Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 100mm, Motor Option: w/Lock, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 400mm, Motor Option: -, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 200mm, Motor Option: -, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 300mm, Motor Option: -, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 250mm, Motor Option: w/Lock, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 500mm, Motor Option: w/Lock, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 800mm, Motor Option: -, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 50mm, Motor Option: -, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 350mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: w/1pc, Included, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 550mm, Motor Option: -, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Table of Contents

Cylinder port is located at U side of body. 1(P) SUP port 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread P = 11 2-C6 3(R) EXH port Dimensions 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Formula L1 = 11n + 15.5, L2 = 11n + 60 n: Station (Maximum 16 stations) L n L1 L2 (L3) (L4) 26.5 71 100 110.5 37.5 82 100 110.5 48.5 93 112.5

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

0.4

Station 9 SQ SOL.B SOL.A 23 10 Station 10 SOL.A VFS SOL.B 24 11 Station 11 SOL.B SOL.A 25 12 Station 12 VFR VV5Q21 COM. () Orange Red (+) 13 VQ7 Positive COM spec. Negative COM spec. The total number of stations is tabulated starting from station one on the D-side. Note) When using the negative common specifications, use valves for negative common. (Refer to page 419.)

Cylinder with Lock Series MNB

72 37.5 15 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114

VZ100/300/500

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Bore size (mm) Model Bore size (mm) Port size Lubrication Action Standard stroke (mm) Auto switch mounting Cushion Rubber Air Model Relief type Vacuum suction type 10-/21-CJ2W10 10 15, 30, 45, 60, 75, 100, 125, 150 Double 10-/21-CJ2W16 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Non-lube Band mounting only Standard M5 x 0.8 acting, 11-/22-CJ2W10 10 15, 30, 45, 60, 75, 100, 125, 150

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 18 22 26 32 3 4 5 6 13 14 17 23 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.