MXS

0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 MGG 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 MGC 0.01 0.01 0.005 MGF 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load (N) CY1 MY1 3.11-9 Series MXS How to Select Selection Flow Chart Formula and Data Selection Example Operation conditions 1 Model used Cushion style Work mounting position

Vacuum System Peripherals:

) 18 mm (VZ400/500) VZ100 ZF M5 x 0.8 Vol. 4 0.11 to 3.0 VZ300/500 ZP M5 x 0.8 , VQZ200/300 Vol. 4 1.7 to 4.5 ZCU 1 8 1 4 3 port solenoid valve Series VX31/32/33 (2) (1) (2) (1) AMJ to 1 8 3 8 0.29 to 1.6 Vol. 17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol. 4 1 8 0.47 to 0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to 1 8 3 8 0.58 to 11 Vol. 4 3 port solenoid valve

Fieldbus System

Bottom Ported How to Order Manifold SS5Y S6 10 3 Q C6 2 05 U Refer to the SY3000/5000 series catalog (CAT.ES11-103) for Type 11/Bottom ported dimensions.

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

Air Slide Table Series MXQ

11 13 18.5 MXQ-BS12 (L) M5 x 16 M10 x 1 MXQ16 (L) M5 x 16 46.7 22 7 11 14 36 1.4 17 23 13.5 13.5 16 21 MXQ-BS16 (L) M6 x 20 MXQ20 (L) M6 x 18 67.3 35 11 13 19 46 12 22 27 17.5 17 22 25 M14 x 1.5 MXQ-BS20 (L) M8 x 20 MXQ25 (L) M8 x 18 67.3 35 12 16 19 54 12 22 33 18 19 22 31 M14 x 1.5 MXQ-BS25 (L) 1) Size of hexagon socket head cap screw 2) It is also available in the symmetric type.

MXS Series Air Slide Table

3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

> 4.1 [46] [54.5] 22.5 1 32 P P 5.5 B B A B A B A B A B 4.7 35 23.5 44.4 <45.1> 10.2 26 3 R R A A G: Approx. 300 H: Approx. 600 lead wire ( length ) (Pitch) P = 10.5 13.5 24.3 33.2 (M5 port) 2n2-One-touch fitting (ports A, B) Applicable tube O.D.: 4 6 2n1-M5 x 0.8 (ports A, B) L2 [rail mounting hole pitch 12.5] (5) L1 DIN rail holding screw DIN rail (VZ1000-11-1-) L type plug connector M

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

For response time, refer to the graph below. 400 350 Response time (ms) 300 250 200 150 100 50 0 1 2 3 4 5 6 7 8 9 10 11 12 * This graph shows delay times between gateway unit and controllers. Fieldbus network delay time is not included.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) + + + + R port P, E port R: External pilot style H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector -+ + SYJ52R is only for manifold use.

PEEK

N.C. 3 2 1 19 2 x 3.5 Mounting hole (16) 11 24.5 21 12 Plug IN port 5 (Lead wire length) 27 LVM10R4 36 300 16 13 UL1007 AWG22 1 2 3 N.C. N.O. (16) (16) 11 OUT port IN port 10 Push type Manual override 73.5 LVM10R6 N.O. N.C. 3 2 1 25.5 (16) N.O.

MXW

220.5 MX A 51 31 31 31 31 MTS B 104 124 149 174 199 MXW12 W 31 11 11 11 11 MY V 124 144 169 194 219 A 59.5 34.5 34.5 34.5 34.5 34.5 W V CY B 135.5 160.5 185.5 210.5 235.5 260.5 MXW16 W 39.5 14.5 14.5 14.5 14.5 14.5 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

VZ1000

273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 333.5 325 312 12 16 360.5 350 328 16.5 17 373 362.5 344 14.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

Digital Flow Switches

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 11 Digital Flow Switch Series PF2A For Air Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Air Cylinder

11 14 17 17 11 12 15 19 19 501 to 800 11 11 13 16 601 to 1200 601 to 1200 751 to 1400 751 to 1500 M10 x 1.25 M12 x 1.75 M12 x 1.75 102 116 10 10 100 Stroke range Bore size Without rod boot With rod boot MM N P RT RY S (mm) (mm) H ZZ d e f h L ZZ 40 50 63 80 501 to 800 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 51 58 58 71 72 146 159 170 204 215 56 64 64 76 76 43 52

Secondary Batteries

mm) 20 mm 50, 100, 150, 200, 250, 300, 350, 400 450, 500 1000 25 mm 15 32 mm 20 25 32 1500 40 mm 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 Note 1) For strokes exceeding the maximum, consult SMC.

LJ1H

Lateral empty weight deflection 2 2 1 1 Horizontal empty weight deflection 0.5 0.5 Lateral empty weight deflection 0.2 0.2 0.1 0.1 200 300 500 1000 100 200 300 500 1000 100 Load point distance (mm) Load point distance (mm) 45 AC Servo Motor Driver (Pulse Input Type) Incremental Type Series LECSA Absolute Type Series LECSB Series LECSA Series LECSB Incremental Type/LECSA Page 98 Compatible

VQC

B 23 () (+) Gray Red 11 () (+) White Red AXT100-DS25-050 SOL. A When using a standard commercial connector, use a type 25P female connector conforming to MIL-C-24308. Station 11 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL. A Station 12 SOL.

Fieldbus System

Note 2) Refer to page 11 for dimensions of D-sub communication connector, external pilot and built-in silencer.

CQS

Long stroke Standard stroke Without auto switch With auto switch A Long stroke (mm) Standard stroke (mm) Bore (mm) C D E OA OB Q RA RB T H I K M N With/Without auto switch A L F 7.5 7.5 9 11 B 32 32 41 44 A L 3.5 3.5 4.5 5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 F 5 5 5.5 5.5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 6 8 7 12

3 Port Solenoid Valve Metal Seal Series VZ200 1

(Lead wire length) 300 (Lead wire length) 300 (Lead wire length) 67.1 75 Manual override (Non-locking) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 22 10 171 182 9 155 166 8 139 150 7 123 134 5 91 102 6 107