $enie Cartridge: KVOA DOT Specilications Tabl 1 Not alaihu at lim6 of cablog prinling, Corbult hdory br a\bilability.

EX500-GPR1A.eng

1000 400 200 100 Transmission rate [kbps] 9.6 19.2 45.45 93.75 187.5 500 1500 3000 6000 12000 Lower-level bus Core cross-section 0.34mm2 or more Wire diameter 0.64mm or more 10 11 The wirings are described in the following order.

Soft Start-up Valve AV2000/3000/4000/5000

Piston B switching pressure (OpenClosed) 0.5 Secondary pressure MPa 0.4 0.3 0.2 Type Y DIN terminal 0.1 0 0.6 0.1 0.2 0.3 0.4 0.5 0.7 0.8 0.9 1.0 Primary pressure MPa Needle valve flow characteristics Symbol Conditions: Primary pressure 0.5MPa 1800 2000 AV5000 1600 2 1(P) 2(A) 1400 Air flow l/min (ANR) AV4000 1 1200 1000 3(R) 800 AV3000 600 AV2000 400 Accessories/Pressure gauge 200 0 Pressure

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

Description Material Note 1 Body A Zinc alloy 2 Handle Brass Electroless nickel plated 3 Body B Brass Electroless nickel plated 4 Needle Brass Electroless nickel plated 5 Needle guide Brass Electroless nickel plated (1) 6 Seat ring Brass Zinc chromate plated (3) Meter-out Steel (2) 7 Lock nut Black zinc chromate plated Meter-in 8 U seal HNBR 9 O-ring NBR 10 O-ring NBR 11 O-ring NBR 12 01

3

VXS VXS 2) Shut off the power supply. 11. To control the fluid in the tank, connect the piping a little higher than the bottom of the tank. 3) Dismount the product. VXB 2. Low frequency operation Switch valves at least once every 30 days to prevent a malfunction. Also, in order to use it under the optimum state, conduct a regular inspection once a half year.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead [mm]: A (LEJS40, 16mm; LEJS63, 20mm), Stroke: 1500mm, Motor Option: w/o Option, Vacuum Port: Left, Cable Type: S (Standard Cable), Cable Length: 2 (2m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead [mm]: A (LEJS40, 16mm; LEJS63, 20mm), Stroke: 900mm, Motor Option: w/o Option, Vacuum Port: Left, Cable Type: S (Standard Cable), Cable Length: 5 (5m), Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input)

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead [mm]: LEJS40, 16mm; LEJS63, 20mm, Stroke: 1500mm, Motor Option: w/o Option, Vacuum Port: Left, Cable Type: Standard Cable, Cable Length: 2m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: -