SV

200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600

Support Guide/11-LEFG Series

Dimensions: Ball Screw Drive 11-LEFG16-S 4 x M4 x 0.7 thread depth 6.4 3H9 (+0.025 0 ) depth 3 24 40 (72) 39.4 28 3.5 3H9 (+0.025 0 ) depth 3 (37) A (Table traveling distance) 36 L 7 7 27 40 40 33 (40) 21.7 20 n x 3.5 Vacuum port M5 x 0.8 x 5 34 B D x 100 (= E) 100 F Dimensions [mm] Model L A B n D E F 11-LEFG16-S-50 144 57 130 4 15 11-LEFG16-S-100 194 107 180 11-LEFG16-S-150 244 157 230

JXCx-OMY0004

/s 4-7 DWORD Position Basic parameter "Stroke(-)" "Stroke (+)" (5, 11, 14) 0.01mm 8-9 WORD Acceleration 1 to Max ACC of the basic parameter (5, 11, 14) 1mm/s2 10-11 WORD Deceleration 1 to Max DEC of the basic parameter (5, 11, 14) 1mm/s2 12-13 WORD Pushing force (5, 11, 14) 1% (Thrust setting 14-15 WORD Trigger LV (5, 11, 14) 1% value) 16-17 WORD Pushing (5, 11, 14) 1mm/s speed 18-19 WORD

Rotary Cylinder Series MRQ Size: 32, 40 1

Size/Standard stroke (mm) Rotating angle 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to pages 11-10-18 to 11-10-19 for middle and long strokes other than standard stroke.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

10, 15, 25 10, 15, 20 125 to 160 125 to 160 125 to 200 12 to 100 80 to 100 63 to 100 40 to 100 32 to 100 40 to 100 32 to 100 32 to 100 20 to 63 20 to 50 20 to 80 16 to 32 10 to 32 12 to 25 20 to 40 20 to 40 20 to 40 20 to 40 32 to 63 25 to 50 25 to 40 25 to 40 6 to 32 32, 40 Bore size 6, 10 10 16 20 25 20 25 D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/

MXS

5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L

5 Port Solenoid Valve

mA or less Communication speed 21.6 to 26.4 VDC 100 mA or less Power supply for control Power supply voltage Internal current consumption 22.8 to 26.4 VDC 11 to 25 VDC 100 mA or less Power supply for output Power supply voltage Power supply for Power supply voltage communication Internal current consumption D-sub M12 None Built-in M12 Built-in Communication connector specification Terminating

CLQ

38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100

MNB

2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

XL

XLF-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

XLF-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Compact Cylinder with Lock Series CLQ

38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100

CJ2X/CUX/CQSX/CQ2X/CM2X

Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-CM2X20 10-CM2X25 10-CM2X32 10-CM2X40 11-CM2X20 11-CM2X25 11-CM2X32 11-CM2X40 Relief type Vacuum suction type 1/8 1/4 25, 50, 75, 100, 125 150, 200, 250, 300 Non-lube Double acting single rod 1/8 1/4 174 Low speed cylinder 10CM2X/11-CM2X Specifications

Compact Cylinder with Lock Series CLQ

FD FT ML1C A A B B 36 46 43.5 53.5 53 63 91 101 107.5 117.5 126 136 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 FV 63 101 46 9 9 M 80 117.5 53.5 11 11 4 x FD G B + Stroke L FT FX FZ A + Stroke 100 136 63 11 11 Bore size (mm) FV FX FZ G L L1 M 63 80 100 80 99 117 92 116 136 108 134 154 38 43 50 8 10 12 33.5 43.5 43.5 60 77 94 Rod end nut L1 Double clevis style: CLQD/CDLQD 4 x N Cap

CXS

Stroke (mm) up to 10 up to 30 up to 75 up to 100 up to 50 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 Max. speed (mm/s) 7 8 9 6 10 15 Selection graph 10 11 12 13 14 15 17 16 20 25 32 The maximum speeds for 10 to 32

CLQ

Flange Style CLS A + Stroke L FT B + Stroke G 4-FD FZ FX Without auto switch With auto switch Bore size (mm) Stroke range FD FT FV FX FZ G L L1 M CLQ A A B B 92 36 10 to 50 63 9 9 80 92 108 38 18 43.5 60 46 102 102 46 75, 100 MLGP 106.5 43.5 10 to 50 80 11 11 99 116 134 43 20 53.5 77 53.5 116.5 116.5 53.5 75, 100 RLQ 125 53 10 to 50 100 11 11 117 136 154 50 22 53.5 94 63 135 L1 Rod end nut

48

L5 600 mm stroke or less 600 mm stroke 200 200 100 100 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8 11 300 300 250 250 Overhang: L6 [mm] Overhang: L6 [mm] 500 mm stroke or less 200 200 600 mm stroke or less m L6 150 150 100 100 600 mm stroke 50 50 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8 11 2 Series LEL These graphs show the allowable

KQ2

(inch) Min. port size D Note) Mass (g) D L M1 M2 Model MS 5 32 KQ2H01-03 KQ2H01-07 KQ2H03-05 KQ2H03-07 KQ2H05-07 KQ2H07-09 KQ2H07-11 KQ2H09-11 KQ2H09-13 KQ2H11-13 10.4 13.2 11.4 13.2 13.2 15.2 17.9 17.9 21.7 21.7 32.5 34.5 34 34.5 34.5 38.5 42 42 44 44 16 17 16.5 17 17 18.5 21 21 22 22 3 5 4 4 5 6 11 11 16 17 1 8 Applicable tubing 15.5 2.5 Applicable tubing 1 4 LQ 3 16 5 32 16 3 1 4 1 4 5

Compact and Lightweight

ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1

RHC

n 20 25 32 40 50 63 80 100 Different sides Same side Different sides Same side D-C7/Z80 D-C73C/C80C RS H A 8 10 9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15